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    Self-aligned vertical comb drive assembly
    233.
    发明授权
    Self-aligned vertical comb drive assembly 有权

    公开(公告)号：US12007554B2

    公开(公告)日：2024-06-11

    申请号：US16917399

    申请日：2020-06-30

    Applicant: Lumentum Operations LLC

    Inventor： Wenlin Jin ,  Gonzalo Wills

    IPC: G02B26/08 ,  B81B3/00 ,  H02N1/00

    CPC classification number: G02B26/0841 ,  B81B3/0062 ,  H02N1/008 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/058

    Abstract: A vertical comb drive assembly may include a rotor assembly. The rotor assembly may include a comb anchor to attach the rotor assembly to a base, a comb rotor attached to the comb anchor, and a movable element attached to the comb rotor. The vertical comb drive assembly may include a stator assembly. The stator assembly may include a plate anchor to attach the stator assembly to the base, a plate, wherein the plate forms a comb stator, and a plate hinge to connect the plate to the plate anchor. The plate hinge and the plate may be configured for moving the plate from a first position where the comb rotor and the comb stator are both in a first plane to a second position where the comb rotor is in the first plane and the comb stator is in a second plane.

    Bipolar staggered comb drive for bidirectional MEMS actuation
    234.
    发明授权
    Bipolar staggered comb drive for bidirectional MEMS actuation 有权

    公开(公告)号：US11909332B2

    公开(公告)日：2024-02-20

    申请号：US17395314

    申请日：2021-08-05

    Applicant: BEIJING VOYAGER TECHNOLOGY CO., LTD.

    Inventor： Qin Zhou ,  Youmin Wang ,  Yue Lu ,  Lingkai Kong

    IPC: H02N1/00 ,  B81B3/00 ,  B81B7/00 ,  H02P25/00 ,  H02N1/08

    CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B3/0043 ,  B81B7/008 ,  H02P25/00 ,  B81B2201/033 ,  H02N1/08

    Abstract: Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

    Methods for closed loop operation of capacitive accelerometers
    236.
    发明授权
    Methods for closed loop operation of capacitive accelerometers 有权

    公开(公告)号：US11662361B2

    公开(公告)日：2023-05-30

    申请号：US17168698

    申请日：2021-02-05

    Applicant: Atlantic Inertial Systems Limited

    Inventor： Christopher Paul Fell ,  Alan Malvern

    IPC: G01P15/125 ,  G01D3/06 ,  G01L1/14 ,  G01P21/00

    CPC classification number: G01P15/125 ,  B81B2201/033 ,  G01D3/066 ,  G01L1/144 ,  G01P21/00

    Abstract: A capacitive accelerometer includes a proof mass, first and second fixed capacitive electrodes, and a DC biasing element arranged to apply a DC voltage (VB) to the proof mass based on a threshold acceleration value. A first closed loop circuit is arranged to detect a signal resulting from displacement of the proof mass and control the pulse width modulation signal generator to apply the first and second drive signals V1, V2 with a variable mark:space ratio. A second closed loop circuit keeps the mark:space ratio constant and to change the magnitude, VB, of the DC voltage applied to the proof mass by the DC biasing element so as to provide a net electrostatic restoring force on the proof mass for balancing the inertial force of the applied acceleration and maintaining the proof mass at a null position, when the applied acceleration is greater than a threshold acceleration value.

