CUTTING OIL COMPOSITION
    235.
    发明申请
    CUTTING OIL COMPOSITION 审中-公开
    切割油组合物

    公开(公告)号:WO99051711A1

    公开(公告)日:1999-10-14

    申请号:PCT/JP1999/001737

    申请日:1999-04-02

    Abstract: A cutting oil comprising a polyether compound of formula (1): R1O(EO)m(AO)nR2, wherein R1 and R2 may be same or different and each represents a hydrogen atom or a hydrocarbon group having 1 to 24 carbon atoms provided that at least one of R1 and R2 is a hydrocarbon group, EO and AO represent an oxyethylene group and an oxyalkylene group having 3 or 4 carbon atoms, respectively, and m and n are each 1 to 50, provided that the sum of m + n is 4 to 100, a cutting oil composition comprising the cutting oil and an abrasive, a cutting method using the composition, a method for cleaning a wafer which comprises washing with water a wafer provided by cutting an ingot with a wire saw, using the composition, heating the resultant drainage water to a temperature higher than that of the compound of formula (1) contained in the drainage water, to thereby separate the drainage water into an oil phase and a water phase, and separating the oil phase from the drainage. By the method, excellent dispersibility of an abrasive, including that in redispersing after the occurrence of settling, excellent cutting properties and excellent workability can be achieved, and also a product obtained by cutting can be cleaned with ease after cutting.

    Abstract translation: 包含式(1)的聚醚化合物:R 1 O(EO)m(AO)n R 2的切削油,其中R 1和R 2可以相同或不同,并且各自表示氢原子或具有1至24个碳原子的烃基,条件是 R 1和R 2中的至少一个为烃基,EO和AO分别表示氧化乙烯基和具有3或4个碳原子的氧化烯基,m和n各自为1〜50,条件是m + n 为4〜100,包含切削油和研磨剂的切削油组合物,使用该组合物的切断方法,清洗晶片的方法,该方法包括:用水清洗通过用钢丝绳切割锭所提供的晶片,使用组合物 将得到的排水加热到比排水水中所含的式(1)化合物高的温度,从而将排出水分离成油相和水相,并将油相与排水分离。 通过该方法,可以实现研磨剂的分散性优异,包括在沉降发生后的再分散中,优异的切削性和优异的加工性,并且切割后得到的产品也可以容易地清洗。

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