公开(公告)号：WO2005081981A2

公开(公告)日：2005-09-09

申请号：PCT/US2005/005769

申请日：2005-02-22

Applicant: SYSTEMS PLANNING AND ANALYSIS, INC. ,  THE UNIVERSITY OF MARYLAND ,  BUCKLEY, Steven, G. ,  BALDWIN, Christopher, S. ,  KRATZSCH, Kyle

Inventor： BUCKLEY, Steven, G. ,  BALDWIN, Christopher, S. ,  KRATZSCH, Kyle

IPC: G01J3/443 ,  G01N21/63 ,  G01N21/71 ,  G06F19/00

CPC classification number: G01J3/443 ,  G01N21/718

Abstract: A trace species detection System for engine health monitoring, the system including a laser for generating a laser beam, and optics for focusing the laser beam into an exhaust plume of an engine for thereby creating a spark in the exhaust plume. The System further includes spectral analysis instrumentation for detecting light emissions from the spark, and statistical processing instrumentation for analyzing data from the spectral analysis instrumentation for thereby identifying and quantifying specific particles within a volume of the spark. The invention also provides a method of monitoring the health of an engine, the method including generating a laser beam, focusing the laser beam into an exhaust plume of the engine for thereby creating a spark in the exhaust plume, detecting light emissions from the spark, and analyzing data from the detection for thereby identifying and quantifying specific particles within a volume of the spark.

Abstract translation: 用于发动机健康监测的痕量物种检测系统，该系统包括用于产生激光束的激光器，以及用于将激光束聚焦到发动机的排气羽流中的光学器件，从而在排气羽流中产生火花。 该系统还包括用于检测来自火花的光发射的光谱分析仪器和用于分析来自光谱分析仪器的数据的统计处理仪器，从而识别和量化火花体积内的特定颗粒。 本发明还提供了一种监测发动机健康的方法，该方法包括产生激光束，将激光束聚焦到发动机的排气羽流中，从而在排气羽流中产生火花，检测火花中的光的排放， 并分析来自检测的数据，从而识别和量化火花体积内的特定颗粒。

公开(公告)号：WO03004981A9

公开(公告)日：2005-03-17

申请号：PCT/US0220775

申请日：2002-07-01

Applicant: PRAXAIR TECHNOLOGY INC

Inventor： MALCZEWSKI MARK LEONARD ,  WEGRZYN JOSEPH ,  MARTIN WAYNE DONALD

IPC: G01N21/67 ,  G01J3/28 ,  G01J3/443 ,  G01N21/03 ,  G01N21/27 ,  G01J3/30

CPC classification number: G01J3/2803 ,  G01J3/443

Abstract: An analyzer suitable for performing continuous gas analysis in ultra-high purity applications. The analyser combines a low-level emission source and a gaseous emission spectrometer (10) having a charge coupled device (CCD) diode array as a detector. The CCD detector replaces one or more photomultipliers and narrow bandpass filters typically used in spectrometers. The analyser performs various processing operations to evaluate and eliminate the effect of background light level, or dark spectrum.

Abstract translation: 适用于在超高纯度应用中进行连续气体分析的分析仪。 分析仪结合了低电平发射源和具有电荷耦合器件（CCD）二极管阵列的气体发射光谱仪（10）作为检测器。 CCD检测器代替通常用于光谱仪中的一个或多个光电倍增管和窄带通滤波器。 分析仪执行各种处理操作，以评估和消除背景光等级或暗光谱的影响。

公开(公告)号：WO2004048943A1

公开(公告)日：2004-06-10

申请号：PCT/IE2003/000156

申请日：2003-11-27

Applicant: OPTICAL METROLOGY PATENTS LIMITED ,  MURTAGH, Martin, Edward ,  KELLY, Patrick, Vincent

Inventor： MURTAGH, Martin, Edward ,  KELLY, Patrick, Vincent

IPC: G01N21/17

CPC classification number: B82Y20/00 ,  B82Y10/00 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0294 ,  G01J3/36 ,  G01J3/443 ,  G01J2003/2866 ,  G01N21/1717

Abstract: An optical spectrometer (1, 100, 200) has a collector (15) for collecting a reflected probe, and a separate collector (23) for collecting luminescence. In one spectrometer (200) the collimated luminescence and reflectance beams are routed through an optical subsystem (6), a monochromator (7), and further optical components (8). Thus reflectance (16), calibration (11), and luminescence (24) detectors receive inputs from the same optical subsystem (8). This arrangement allows calibration (spectral accuracy and even correction or repair), as well as modulation reflectance spectroscopy and luminescence spectroscopy to be simultaneously performed without the need for a filter such as a notch filter.

