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    SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE FROM PLASMA-GENERATED DEBRIS
    221.
    发明申请
    SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE FROM PLASMA-GENERATED DEBRIS 审中-公开
    用于保护来自等离子体生物反应器的EUV光源的内部组分的系统

    公开(公告)号：WO2006093781A2

    公开(公告)日：2006-09-08

    申请号：PCT/US2006006408

    申请日：2006-02-24

    Applicant: CYMER INC ,  BOWERING NORBERT R ,  HANSSON BJORN A M ,  BYKANOV ALEXANDER N ,  KHODYKIN OLEH ,  ERSHOV ALEXANDER I ,  PARTLO WILLIAM N

    Inventor： BOWERING NORBERT R ,  HANSSON BJORN A M ,  BYKANOV ALEXANDER N ,  KHODYKIN OLEH ,  ERSHOV ALEXANDER I ,  PARTLO WILLIAM N

    CPC classification number: G03F7/70925 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70916 ,  G21K2201/06 ,  H05G2/001

    Abstract: Systems and methods are disclosed for protecting an EUV light source plasma production chamber optical element surface from debris generated by plasma formation. In one aspect of an embodiment of the present invention, a shield is disclosed which comprises at least one hollow tube positioned between the optical element and a plasma formation site. The tube is oriented to capture debris while allowing light to pass through the tube's lumen via reflection at relatively small angles of grazing incidence. In another aspect of an embodiment of the present invention, a shield is disclosed which is heated to a temperature sufficient to remove one or more species of debris material that has deposited on the shield. In yet another aspect of an embodiment of the present invention, a system is disclosed which a shield is moved from a light source plasma chamber to a cleaning chamber where the shield is cleaned.

    Abstract translation: 公开了用于保护EUV光源等离子体生产室光学元件表面免受等离子体形成产生的碎片的系统和方法。 在本发明的实施例的一个方面，公开了一种屏蔽件，其包括位于光学元件和等离子体形成部位之间的至少一个中空管。 管被定向以捕获碎片，同时允许光以相对较小的掠入射角度的反射通过管的内腔。 在本发明的一个实施例的另一方面，公开了一种屏蔽件，其被加热到足以去除沉积在屏蔽上的一种或多种碎屑材料的温度。 在本发明的一个实施例的另一方面，公开了一种系统，其将屏蔽件从光源等离子体室移动到清洁室，其中屏蔽件被清洁。

    X-RAY SOURCE ASSEMBLY HAVING ENHANCED OUTPUT STABILITY USING TUBE POWER ADJUSTMENTS AND REMOTE CALIBRATION
    222.
    发明申请
    X-RAY SOURCE ASSEMBLY HAVING ENHANCED OUTPUT STABILITY USING TUBE POWER ADJUSTMENTS AND REMOTE CALIBRATION 审中-公开
    使用管功率调整和远程校准提高输出稳定性的X射线源组件

    公开(公告)号：WO2005018289A3

    公开(公告)日：2005-06-23

    申请号：PCT/US2004025113

    申请日：2004-08-04

    Applicant: X RAY OPTICAL SYS INC ,  RADLEY IAN ,  MOORE MICHAEL D ,  FITZGERALD MARK

    Inventor： RADLEY IAN ,  MOORE MICHAEL D ,  FITZGERALD MARK

    IPC: G01N23/223 ,  H05G1/36

    CPC classification number: H05G1/36 ,  G21K2201/06 ,  H01J2235/1291 ,  H05G1/025

    Abstract: An x-ray source assembly includes an anode having a spot upon which electrons impinge based on power level supplied to the assembly, and an optic coupled to receive divergent x-rays generated at the spot and transmit output x-rays from the assembly. A control system is provided for maintaining intensity of the output x-rays dynamically during operation of the x-ray source assembly, notwithstanding a change in at least one operating condition of the x-ray source assembly, by changing the power level supplied to the assembly. The control system may include at least one actuator for effecting the change in the power level supplied to the assembly, by, e.g., controlling a power supply associated with the assembly. The control system may also change the temperature and/or the position of the anode to maintain the output intensity.

    Abstract translation: X射线源组件包括具有基于提供给组件的功率水平而撞击电子束的点的阳极以及耦合以接收在该点产生的发散x射线并且从组件发射输出x射线的光学器件。 提供了一种控制系统，用于在X射线源组件的操作期间动态地维持输出X射线的强度，而不管X射线源组件的至少一个操作状况的变化如何，通过改变提供给X射线源组件的功率水平 部件。 控制系统可以包括至少一个致动器，用于通过例如控制与组件相关的电源来实现供应给组件的功率水平的变化。 控制系统也可以改变阳极的温度和/或位置以保持输出强度。

    DEVICE FOR OBTAINING AN IMAGE OF AN OBJECT USING A STREAM OF NEUTRAL OR CHARGED PARTICLES AND A LENS FOR CONVERTING THE SAID STREAM OF NEUTRAL OR CHARGED PARTICLES
    224.
    发明申请
    DEVICE FOR OBTAINING AN IMAGE OF AN OBJECT USING A STREAM OF NEUTRAL OR CHARGED PARTICLES AND A LENS FOR CONVERTING THE SAID STREAM OF NEUTRAL OR CHARGED PARTICLES 审中-公开
    用于使用中性或带电颗粒流和用于转换中性或带电颗粒物质的流的镜头来获取物体的图像的装置

    公开(公告)号：WO1996001991A1

    公开(公告)日：1996-01-25

    申请号：PCT/RU1994000189

    申请日：1994-08-11

    Applicant: KUMAKHOV, Muradin Abubekirovich

    IPC: G01N23/04

    CPC classification number: B82Y10/00 ,  G01N23/04 ,  G21K1/06 ,  G21K1/062 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/068

