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    ELLIPSOMETRY SYSTEM
    211.
    发明公开
    ELLIPSOMETRY SYSTEM 审中-公开
    ELLIPSOMETRIESYSTEM

    公开(公告)号：EP2733477A4

    公开(公告)日：2015-04-01

    申请号：EP12811812

    申请日：2012-07-09

    Applicant: UNIV UTSUNOMIYA

    Inventor： YATAGAI TOYOHIKO ,  ABRAHAM J CENSE

    IPC: G01N21/17 ,  A61B3/10 ,  G01B9/02 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21 ,  G01N21/47 ,  G02B5/04 ,  G02B5/30

    CPC classification number: G01N21/211 ,  A61B3/102 ,  G01B9/02044 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01J4/00 ,  G01N21/4795 ,  G02B5/04 ,  G02B5/3083

    Abstract: An ellipsometry system and a detection unit thereof are capable of achieving miniaturization and price reduction associated therewith. The ellipsometry system includes the detection unit that: has an optical polarization element; separates an interference polarization beam obtained by causing the object-reflected polarization beam and reference reflected polarization beam to interfere with each other into a plurality of interference polarization beams on a wavelength basis; and detects the respective separated polarization components in each wavelength. The optical polarization element: has a birefringence characteristic including a first refractive index and a second refractive index; receives the separated interference polarization beams of the respective wavelengths in a wavelength order and in a parallel manner; separates the separated interference polarization beam of each wavelength, on a polarization component basis, while transmitting the same, and outputs the respective separated polarization components in each wavelength in the same direction but along different optical axes.

    Vorrichtung zur Messung der relativen Position zweier relativ zueinander bewegbarer Objekte
    212.
    发明公开
    Vorrichtung zur Messung der relativen Position zweier relativ zueinander bewegbarer Objekte 审中-公开
    设备，用于测量两个可相对移动物体的相对位置

    公开(公告)号：EP2713143A1

    公开(公告)日：2014-04-02

    申请号：EP13186046.2

    申请日：2013-09-25

    Applicant: SICK STEGMANN GmbH

    Inventor： Hopp, David

    IPC: G01D5/34

    CPC classification number: G01B11/14 ,  G01D5/345 ,  G01J4/00

    Abstract: Die Erfindung betrifft eine Vorrichtung zur Messung der relativen Position zweier relativ zueinander entlang einer Achse oder um eine Drehachse (D) bewegbarer Objekte mit einem Sender (12), der unpolarisiertes Licht aussendet, mit einem Polarisator (20), und mit wenigstens einem Empfänger (16), der die durch den Polarisator (20) durchtretende Lichtintensität misst, um ein positionsabhängiges Signal zu erzeugen, wobei vor dem Empfänger (16) ein Polarisationsfilter angeordnet ist und wobei sich der Empfänger (16) und der Polarisator (20) in Abhängigkeit von der relativen Position der beiden Objekte relativ zueinander bewegen, wobei der Polarisator (20) wenigstens zwei verschiedene Polarisationsrichtungen aufweist und wobei der Polarisator (20) auf einer Fläche angeordnet ist, welche gekrümmt ausgebildet ist.

    Abstract translation: 的装置（10）具有一发射器（12）也被配置成提供非偏振光与偏振器（20）。 配置为测量通过所述偏振器的光强度通过，以产生位置相关的信号的光接收器（16）。 偏振滤光器设置在接收器的前面安排。 接收器和所述偏振器为两个对象的相对位置的函数相对于彼此移动。 具有两个不同的偏振方向的偏振器布置在表面的所有其是弯曲上。

    Self-calibration procedure for optical polarimeters
    216.
    发明公开
    Self-calibration procedure for optical polarimeters 审中-公开
    偏光仪

    公开(公告)号：EP2405245A2

    公开(公告)日：2012-01-11

    申请号：EP11173305.1

    申请日：2011-07-08

    Applicant: OFS Fitel, LLC

    Inventor： Mikhailo, Vitaly ,  Westbrook, Paul S.

    IPC: G01J4/00 ,  G01J4/04

    CPC classification number: G01J4/00 ,  G01J4/04

    Abstract: A procedure for self-calibration of an optical polarimeter has been developed that eliminates the need for "known" input signals to be used. The self-calibration data is then taken by moving a polarization controller between several random and unknown states of polarization (SOPs) and recording the detector output values (D 0 , ..., D 3 ) for each state of polarization. These values are then used to create an "approximate" calibration matrix. In one exemplary embodiment, the SOP of the incoming signal is adjusted three times (by adjusting a separate polarization controller element, for example), creating a set of four detector output values for each of the four polarizations states of the incoming signal - an initial calibration matrix. The first row of this initial calibration matrix is then adjusted to fit the power measurements using a least squares fit. In the third and final step, the remaining elements of the calibration matrix are adjusted to a given constraint (for example, DOP=100% for all SOPs).

    Abstract translation: 已经开发了用于光学偏振计的自校准的步骤，其消除了对使用的“已知”输入信号的需要。 通过在多个随机和未知极化状态（SOP）之间移动偏振控制器并记录每个极化状态的检测器输出值（D 0，...，D 3）来进行自校准数据。 然后使用这些值创建一个“近似”校准矩阵。 在一个示例性实施例中，输入信号的SOP被调整三次（例如通过调整单独的偏振控制器元件），为输入信号的四个极化状态中的每一个产生一组四个检测器输出值 - 初始 校准矩阵。 然后调整该初始校准矩阵的第一行以使用最小二乘法拟合功率测量。 在第三和最后一步中，校准矩阵的其余元素被调整到给定的约束（例如，对于所有SOP，DOP = 100％）。

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