Abstract translation: 光谱仪（1,100,200）具有用于收集反射探针的收集器（15）和用于收集发光的单独收集器（23）。 在一个光谱仪（200）中，准直的发光和反射光束通过光学子系统（6），单色仪（7）和另外的光学部件（8）布线。 因此，反射率（16），校准（11）和发光（24）检测器接收来自同一光学子系统（8）的输入。 这种布置允许同时执行校准（光谱精度，甚至校正或修复）以及调制反射光谱和发光光谱，而不需要诸如陷波滤波器的滤波器。

公开(公告)号：WO2003081287A2

公开(公告)日：2003-10-02

申请号：PCT/US2003/001566

申请日：2003-01-17

Applicant: MISSISSIPPI STATE UNIVERSITY

Inventor： ZHANG, Hansheng ,  RAI, Awedesh ,  SINGH, Jagdish ,  YUEH, Fang-YU

IPC: G02B

CPC classification number: G01N21/718 ,  G01J3/443

Abstract: A fiber optic laser-induced breakdown spectroscopy (LIBS) sensor, including a laser light source, a harmonic separator for directing the laser light, a dichroic mirror for reflecting the laser light, a coupling lens for coupling the laser light at an input of a multimode optical fiber, a connector for coupling the laser light from an output of the multimode optical fiber to an input of a high temperature holder made of stainless steel, and a detector portion for receiving emission signal and analyzing LIBS intensities. In one variation, the multimode optical fiber has silica core and silica cladding. The holder includes optical lenses for collimating and focusing the laser light in a molten alloy to produce a plasma, and for collecting and transmitting an emission signal to the multimode optical fiber.

Abstract translation: 一种光纤激光诱发击穿光谱（LIBS）传感器，包括激光光源，用于引导激光的谐波分离器，用于反射激光的分色镜，耦合透镜，用于将激光耦合在 多模光纤，用于将来自多模光纤的输出的激光耦合到由不锈钢制成的高温保持器的输入端的连接器，以及用于接收发射信号和分析LIBS强度的检测器部分。 在一个变型中，多模光纤具有二氧化硅芯和二氧化硅包层。 保持器包括用于将激光准直和聚焦在熔融合金中以产生等离子体的光学透镜，并用于收集和发射发射信号到多模光纤。

公开(公告)号：WO0244687A3

公开(公告)日：2003-02-27

申请号：PCT/US0144585

申请日：2001-11-29

Applicant: LIGHTWIND CORP ,  POWELL GARY ,  HAZARD RICHARD L

Inventor： POWELL GARY ,  HAZARD RICHARD L

IPC: H01L21/3065 ,  G01N1/22 ,  G01N21/68 ,  H01L21/205 ,  G01J3/30 ,  G01J3/443 ,  G01N21/00

CPC classification number: G01J3/02 ,  G01J3/0264 ,  G01J3/28 ,  G01J3/443 ,  G01N1/2226 ,  G01N21/15 ,  G01N21/68

Abstract: Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas (105) to emit radiation and detecting (109) in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces (112) may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined.

Abstract translation: 本发明的方面提供了用于对气体进行采样的新颖的方法和装置，激发采样气体（105）发射辐射并且从发射的辐射实时地检测（109）发射光谱的多个波段。 用于激发采样气体的能量可以基于检测到的波段进行调整。 可以基于检测到的波段来实时地控制过程。 可以使用新的接口（112）来显示检测到的波段的部分。 参考气体的已知流可以包括在采样气体流中，并且确定未知流量气体的未知流量。

公开(公告)号：WO0159413A3

公开(公告)日：2002-03-14

申请号：PCT/DE0100284

申请日：2001-01-25

Applicant: INFINEON TECHNOLOGIES AG ,  HEISE GERHARD ,  MAERZ REINHARD

Inventor： HEISE GERHARD ,  MAERZ REINHARD

IPC: G01J3/28 ,  G01J3/443 ,  G01J9/00 ,  H04B10/50 ,  H04B10/572 ,  G02B6/34 ,  G02B6/293

CPC classification number: H04B10/572 ,  G01J3/443 ,  G01J9/00 ,  G01J2003/2866 ,  H04B10/506

Abstract: According to the invention, an optical phased array (5) is coupled to a transmission medium (8) and is continuously tuned, e.g. by changing the temperature, so that the wavelengths of the signals can be determined by comparing the changes of the optical powers of the signals in the optical waveguides (60), which are located on the output side, with the filter curves of the phased array. Two optical waveguides of the same channel, which are located on the output side, are intercoupled at an angle that differs from zero (double gate) so that a reference wavelength for calibrating the phased array can be formed based on different transmission properties.