    Abstract: The device according to the first invention is intended for use in the creation of an image of an object using radiation which passes through the object, is scattered by it or generated within it. A lens is provided between the radiation source and the object positioning system, or between that system and an image-forming system which registers the intensity distribution of the radiation incident on it, or in both these spaces. This lens is designed in accordance with the second invention and converts the particle stream (focusing of divergent or quasi-parallel rays, formation of quasi-parallel rays from divergent rays, monochromatization, spatial separation of particles of different energies in an initial non-monochromatic stream, etc.). The lens comprises a set of channels for radiation transport (primarily in the form of vitreous mono- and polycapillaries) and is distinguished by an arrangement of the channels in its cross section which is in keeping with axial symmetry (reflectional, central, rotational); this results in a point of interference of the rays emerging from it. The channels can be grouped together in ordered and symmetrically configured modules (30), each of which in its turn can be formed by finer modules (31) of the same number, form and mutual configuration.

    Abstract translation: 根据第一发明的装置旨在用于使用穿过物体的辐射来产生物体的图像，被散射或在其内产生。 在辐射源和物体定位系统之间或在该系统和记录入射到其上的辐射的强度分布的图像形成系统之间，或在这两个空间中，设置透镜。 该透镜根据第二发明设计并转换粒子流（发散或准平行射线的聚焦，来自发散射线的准平行射线的形成，单色化，不同能量的粒子在初始非单色中的空间分离 流等）。 透镜包括用于辐射传输的一组通道（主要以玻璃体单毛和多毛细管的形式），并且通过与其轴向对称（反射，中心，旋转）的横截面中的通道的布置来区分。 这导致了从它出现的光线的干扰点。 通道可以按照有序和对称配置的模块（30）分组在一起，每个模块可以由相同数量，形式和相互配置的更精细的模块（31）形成。

    IMPROVED X-RAY OPTICS, ESPECIALLY FOR PHASE CONTRAST IMAGING
    225.
    发明申请
    IMPROVED X-RAY OPTICS, ESPECIALLY FOR PHASE CONTRAST IMAGING 审中-公开
    改进的X射线光学，特别适用于相位对比成像

    公开(公告)号：WO1995005725A1

    公开(公告)日：1995-02-23

    申请号：PCT/AU1994000480

    申请日：1994-08-16

    Applicant: COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION ,  WILKINS, Stephen, William

    Inventor： COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION

    IPC: H05G01/02

    CPC classification number: A61B6/484 ,  G01N23/04 ,  G01N23/05 ,  G01N23/205 ,  G01N23/207 ,  G01T1/2914 ,  G01T1/36 ,  G03B42/02 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/062 ,  G21K2201/068 ,  G21K2207/005

    Abstract: An x-ray or neutron optic configuration includes a plurality of single crystal portions (25) formed with respective spaced x-ray or neutron reflection faces (21, 22, 23) formed at predetermined asymmetry angles to a Bragg diffraction plane in the respective crystal portion. Means interconnects the crystal portions (25) to maintain a first and second (21, 22) of these faces spaced apart for receipt of a sample (8) between them and to allow small adjustments of the relative angle of the faces about the normal to the plane of diffraction while maintaining the normals to the Bragg planes for the first and second faces (21, 22) substantially in the plane of diffraction. First face (21) is arranged to be a monochromator and collimator with respect to x-rays or neutrons of appropriate wavelength incident reflected through the sample for receipt by the second face (22), which thereby serves as an analyzer face.

    Abstract translation: x射线或中子光学配置包括多个单晶部分（25），其形成有各自间隔开的x射线或中子反射面（21,22,23），其以相应晶体中的布拉格衍射平面以预定的不对称角度形成 一部分。 装置将晶体部分（25）互连以保持这些面的第一和第二（21,22）间隔开，以便在它们之间接收样品（8），并允许小面积的相对角度相对于正常 衍射平面，同时保持基本上在衍射平面中的第一和第二面（21,22）的布拉格平面的法线。 第一面（21）被配置为相对于通过样品反射的x射线或适当波长的中子的单色仪和准直器，由第二面（22）接收，从而用作分析器面。

    X-RAY PHASE CONTRAST IMAGING USING A GRATING WITH UNEQUAL SLIT WIDTHS
    229.
    发明公开
    X-RAY PHASE CONTRAST IMAGING USING A GRATING WITH UNEQUAL SLIT WIDTHS 审中-公开
    X射线相衬图像使用带有不等SLOT宽度的GRID

    公开(公告)号：EP2601516A1

    公开(公告)日：2013-06-12

    申请号：EP11746328.1

    申请日：2011-08-01

    Applicant: Canon Kabushiki Kaisha

    Inventor： MUKAIDE, Taihei

    IPC: G01N23/04 ,  G21K1/00

    CPC classification number: G01N23/20 ,  G01N23/04 ,  G01N23/083 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/067 ,  G21K2207/005

    Abstract: An apparatus for deriving X-ray absorbing and phase information comprises; a splitting element for splitting spatially an X-ray, a detector for detecting intensities of the X-rays transmitted through an object, the intensity of the X-rays changing according to X-ray phase and also position changes, and an calculating unit for calculating an X-ray transmittance image, and an X-ray differential phase contrast or phase sift contrast image as the phase information. The X-ray is split by a grating having unequal slit widths into two or more X-rays having different widths, and emitted onto the detector unit. And, the calculating unit calculates the X-ray absorbing and phase information based on a difference, between the two or more X-rays, in correlation between the changing of the phase of the X-ray and the changing the intensity of the X-ray in the detector unit.

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