IMAGING APPARATUS AND METHOD
    211.
    发明公开
    IMAGING APPARATUS AND METHOD 审中-公开
    成像装置和方法

    公开(公告)号:EP2989432A2

    公开(公告)日:2016-03-02

    申请号:EP14717858.6

    申请日:2014-04-16

    Abstract: An imaging apparatus and method are provided for improving discrimination between parts of a scene enabling enhancement of an object in the scene. A camera unit is arranged to capture first and second images from the scene in first and second distinct and spectrally spaced apart wavebands. An image processing unit processes the images so captured and processes polarimetric information in the images to enable better discrimination between parts of the scene. An image of the scene, including a graphical display of the polarimetric information, may be displayed on a visual display unit thus enhancing an object in the scene for viewing by a user. Correlation parameters indicating, possibly on a pixel-by-pixel basis, the correlation between the actual image intensity at each angle of polarization and a modelled expected image intensity may be used to enhance the visibility of an object.

    Abstract translation: 提供了一种成像装置和方法,用于改善场景中能够增强场景中的对象的部分之间的区分。 摄像机单元(12)被布置为在第一和第二不同且光谱间隔开的波段中捕捉来自场景(8)的第一和第二图像。 图像处理单元(14)处理如此拍摄的图像并处理图像中的偏振信息,以便能够更好地区分场景的各个部分。 包括极化信息的图形显示的场景的图像可以被显示在视觉显示单元(16)上,从而增强场景中的对象以供用户观看。 可能在逐个像素的基础上指示每个偏振角处的实际图像强度(30)和模型化的预期图像强度之间的相关性的相关参数可以用于增强对象的可见性。

    AN APPARATUS FOR ENABLING WIDE-FIELD POLARIMETRY
    212.
    发明公开
    AN APPARATUS FOR ENABLING WIDE-FIELD POLARIMETRY 审中-公开
    VORRICHTUNG ZURERMÖGLICHUNGVON BREITFELDPOLARIMETRIE

    公开(公告)号:EP2946181A1

    公开(公告)日:2015-11-25

    申请号:EP14701017.7

    申请日:2014-01-16

    Abstract: A polarimetry apparatus comprising a plurality of flexible light conduits each having first and second ends, and a respective polarization modulator associated with each light conduit, wherein each light conduit is configured to receive incident light from a different predetermined region in space via the first end, and deliver said light to a detector unit via the second end, and wherein the polarization modulator is configured to modulate the polarization of the light to enable a partial or complete polarization state of the incident light to be determined by the detector unit for each light conduit.

    Abstract translation: 一种包括多个具有第一和第二端的柔性光导管的偏振仪,以及与每个光导管相关联的相应的偏振调制器,其中每个光导管经配置以经由第一端接收来自空间中的不同预定区域的入射光, 并且经由所述第二端将所述光传送到检测器单元,并且其中所述偏振调制器被配置为调制所述光的偏振,以使所述入射光的部分或完全偏振状态由所述检测器单元确定用于每个光导管 。

    IMAGE MAPPED SPECTROPOLARIMETRY
    215.
    发明公开
    IMAGE MAPPED SPECTROPOLARIMETRY 审中-公开
    与图像对应Spectropolarimetry

    公开(公告)号:EP2652469A1

    公开(公告)日:2013-10-23

    申请号:EP11802208.6

    申请日:2011-11-30

    CPC classification number: G01J3/447 G01J3/02 G01J3/0224 G01J3/2823 G01J4/04

    Abstract: A method for imaging a sample, the method includes, during a single acquisition event, receiving a first polarization-encoded EM field for a first point and a second polarization-encoded EM field for a second point. The method further includes redirecting the first polarization-encoded EM field along a first pre-determined direction to a first location on a dispersing re-imager and the second polarization-encoded EM field along a second pre-determined direction to a second location on the dispersing re-imager. The method further includes spectrally dispersing the first polarization-encoded EM field to obtain a first spectrum, re-imaging the first spectrum onto a first location on a detector, spectrally dispersing the second polarization-encoded EM field to obtain a second spectrum, re-imaging the second spectrum onto a second location on the detector, and detecting the first re-imaged spectrum and the second re-imaged spectrum.

    System and method for hyperspectral and polarimetric imaging
    217.
    发明公开
    System and method for hyperspectral and polarimetric imaging 审中-公开
    系统和方法,用于高光谱成像和极化

    公开(公告)号:EP2416136A3

    公开(公告)日:2013-03-27

    申请号:EP11163920.9

    申请日:2011-04-27

    CPC classification number: G01J3/2823 G01J3/02 G01J3/0224 G01J3/2803 G01J4/04

    Abstract: Embodiments of a system and method for collecting hyperspectral and polarimetric data that are spatially and temporally coincident include a dispersive element configured to receive incident electromagnetic radiation. The dispersive element is configured to disperse a non-zero order of the electromagnetic radiation into its constituent spectra, which is directed to a first focal plane array, and may be read out as hyperspectral data. The dispersive element is also configured to reflect a zero order of the electromagnetic radiation, which is directed through a polarity discriminating element to a second focal plane array, which may be read out as polarimetric data. By synchronously reading out the first and second focal plane arrays, the hyperspectral and polarimetric data may be both spatially and temporally coincident.

    APPARATUS AND METHODS FOR CONCENTRATION DETERMINATION USING POLORIZED LIGHT
    218.
    发明公开
    APPARATUS AND METHODS FOR CONCENTRATION DETERMINATION USING POLORIZED LIGHT 审中-公开
    装置和方法用于确定浓度偏振光的BASIS

    公开(公告)号:EP2205949A4

    公开(公告)日:2013-01-09

    申请号:EP08845082

    申请日:2008-11-03

    Abstract: Methods and apparatus for concentration determination using polarized light. The apparatus includes a first polarized light source having a first light source polarization axis and a second polarized light source having a second light source polarization axis generally perpendicular to the first light source polarization axis. Also, a first polarized light receiver having a first polarized light receiver polarization axis and configured to measure an intensity of light transmitted from the first light receiver polarizer and a second polarized light receiver having a second polarized light receiver polarization axis substantially perpendicular to the first light receiver polarization axis and configured to measure an intensity of light transmitted from the second light receiver polarizer, wherein the first and second light receiver polarization axes are generally +/−45 degrees relative to the first and second light source polarization axes.

    Adjustment method, exposure method, device manufacturing method, and exposure apparatus
    219.
    发明公开
    Adjustment method, exposure method, device manufacturing method, and exposure apparatus 审中-公开
    设定方法,曝光方法,用于制造设备和曝光装置的方法

    公开(公告)号:EP2020620A3

    公开(公告)日:2012-11-07

    申请号:EP08161469.5

    申请日:2008-07-30

    CPC classification number: G03F7/70566 G01J4/04 G03F7/70191 G03F7/7085

    Abstract: An adjustment method for adjusting an illumination condition in illuminating an original plate (30) using an illumination optical system (20) and projecting an image of a pattern formed on the original plate onto a substrate (50) through a projection optical system (40) includes measuring a polarization state of light that has passed through the illumination optical system, the original plate, and the projection optical system in a state where the original plate is located on an object plane of the projection optical system, and adjusting the polarization state based on the measured polarization state.

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