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    Spectroscopic detection method and apparatus, as well as defect inspection method and apparatus using the same
    231.
    发明专利
    Spectroscopic detection method and apparatus, as well as defect inspection method and apparatus using the same 有权

    公开(公告)号：JP5332632B2

    公开(公告)日：2013-11-06

    申请号：JP2009007160

    申请日：2009-01-16

    Applicant: 株式会社日立製作所

    Inventor： 丈師 廣瀬 ,  実 ▲吉▼田 ,  秀明 笹澤 ,  康裕 吉武

    IPC: G01N21/95

    CPC classification number: G01J3/02 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01N21/95607

    Abstract: In spectral detection for detecting the shape of repeating pattern structures uniformly formed on a surface of a test object, it is advantageous to use light having a wide wavelength range in a short wavelength region. However, it is not easy to realize a relatively simple optical system capable of spectral detection of light having a wide wavelength range in a short wavelength region, namely in ultraviolet region. The present invention provides an inspection apparatus for detecting pattern defects. The inspection apparatus includes a spectral detection optical system capable of spectral detection of light in a wavelength range from deep ultraviolet to near infrared. The spectral detection optical system includes a spatially partial mirror serving as a half mirror and a reflecting objective provided with an aperture stop for limiting the angle and direction of light to be applied to and reflected by a test object.

    Image forming device
    233.
    发明专利
    Image forming device 有权
    图像形成装置

    公开(公告)号：JP2012185012A

    公开(公告)日：2012-09-27

    申请号：JP2011047735

    申请日：2011-03-04

    Applicant: Canon Inc ,  キヤノン株式会社

    Inventor： ITSUJI TAKEAKI

    IPC: G01N21/27 ,  G01N21/35 ,  G01N21/3586

    CPC classification number: G01J3/0205 ,  G01J3/0229 ,  G01J3/2823 ,  G01J3/2889 ,  G01N21/3586

    Abstract: PROBLEM TO BE SOLVED: To prevent signal strength of a terahertz wave from decreasing, and measure time waveforms of a plurality of pixels while maintaining detection sensitivity.SOLUTION: A device for visualizing internal information on an object includes a detection unit 101 detecting a terahertz wave 109 from an object 108, a constituting unit 102 for constituting a time waveform of the terahertz wave from the output of the detection unit, a modulation unit 103, an adjustment unit 105 and an addition unit 106. With respect to the terahertz wave corresponding to a pixel of the object in the horizontal direction, the modulation unit spatially modulates propagation distances to the detection unit for each pixel with multiple kinds of modulation patterns sequentially, to emit a plurality of terahertz waves 110 and 111. The adjustment unit adjusts the chronological position of the time waveform of the plurality of terahertz waves from the constituting unit, on the basis of the time amount obtained by converting the amount of change in propagation distance of the terahertz wave for each pixel corresponding to the modulation patterns, to calculate a plurality of new time waveforms. The addition unit adds the new time waveforms for each pixel.

    Abstract translation: 要解决的问题：为了防止太赫兹波的信号强度降低，并且在保持检测灵敏度的同时测量多个像素的时间波形。 解决方案：用于可视化对象上的内部信息的装置包括：检测单元101，从对象108检测太赫兹波109;构成单元102，用于从检测单元的输出构成太赫兹波的时间波形; 调制单元103，调整单元105和加法单元106.对于与水平方向上的对象的像素相对应的太赫兹波，调制单元对于具有多种类型的每个像素进行空间调制到检测单元的传播距离 的调制图案，以发射多个太赫兹波110和111.调节单元根据通过转换数量得到的时间量来调整来自构成单元的多个太赫兹波的时间波形的时间位置 对于与调制图案对应的每个像素的太赫兹波的传播距离的变化，以计算多个 新的时间波形。 添加单元为每个像素添加新的时间波形。 版权所有（C）2012，JPO＆INPIT

    Spectroscopic characteristics acquisition apparatus, image evaluating apparatus, and image forming apparatus
    234.
    发明专利
    Spectroscopic characteristics acquisition apparatus, image evaluating apparatus, and image forming apparatus 有权
    光谱特性获取装置，图像评估装置和图像形成装置

    公开(公告)号：JP2011209267A

    公开(公告)日：2011-10-20

    申请号：JP2010277360

    申请日：2010-12-13

    Applicant: Ricoh Co Ltd ,  株式会社リコー

    Inventor： SEO MANABU ,  KAMIJO TADAHIRO ,  SHINPO KOHEI ,  KUBOTA YOICHI

    IPC: G01J3/02 ,  G01J3/36

    CPC classification number: G01J3/02 ,  G01J3/0205 ,  G01J3/0229 ,  G01J3/2803 ,  G01J3/502

    Abstract: PROBLEM TO BE SOLVED: To provide a spectroscopic characteristic acquisition apparatus which has little unevenness of light quantity to be acquired and has a plenty of light acquiring quantity with high precision.SOLUTION: The spectroscopic characteristics acquisition apparatus 1-100 includes: a light irradiation means 1-102, 1-103; a lens array 1-104; a pinhole array 1-105; a focusing means 1-106; a diffraction means 1-107; and a light receiving means 1-108. The light receiving means 1-108 constitute a spectroscopic sensor array which is distributed with numbers of the spectroscopic sensors in one direction. The spectroscopic sensor has a predetermined number of pixels which receives the light having mitually different spectroscopic characteristics distributed in one direction. Each of the lenses constituting the lens array corresponds to the apertures by 1:1 to form the pinhole array. The number of aperture NA of the lens constituting the lens array in the distributed direction satisfies the condition of NA>sin(θmax) with respect to the maximum effective angle of view θmax of the focusing means.

