Abstract:
In spectral detection for detecting the shape of repeating pattern structures uniformly formed on a surface of a test object, it is advantageous to use light having a wide wavelength range in a short wavelength region. However, it is not easy to realize a relatively simple optical system capable of spectral detection of light having a wide wavelength range in a short wavelength region, namely in ultraviolet region. The present invention provides an inspection apparatus for detecting pattern defects. The inspection apparatus includes a spectral detection optical system capable of spectral detection of light in a wavelength range from deep ultraviolet to near infrared. The spectral detection optical system includes a spatially partial mirror serving as a half mirror and a reflecting objective provided with an aperture stop for limiting the angle and direction of light to be applied to and reflected by a test object.
Abstract:
The present invention relates to an arrangement for a selection of a wavelength including a wavelength source for providing a plurality of wavelengths, a wavelength selector for allowing a selection of a desired wavelength from the wavelength source, and a wavelength detector to detect a selected wavelength for subsequent use.
Abstract:
PROBLEM TO BE SOLVED: To prevent signal strength of a terahertz wave from decreasing, and measure time waveforms of a plurality of pixels while maintaining detection sensitivity.SOLUTION: A device for visualizing internal information on an object includes a detection unit 101 detecting a terahertz wave 109 from an object 108, a constituting unit 102 for constituting a time waveform of the terahertz wave from the output of the detection unit, a modulation unit 103, an adjustment unit 105 and an addition unit 106. With respect to the terahertz wave corresponding to a pixel of the object in the horizontal direction, the modulation unit spatially modulates propagation distances to the detection unit for each pixel with multiple kinds of modulation patterns sequentially, to emit a plurality of terahertz waves 110 and 111. The adjustment unit adjusts the chronological position of the time waveform of the plurality of terahertz waves from the constituting unit, on the basis of the time amount obtained by converting the amount of change in propagation distance of the terahertz wave for each pixel corresponding to the modulation patterns, to calculate a plurality of new time waveforms. The addition unit adds the new time waveforms for each pixel.
Abstract:
PROBLEM TO BE SOLVED: To provide a spectroscopic characteristic acquisition apparatus which has little unevenness of light quantity to be acquired and has a plenty of light acquiring quantity with high precision.SOLUTION: The spectroscopic characteristics acquisition apparatus 1-100 includes: a light irradiation means 1-102, 1-103; a lens array 1-104; a pinhole array 1-105; a focusing means 1-106; a diffraction means 1-107; and a light receiving means 1-108. The light receiving means 1-108 constitute a spectroscopic sensor array which is distributed with numbers of the spectroscopic sensors in one direction. The spectroscopic sensor has a predetermined number of pixels which receives the light having mitually different spectroscopic characteristics distributed in one direction. Each of the lenses constituting the lens array corresponds to the apertures by 1:1 to form the pinhole array. The number of aperture NA of the lens constituting the lens array in the distributed direction satisfies the condition of NA>sin(θmax) with respect to the maximum effective angle of view θmax of the focusing means.
Abstract:
PROBLEM TO BE SOLVED: To enhance the dynamic range of measurement by improving the non-linearity of the relation between concentration in a case that the concentration of a sample is high and the intensity of fluorescence. SOLUTION: In a case that it is cleared that the concentration of the sample being a measuring target is high, the luminous flux restriction part 6 of an aperture 6b short in the passing direction of exciting light Lex is used and only the fluorescence emitted from the region near to an exciting light incident end part is condensed by a condensing lens 7 to be introduced into a spectroscope 4 on a fluorescence side to be detected. In this case, since the fluorescence emitted from a region through which the exciting light receiving intensive absorption by a sample solution S passes is not reflected on a measuring result, the quantity of fluorescence is reduced but the linearity of the relation between the concentration and the intensity of fluorescence becomes good and quantitative precision at high concentration is enhanced. In a case that the concentration of the sample is low, the luminous flux restriction part 6 of an aperture 6a long in the passing direction of exciting light Lex may be used from an aspect of the serious consideration of sensitivity. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide an apparatus of acquiring spectral characteristics which reads data at high speed when measuring the spectral characteristics of an object to be read over a full width and dispenses with alignment in observation positions among a plurality of wavelength bands, a method of acquiring the spectral characteristics, an image evaluating device, and an image forming device. SOLUTION: The apparatus of acquiring spectral characteristics includes: a light irradiating means for emitting light onto the object to be read; a spectroscopic means for separating at least part of diffused reflected light from the light emitted onto the object to be read by the light irradiating means into a spectrum; and a light receiving means for acquiring the diffused reflected light separated into the spectrum by the spectroscopic means. The light receiving means constitutes a spectroscopic sensor array including a plurality of spectroscopic sensors arranged in one direction. The spectroscopic sensors include a predetermined number of pixels arranged in one direction to receive light beams with spectral characteristics different from one another. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a light source unit and a spectrum analyzer capable of reducing the influence due to the interference in wavelength component on analysis, or the like. SOLUTION: This spectrum analyzer 1 comprises the light source unit 2 for emitting light onto a sample A; a detector 3 for detecting light reflected, transmitted, or scattered from the sample A; and a sample mounting section 4 for mounting the sample A. The light source unit 2 comprises a wide-band light source 20 and a light irradiation section 23. The wide-band light source 20 generates wide-band light P1 such as super-continuum light (SC light). The light source unit 2 has an interference suppressing means for suppressing interference in each wavelength component of the wide-band light P1. COPYRIGHT: (C)2008,JPO&INPIT