公开(公告)号：US20160227117A1

公开(公告)日：2016-08-04

申请号：US14630437

申请日：2015-02-24

Applicant: MEMS Start, LLC

Inventor： ROMAN GUTIERREZ

IPC: H04N5/232 ,  H02N1/00 ,  H04N5/225

CPC classification number: H04N5/23287 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2203/0136 ,  G03B3/10 ,  G03B2205/0053 ,  G03B2205/0084 ,  H02N1/008 ,  H04N5/2252 ,  H04N5/2253 ,  H04N5/2254

Abstract: An actuator for moving a platform having electrical connections is provided. The actuator includes an outer frame connected to an inner frame by one or more spring elements that are electrically conductive. The actuator further includes one or more comb drive actuators that apply a controlled force between the outer frame and the inner frame. Each of the comb drive actuators includes one or more comb drives. Moreover, a method for moving a platform having electrical connections is also provided. The method includes connecting an outer frame to an inner frame using one or more spring elements that are electrically conductive. The method further includes generating a controlled force using one or more comb drive actuators. Each of the comb drive actuators includes one or more comb drives. In addition, the method includes applying the controlled force between the outer frame and the inner frame.

Abstract translation: 提供了用于移动具有电连接的平台的致动器。 致动器包括通过一个或多个导电的弹簧元件连接到内框架的外框架。 致动器还包括一个或多个梳状驱动致动器，其在外框架和内框架之间施加受控的力。 每个梳状驱动致动器包括一个或多个梳状驱动器。 此外，还提供了一种用于移动具有电连接的平台的方法。 该方法包括使用一个或多个导电弹簧元件将外框架连接到内框架。 该方法还包括使用一个或多个梳状驱动致动器产生受控的力。 每个梳状驱动致动器包括一个或多个梳状驱动器。 此外，该方法包括在外框架和内框架之间施加受控力。

公开(公告)号：US20160204716A1

公开(公告)日：2016-07-14

申请号：US14910622

申请日：2014-07-30

Applicant: NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY ,  OMRON CORPORATION ,  KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO

Inventor： Masato SUZUKI ,  Akito MORI ,  Gen HASHIGUCHI ,  Tatsuhiko SUGIYAMA ,  Hiroshi IMAMOTO ,  Masatoshi OBA ,  Hiroyuki MITSUYA ,  Hisayuki ASHIZAWA ,  Kazunori ISHIBASHI

IPC: H02N1/00 ,  F16K31/02 ,  G02B26/02 ,  B81B3/00 ,  H01H59/00

CPC classification number: H02N1/008 ,  B81B3/0054 ,  B81B2201/018 ,  B81B2201/0292 ,  B81B2201/033 ,  B81B2201/036 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/0163 ,  B81B2203/051 ,  F16K31/02 ,  G02B26/02 ,  H01H59/00

Abstract: An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

Abstract translation: 致动器包括：静电致动机构，包括固定电极和可动电极; 由静电致动机构驱动的第一可动部; 第一弹性支撑部，其弹性地支撑所述第一可动部; 在所述固定电极和所述可动电极中的至少一个上形成的驻极体; 以及驱动控制单元，其控制对静电致动机构施加电压。 在致动器中，设置多个稳定状态，其中第一可移动部件位于由驻极体产生的静电力与由第一弹性支撑部分施加的弹力相匹配的稳定位置处，或者靠近这样的稳定​​位置 稳定的位置。 通过向静电致动机构施加电压，第一可动部件可以从任何稳定位置移动到另一个稳定位置。

公开(公告)号：US20150177272A1

公开(公告)日：2015-06-25

申请号：US14407898

申请日：2013-05-31

Applicant: Purdue Research Foundation

Inventor： Jason V. Clark

IPC: G01P15/125 ,  B81B3/00 ,  B81C99/00 ,  G01Q20/00 ,  G01K11/00

CPC classification number: G01P15/125 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2201/033 ,  B81C99/003 ,  B81C99/0045 ,  G01C19/5755 ,  G01K11/00 ,  G01P15/097 ,  G01P21/00 ,  G01P2015/0871 ,  G01Q20/00 ,  G01Q40/00