    SWITCHING APPARATUS AND ELECTRONIC APPARATUS
    237.
    发明申请
    SWITCHING APPARATUS AND ELECTRONIC APPARATUS 审中-公开

    公开(公告)号：US20170278646A1

    公开(公告)日：2017-09-28

    申请号：US15512285

    申请日：2015-07-10

    Applicant: Sony Corporation

    Inventor： Shinya MORITA

    IPC: H01H1/00

    CPC classification number: H01H1/0036 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/051 ,  H01H59/0009 ,  H01H2001/0042 ,  H01H2001/0063 ,  H01H2001/0078

    Abstract: [Object] To be capable of promptly performing a switching operation of a switch.[Solving Means] In a switching apparatus according to an embodiment of the present technology, a movable electrode includes a first movable electrode piece, a second movable electrode piece, and a movable contact point. A first fixed electrode includes first and second fixed electrode pieces, the first and second fixed electrode pieces facing each other with the first movable electrode piece disposed between the first and second fixed electrode pieces, the first fixed electrode piece facing the first movable electrode piece with a gap narrower than a gap between the second fixed electrode piece and the first movable electrode piece. A second fixed electrode includes third and fourth fixed electrode pieces, the third and fourth fixed electrode pieces facing each other with the second movable electrode piece disposed between the third and fourth fixed electrode pieces, the third fixed electrode piece facing the second movable electrode piece with a gap narrower than a gap between the fourth fixed electrode piece and the second movable electrode piece. A first fixed contact point is in contact with the movable contact point, the movable contact point moving in a first direction by an electrostatic attractive force between the movable electrode and the first fixed electrode. A second fixed contact point is in contact with the movable contact point, the movable contact point moving in a second direction opposite to the first direction by an electrostatic attractive force between the movable electrode and the second fixed electrode.

    MEMS ACTUATOR STRUCTURES RESISTANT TO SHOCK
    239.
    发明申请
    MEMS ACTUATOR STRUCTURES RESISTANT TO SHOCK 审中-公开

    公开(公告)号：US20170190568A1

    公开(公告)日：2017-07-06

    申请号：US14985175

    申请日：2015-12-30

    Applicant: MEMS DRIVE, INC.

    Inventor： Gerardo MORABITO ,  Xiaolei LIU ,  Guiqin WANG ,  Roman GUTIERREZ ,  Matthew NG

    IPC: B81B3/00 ,  H02N1/00

    CPC classification number: B81B3/0051 ,  B81B7/0016 ,  B81B2201/033 ,  B81B2203/0118 ,  B81B2203/0136 ,  H02N1/006

    Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.

    Capacitive micromechanical sensor structure and micromechanical accelerometer
    240.
    发明授权
    Capacitive micromechanical sensor structure and micromechanical accelerometer 有权
    电容式微机械传感器结构和微机械加速度计

    公开(公告)号：US09547020B2

    公开(公告)日：2017-01-17

    申请号：US14314243

    申请日：2014-06-25

    Applicant: MURATA MANUFACTURING CO., LTD.

    Inventor： Matti Liukku ,  Ville Pekka Rytkönen

    IPC: G01P15/125 ,  B81B3/00 ,  G01P15/18 ,  G01P15/13 ,  G01P15/08

    CPC classification number: G01P15/125 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/033 ,  G01P15/0802 ,  G01P15/131 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/0871

    Abstract: The invention relates to a capacitive micromechanical sensor structure comprising a stator structure rigidly anchored to a substrate and a rotor structure movably anchored by means of spring structures to the substrate. The stator structure has a plurality of stator finger support beams and the rotor structure has a plurality of rotor finger support beams. Stator fingers along the stator finger support beam of the stator structure extend into rotor gaps along the rotor finger support beam of the rotor structure, and rotor fingers along the rotor finger support beam of the rotor structure extend into stator gaps along the stator finger support beam of the stator structure.

    Abstract translation: 本发明涉及一种电容微机械传感器结构，其包括刚性地锚定到基底的定子结构和通过弹簧结构可移动地锚定到基底的转子结构。 定子结构具有多个定子指状支撑梁，转子结构具有多个转子手指支撑梁。 沿着定子结构的定子指状支撑梁的定子指状物沿着转子结构的转子指状支撑梁延伸到转子间隙中，沿着转子结构的转子指状支撑梁的转子指状物沿着定子指状支撑梁延伸到定子间隙中 的定子结构。

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