公开(公告)号：EP1596172A2

公开(公告)日：2005-11-16

申请号：EP04022711.8

申请日：2004-09-23

Applicant: FUJITSU LIMITED

Inventor： Kubo, Teruhiro

IPC: G01J4/04

CPC classification number: G01J4/04

Abstract: A polarization state measuring apparatus of the present invention branches an input signal light into a plurality of signal lights by optical couplers, gives polarization and phase shift which are different from each other, to the signal lights by a plurality of optical elements arranged on optical branch paths, detects the power of each of the signal lights by the corresponding light receiving elements, and after adjusting at least differences in the optical branch paths, processes electrical signals output from the light receiving elements by operating means, to acquire information related to a polarization state of the input signal light. As a result, it is possible to provide a small size polarization state measuring apparatus which can correct differences in arrival times of the signal lights to the light receiving elements, which occur due to differences in the optical path lengths of the plurality of optical branch paths, to thereby measure the polarization state of the input signal light with high accuracy.

Abstract translation: 本发明的偏振状态测量装置通过光耦合器将输入信号光分支成多个信号光，通过布置在光分支上的多个光学元件将信号光分别彼此不同的极化和相移 通过相应的光接收元件检测每个信号光的功率，并且在调整至少光分支路径的差异之后，通过操作装置处理从光接收元件输出的电信号，以获取与偏振相关的信息 输入信号灯的状态。 结果，可以提供一种小尺寸偏振状态测量装置，其可以校正由于多个光分支路径的光路长度的差异而导致的信号光到达光接收元件的到达时间的差异 ，从而以高精度测量输入信号光的偏振状态。

公开(公告)号：EP1353158B1

公开(公告)日：2005-10-19

申请号：EP03002980.5

申请日：2003-02-11

Applicant: Thorlabs, Inc.

Inventor： Bandemer,Adalbert,Dr. ,  Krause,Egbert

IPC: G01J4/04

CPC classification number: G01M11/337 ,  G01J4/04 ,  G01M11/336

公开(公告)号：EP1558902A1

公开(公告)日：2005-08-03

申请号：EP02808047.1

申请日：2002-10-25

Applicant: Agilent Technologies Inc

Inventor： HENTSCHEL, Christian ,  THOMA, Peter

IPC: G01J4/04 ,  G01M11/00

CPC classification number: G01J4/00 ,  G01J4/04

Abstract: A first optical signal with a first polarization state is received by a polarization conversion unit. From this first optical signal, a set of n derived optical signals with n different well-defined polarization states i, i = 1, ..., n, is generated, whereby n is a natural number greater than one. Said n different well-defined polarization states are chosen such that polarization dependent measurement errors of the n derived optical signals cancel each other when averaged irrespective of the first optical signal's polarization state. Therefore, polarization dependent measurement errors can be reduced or even eliminated.

公开(公告)号：EP1397651A4

公开(公告)日：2005-06-22

申请号：EP02744424

申请日：2002-06-17

Applicant: HINDS INSTRUMENTS INC

Inventor： WANG BAOLIANG ,  OAKBERG THEODORE C

IPC: G01J4/04 ,  G01M11/00 ,  G01N21/19 ,  G01N21/23 ,  G01N21/33 ,  G03F7/20 ,  G01J4/00

CPC classification number: G03F7/7085 ,  G01J4/04 ,  G01N21/19 ,  G01N21/23 ,  G01N21/33 ,  G03F7/70966

Abstract: Provided are systems and methods for precisely measuring birefringence properties of optical elements, especially those elements that are used in deep ultraviolet (DUV) wavelengths. The system includes two photoelastic modulators (PEM) (126, 128) located on opposite sides of the sample (136). Each PEM is operable for modulating the polarity of a light beam that passes though the sample. The system also includes a polarizer (124) associated with one PEM, an analyzer (130) associated with the other PEM, and a detector (132) for measuring the intensity of the light after it passes through the PEMs, polarizer, and analyzer. Described are techniques for determining birefringence properties across a wide range. For example, a dual-wavelength source light embodiment is provided for measuring relatively high levels of birefringence. Also provided is technique for selecting the most accurate and efficient one of a number of approaches to determining birefringence properties depending upon the estimated value of the birefringence to be detected for a given sample optical element.

公开(公告)号：EP1060369A4

公开(公告)日：2005-01-19

申请号：EP99934336

申请日：1999-02-17

Applicant: HINDS INSTRUMENTS INC

Inventor： WANG BAOLIANG ,  OAKBERG THEODORE C ,  KADLEC PAUL

IPC: G01J4/04 ,  G01B9/02 ,  G01N21/23

CPC classification number: G01J4/04 ,  G01N21/23

Abstract: A practical system and method for precisely measuring low-level birefrigence properties (retardance and fast axis orientation) of optical materials (26). The system permits multiple measurements to be taken across the area of a sample to detect and graphically display (100) variations in the birefrigence properties across the sample area. In a preferred embodiment, the system incorporates a photoelastic modulator (24) for modulating polarized light that is then directed through a sample (26). The beam ('Bi') propagating from the sample is separated into two parts, with one part ('B1') having a polarization direction different than the polarization direction of the other beam part ('B2'). These separate beam parts are then processed as distinct channels. Detection mechanisms (32, 50) associated with each channel detect the time varying light intensity corresponding to each of the two parts of the beam. This information is combined for calculating a precise measure of the retardance induced by the sample, as well as the sample's fast axis orientation.