Abstract: Methods of measuring displacement of a movable mass in a microelectromechanical system (MEMS) include driving the mass against two displacement-stopping surfaces and measuring corresponding differential capacitances of sensing capacitors such as combs. A MEMS device having displacement-stopping surfaces is described. Such a MEMS device can be used in a method of measuring properties of an atomic force microscope (AFM) having a cantilever and a deflection sensor, or in a temperature sensor having a displacement-sensing unit for sensing a movable mass permitted to vibrate along a displacement axis. A motion-measuring device can include pairs of accelerometers and gyroscopes driven 90° out of phase.

Abstract translation: 测量微机电系统（MEMS）中可移动质量块的位移的方法包括对两个位移停止表面驱动质量，并测量感应电容器（如梳子）的对应微分电容。 描述了具有位移停止表面的MEMS器件。 这种MEMS器件可以用于测量具有悬臂和偏转传感器的原子力显微镜（AFM）的性质的方法中，或者在具有位移感测单元的温度传感器中使用，该位移感测单元用于感测允许沿着 位移轴。 运动测量装置可以包括驱动90°异相的加速度计和陀螺仪对。

公开(公告)号：US20150021745A1

公开(公告)日：2015-01-22

申请号：US14336477

申请日：2014-07-21

Applicant: Atlantic lnertial Systems Limited

Inventor： Tracey Hawke ,  Mark Venables ,  lan Sturland ,  Rebecka Eley

IPC: B81C1/00 ,  B81B3/00 ,  H01L21/3065 ,  H01L21/308

CPC classification number: B81C1/00531 ,  B81B3/0064 ,  B81B2201/033 ,  B81B2203/033 ,  B81C1/00388 ,  B81C1/00619 ,  B81C2201/0112 ,  H01L21/3065 ,  H01L21/308

Abstract: A method of reactive ion etching a substrate 46 to form at least a first and a second etched feature (42, 44) is disclosed. The first etched feature (42) has a greater aspect ratio (depth:width) than the second etched feature (44). In a first etching stage the substrate (46) is etched so as to etch only said first feature (42) to a predetermined depth. Thereafter in a second etching stage, the substrate (46) is etched so as to etch both said first and said second features (42, 44) to a respective depth. A mask (40) may be applied to define apertures corresponding in shape to the features (42, 44). The region of the substrate (46) in which the second etched feature (44) is to be produced is selectively masked with a second maskant (50) during the first etching stage, The second maskant (50) is then removed prior to the second etching stage.

Abstract translation: 公开了一种反应离子蚀刻衬底46以形成至少第一和第二蚀刻特征（42,44）的方法。 第一蚀刻特征（42）具有比第二蚀刻特征（44）更大的纵横比（深度：宽度）。 在第一蚀刻阶段中，蚀刻衬底（46）以仅将所述第一特征（42）仅蚀刻到预定深度。 此后，在第二蚀刻阶段，蚀刻衬底（46）以便将所述第一和第二特征（42,44）都蚀刻到相应的深度。 可以施加掩模（40）以限定形状对应于特征（42,44）的孔。 在第一蚀刻阶段期间，用第二掩模（50）选择性地掩蔽其中要产生第二蚀刻特征（44）的衬底（46）的区域，然后在第二蚀刻阶段之前将第二掩模（50） 蚀刻阶段。

公开(公告)号：US08616791B2

公开(公告)日：2013-12-31

申请号：US13247869

申请日：2011-09-28

Applicant: Robert J. Calvet ,  Roman C. Gutierrez

Inventor： Robert J. Calvet ,  Roman C. Gutierrez

IPC: G03B17/00

CPC classification number: H02N1/006 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2203/053 ,  G03B2205/0084

Abstract: A method for making an actuator device includes forming a substantially planar structure, including an outer frame with a latch foot, a fixed frame coupled to the outer frame, a latch mass coupled to the fixed frame, a latch block coupled to the latch mass by a latch block flexure, a moveable frame coupled to the outer frame, and an actuator incorporating a plurality of interdigitated teeth alternately attached to the fixed and moving frames. For operation, the latch mass is rotated downward until an upper surface of the latch block is disposed below and held in latching contact with a lower surface of the latch foot by the latch block flexure.