    Abstract translation: 要解决的问题：提供一种光谱特征获取装置，其具有很少的光量不均匀性并且具有高精度的大量光获取量。解决方案：光谱特征获取装置1-100包括：光照射装置 1-102，1-103; 透镜阵列1-104; 针孔阵列1-105; 聚焦装置1-106; 衍射装置1-107; 和光接收装置1-108。 光接收装置1-108构成分光传感器阵列，其在一个方向上分布有多个分光传感器。 分光传感器具有预定数量的像素，其接收具有分布在一个方向上的具有不同分光特性的光。 构成透镜阵列的每个透镜对应于1：1的孔径以形成针孔阵列。 在分布方向上构成透镜阵列的透镜的孔径NA的数量相对于聚焦装置的最大有效视角θmax满足NA> sin（θmax）的条件。

    Fluorescence detector
    235.
    发明专利
    Fluorescence detector 有权
    荧光检测器

    公开(公告)号：JP2011043332A

    公开(公告)日：2011-03-03

    申请号：JP2009189666

    申请日：2009-08-19

    Applicant: Shimadzu Corp ,  株式会社島津製作所

    Inventor： GUNJI MASAHIDE

    IPC: G01N21/64 ,  G01N21/03 ,  G01N21/05

    CPC classification number: G01J3/4406 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0229 ,  G01N21/645 ,  G01N2021/6417 ,  G01N2021/6467

    Abstract: PROBLEM TO BE SOLVED: To enhance the dynamic range of measurement by improving the non-linearity of the relation between concentration in a case that the concentration of a sample is high and the intensity of fluorescence. SOLUTION: In a case that it is cleared that the concentration of the sample being a measuring target is high, the luminous flux restriction part 6 of an aperture 6b short in the passing direction of exciting light Lex is used and only the fluorescence emitted from the region near to an exciting light incident end part is condensed by a condensing lens 7 to be introduced into a spectroscope 4 on a fluorescence side to be detected. In this case, since the fluorescence emitted from a region through which the exciting light receiving intensive absorption by a sample solution S passes is not reflected on a measuring result, the quantity of fluorescence is reduced but the linearity of the relation between the concentration and the intensity of fluorescence becomes good and quantitative precision at high concentration is enhanced. In a case that the concentration of the sample is low, the luminous flux restriction part 6 of an aperture 6a long in the passing direction of exciting light Lex may be used from an aspect of the serious consideration of sensitivity. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题：为了通过提高样品浓度高的浓度与荧光强度之间的浓度之间的关系的非线性来增强测量的动态范围。 解决方案：在清除作为测量对象的样本的浓度高的情况下，使用在激发光Lex的通过方向上短路的孔6b的光通量限制部6，并且仅使用荧光 从靠近激发光入射端部的区域发射的聚光透镜7被聚光，以被引入到要检测的荧光侧的分光器4中。 在这种情况下，由于从受试样溶液S的强吸收的激发光通过的区域发出的荧光不会反映在测定结果上，所以荧光量减少，但浓度与 荧光强度变好，高浓度的定量精度提高。 在样品浓度低的情况下，可以从认真考虑灵敏度的一个方面使用沿激励光Lex的通过方向长的孔6a的光束限制部分6。 版权所有（C）2011，JPO＆INPIT

    Apparatus and method of acquiring spectral characteristics, image evaluating device, and image forming device
    236.
    发明专利
    Apparatus and method of acquiring spectral characteristics, image evaluating device, and image forming device 有权
    获取光谱特性，图像评估装置和图像形成装置的装置和方法

    公开(公告)号：JP2010256324A

    公开(公告)日：2010-11-11

    申请号：JP2009260259

    申请日：2009-11-13

    Applicant: Ricoh Co Ltd ,  株式会社リコー

    Inventor： SEO MANABU ,  KAMIJO TADAHIRO ,  SHINPO KOHEI

    IPC: G01J3/36 ,  G01J3/51

    CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0229 ,  G01J3/0262 ,  G01J3/0294 ,  G01J3/04 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/51 ,  G01J3/513 ,  G01J2003/2806 ,  H04N9/045

    Abstract: PROBLEM TO BE SOLVED: To provide an apparatus of acquiring spectral characteristics which reads data at high speed when measuring the spectral characteristics of an object to be read over a full width and dispenses with alignment in observation positions among a plurality of wavelength bands, a method of acquiring the spectral characteristics, an image evaluating device, and an image forming device. SOLUTION: The apparatus of acquiring spectral characteristics includes: a light irradiating means for emitting light onto the object to be read; a spectroscopic means for separating at least part of diffused reflected light from the light emitted onto the object to be read by the light irradiating means into a spectrum; and a light receiving means for acquiring the diffused reflected light separated into the spectrum by the spectroscopic means. The light receiving means constitutes a spectroscopic sensor array including a plurality of spectroscopic sensors arranged in one direction. The spectroscopic sensors include a predetermined number of pixels arranged in one direction to receive light beams with spectral characteristics different from one another. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种获取在测量要全面读取的物体的光谱特性并且在多个波长带之间的观察位置中的对准的情况下高速读取数据的光谱特性的装置 获取光谱特性的方法，图像评估装置和图像形成装置。 解决方案：获得光谱特性的装置包括：光照射装置，用于将光发射到待读取的物体上; 分光装置，用于将由光照射装置读取的物体的散射反射光的至少一部分分离成光谱; 以及光接收装置，用于获取由分光装置分离成光谱的扩散反射光。 光接收装置构成包括沿一个方向布置的多个光谱传感器的光谱传感器阵列。 光谱传感器包括沿一个方向布置的预定数量的像素以接收具有彼此不同的光谱特性的光束。 版权所有（C）2011，JPO＆INPIT

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