公开(公告)号：EP1495293A1

公开(公告)日：2005-01-12

申请号：EP03718940.4

申请日：2003-04-15

Applicant: Qinetiq Limited

Inventor： HARVEY, Andrew Robert,Heriot Watt University ,  FLETCHER-HOLMES, David William,Heriot Watt Univ.

IPC: G01J3/28 ,  G01J3/447 ,  G01J3/51

CPC classification number: G01J4/04 ,  G01J3/2823 ,  G01J3/447 ,  G01J3/51

Abstract: An imaging spectrometer (2) is disclosed that comprises imaging means for dividing a received image into two or more spatially separated spectral images and means for detecting each spectral image (4), and is characterised in that the imaging means comprises at least one polarising beam splitter (18, 20, 22; 64, 68, 72). The polarising beam splitter may be a Wollaston prism. In one embodiment of the invention, the imaging means comprises image replication means (12) to produce two or more spatially separated images, and one or more filter elements such as dichroic filters (8) which act to alter the spectral characteristics of one or more of the spatially separated images. In a further embodiment of the invention the imaging means comprises one or more spectral replication means arranged in optical series, each spectral replication means comprising an optical retardation element (62, 66, 70) and a polarising beam splitter (64, 68, 72).

公开(公告)号：EP1482273A1

公开(公告)日：2004-12-01

申请号：EP03707195.8

申请日：2003-03-03

Applicant: Takaoka Electric Mfg. Co., Ltd.

Inventor： ISHIHARA, Mitsuhiro 42-1-904, Miyaushiro Aza

IPC: G01B11/24

CPC classification number: G01B11/25 ,  G01B11/24 ,  G01J4/04

Abstract: A polarization bearing detection type two-dimensional light reception timing detecting device for implementing a fast surface shape measurement that can accommodate an animal body measurement, and a surface shape measuring device using it. In Fig.8, the polarization bearing of a detection light is turned in synchronization with slit light scanning, and the polarization bearing is two-dimensionally recorded by two sets of analyzers (5, 6) and storage type image detectors in a crossed Nicols arrangement, thereby it is possible to determine, with only one-time imaging, timing at which a slit light is beamed into respected pixels in the storage type image detectors (7,8).

Abstract translation: 偏振轴承的检测光与狭缝光扫描同步，以便使用正交尼科尔布置的一对分析器（5,6）和存储型图像检测器（7,8）二维地记录偏振轴承。 还包括表面形状测量装置的独立权利要求。

公开(公告)号：EP1397651A1

公开(公告)日：2004-03-17

申请号：EP02744424.9

申请日：2002-06-17

Applicant: HINDS INSTRUMENTS, INC.

Inventor： WANG, Baoliang ,  OAKBERG, Theodore, C.

IPC: G01J4/00

CPC classification number: G03F7/7085 ,  G01J4/04 ,  G01N21/19 ,  G01N21/23 ,  G01N21/33 ,  G03F7/70966

Abstract: Provided are systems and methods for precisely measuring birefringence properties of optical elements, especially those elements that are used in deep ultraviolet (DUV) wavelengths. The system includes two photoelastic modulators (PEM) (126, 128) located on opposite sides of the sample (136). Each PEM is operable for modulating the polarity of a light beam that passes though the sample. The system also includes a polarizer (124) associated with one PEM, an analyzer (130) associated with the other PEM, and a detector (132) for measuring the intensity of the light after it passes through the PEMs, polarizer, and analyzer. Described are techniques for determining birefringence properties across a wide range. For example, a dual-wavelength source light embodiment is provided for measuring relatively high levels of birefringence. Also provided is technique for selecting the most accurate and efficient one of a number of approaches to determining birefringence properties depending upon the estimated value of the birefringence to be detected for a given sample optical element.

公开(公告)号：EP1225431A1

公开(公告)日：2002-07-24

申请号：EP01305493.7

申请日：2001-06-25

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Moeller, Lothar B. ,  Westbrook, Paul Stephen,

IPC: G01J4/00 ,  H04B10/18

CPC classification number: H04B10/2569 ,  G01J3/447 ,  G01J4/04

Abstract: A method and apparatus for polarization measurements. A polarization state of an optical signal can be determined using a polarization analyzer comprising a polarization controller, a polarizer, a wavelength dispersive element and a photo-detector. The method and apparatus can be applied to polarization and polarization mode dispersion measurements in wavelength division multiplexed communication systems.

公开(公告)号：EP1218707A1

公开(公告)日：2002-07-03

申请号：EP00950757.5

申请日：2000-07-27

Applicant: COLORADO SCHOOL OF MINES

Inventor： FURTAK, Thomas, E.

IPC: G01J4/00 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211

Abstract: The parallel detecting spectroscopic ellipsometer/polarimeter sensor (10) has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample (22) within a processing chamber. It includes a multi-spectral source of radiation (12) for producing a collimated beam of radiation (14) directed towards the surface of the sample through a polarizer (16). The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample (22), thereby changing its polarization state due to the intrinsic material properties of the sample (22). The light reflected from the sample (22) is separated into four separate polarized filtered beams (36, 38, 58, 62), each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.