Abstract translation: 用于制造致动器装置的方法包括形成基本上平面的结构，包括具有闩锁脚的外框架，耦合到外框架的固定框架，耦合到固定框架的闩锁块，通过 锁定块挠曲件，联接到外框架的可移动框架，以及包括交替地附接到固定和移动框架的多个叉指齿轮的致动器。 为了操作，闩锁块向下旋转直到闩锁块的上表面设置在下方并通过闩锁块弯曲保持与闩锁脚的下表面闩锁接触。

公开(公告)号：US20130037512A1

公开(公告)日：2013-02-14

申请号：US13652851

申请日：2012-10-16

Applicant: Yu SUN ,  Keekyoung KIM

Inventor： Yu SUN ,  Keekyoung KIM

IPC: H05K13/00

CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sixes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，该方法能够抓住六点和二轴力感测能力的大范围的微纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

公开(公告)号：US08317245B2

公开(公告)日：2012-11-27

申请号：US12305468

申请日：2007-06-21

Applicant: Yu Sun ,  Keekyoung Kim

Inventor： Yu Sun ,  Keekyoung Kim

IPC: B25J7/00

CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，其能够抓住大范围尺寸和双轴力感测能力的微型和纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

公开(公告)号：US20120208343A1

公开(公告)日：2012-08-16

申请号：US13456990

申请日：2012-04-26

Applicant: Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

Inventor： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC: H01L21/311

CPC classification number: H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

Abstract translation: 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一半导体材料层的第一半导体晶片和配置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

公开(公告)号：US20120206785A1

公开(公告)日：2012-08-16

申请号：US13365087

申请日：2012-02-02

Applicant: Sason SOURANI ,  Moshe Medina

Inventor： Sason SOURANI ,  Moshe Medina

IPC: G02B26/08 ,  H05K13/00 ,  H02N1/00

CPC classification number: H02N1/006 ,  B81B3/0043 ,  B81B7/00 ,  B81B7/008 ,  B81B2201/033 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B7/1821 ,  G02B26/0841 ,  H02N1/008

Abstract: A Micro Electro Mechanical Systems (MEMS) device comprising: a rotor, comprising a first plurality of rotor teeth and a second plurality of rotor teeth, formed in at least two layers of silicon-on-insulator (SOI) substrate, wherein each rotor tooth belonging to the first plurality of rotor teeth is formed in a first layer and each rotor tooth of the second plurality of rotor teeth is formed in a second layer; and a stator comprising a first plurality of stator teeth and a second plurality of stator teeth, formed in at least two layers of SOI substrate, wherein each stator tooth belonging to the first plurality of stator teeth is formed in a first layer, and each stator tooth of the second plurality of stator teeth is formed in a second layer.

Abstract translation: 一种微机电系统（MEMS）装置，包括：转子，包括形成在至少两层绝缘体上硅（SOI）衬底中的第一多个转子齿和第二多个转子齿，其中每个转子齿 属于第一多个转子齿的第一多个转子齿形成在第一层中，并且第二多个转子齿的每个转子齿形成在第二层中; 以及定子，其包括形成在至少两层SOI衬底中的第一多个定子齿和第二多个定子齿，其中属于所述第一多个定子齿的每个定子齿形成在第一层中，并且每个定子 第二多个定子齿的齿形成在第二层中。

公开(公告)号：US08193550B2

公开(公告)日：2012-06-05

申请号：US12136722

申请日：2008-06-10

Applicant: Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

Inventor： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC: H01L31/0352 ,  G02B26/10

CPC classification number: H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

Abstract translation: 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。