Abstract translation: 光学相控阵（5）传输介质（8）被耦合，其被连续地调谐，Z。 例如，通过温度变化，从而使信号的波长可以从在输出侧波导（60）与所述相控阵的滤波曲线的信号的光功率的变化的比较来确定。 相同信道的两个输出侧波导相互耦合在一个非零角度（双栅极），从而由于参考波长为相控阵的校准的不同的传输特性可以被形成。

公开(公告)号：WO9954694A9

公开(公告)日：2001-08-09

申请号：PCT/US9908894

申请日：1999-04-23

Applicant: SANDIA CORP

Inventor： SMITH MICHAEL LANE JR ,  STEVENSON JOEL O'DON ,  WARD PAMELA DENISE PEARDON

IPC: G01J3/02 ,  G01J3/00 ,  G01J3/28 ,  G01J3/44 ,  G01J3/443 ,  G01N21/71 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H05H1/00

CPC classification number: G01J3/443 ,  G01J3/28 ,  G01J2003/2866

Abstract: The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in some manner to calibrating or initializing a plasma monitoring assembly (174). This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window (124) through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber (74).

Abstract translation: 本发明一般涉及等离子体工艺的各个方面，更具体地说涉及这种等离子体工艺的监测。 一个方面以某种方式涉及校准或初始化等离子体监视组件（174）。 这种类型的校准可以用于解决与在等离子体处理中获得的光发射数据相关联的波长偏移，强度偏移或二者。 校准光可以指向窗口（124），通过该窗口获得光发射数据以确定窗口的内表面对通过其获得的光发射数据具有的影响（如果有的话），则操作 光发射数据采集装置，或两者兼而有之。 另一方面至少在一些方面涉及可以在处理室（74）内运行的等离子体处理（更典型地是正在运行的）的各种类型的评估。

公开(公告)号：KR101872995B1

公开(公告)日：2018-07-02

申请号：KR1020160164825

申请日：2016-12-06

Applicant: (주)옵토레인

Inventor： 원준호 ,  이도영 ,  최경학 ,  최안식

IPC: G02B5/22 ,  G03F7/00 ,  G03F7/20

CPC classification number: G01N21/6428 ,  B01L3/50851 ,  C12Q1/686 ,  G01J1/0252 ,  G01J1/0488 ,  G01J3/0286 ,  G01J3/4406 ,  G01J3/443 ,  G01J3/51 ,  G01J2003/468 ,  G01N21/21 ,  G01N2021/6471 ,  G02B5/22

Abstract: 광각이미션필터는베이스매질, 포토레지스트, 및안료를포함한다. 상기베이스매질은평평한형상으로배치되고투명하며여기광에의해형광이나인광을발생시키지않는재질을포함한다. 상기포토레지스트는상기베이스매질내에배치되고, 열경화, 광경화, 및건조로이루어지는그룹에서선택되는어느하나이상의방법에의해고체상태로고정된다. 상기안료는상기베이스매질내에배치되고, 일정한파장의광을흡수한다. 상기포토레지스트에의해상기여기광을 1차적으로필터링하고상기안료에의해상기여기광을 2차적으로필터링하여상기여기광의입사각과무관하게필터링이가능한광학특성을갖는다.

公开(公告)号：KR1020170070120A

公开(公告)日：2017-06-21

申请号：KR1020177012596

申请日：2015-09-23

Applicant: 어플라이드 머티어리얼스, 인코포레이티드

Inventor： 박,수남 ,  주,위페이 ,  수아레스,에드윈씨. ,  잉글,니틴케이. ,  루보미르스키,드미트리 ,  황,자인

IPC: H01J37/32 ,  C23C16/44 ,  C23C16/452 ,  C23C16/455 ,  C23C16/50 ,  C23C16/52 ,  G01J3/02

CPC classification number: H01J37/32972 ,  C23C16/4405 ,  C23C16/452 ,  C23C16/45565 ,  C23C16/50 ,  C23C16/52 ,  G01J3/0218 ,  G01J3/443 ,  H01J37/32082 ,  H01J37/32532 ,  H01J37/3255

Abstract: 실시예에서, 플라즈마소스는내부의제1 천공들을통해하나이상의플라즈마소스가스를이송하도록구성된제1 전극; 제1 전극의주변부주위에서제1 전극과접촉하여배치된절연체; 제2 전극 - 제2 전극은, 제1 전극, 제2 전극및 절연체가플라즈마발생공동을정의하도록제2 전극의주변부가절연체에맞닿은상태로배치됨 - 을포함한다. 제2 전극은플라즈마발생공동으로부터제2 전극을통해프로세스챔버를향하여플라즈마생성물들을이동시키도록구성된다. 플라즈마생성물들을생성하기위해플라즈마발생공동내에서하나이상의플라즈마소스가스로플라즈마를점화시키도록전력공급부가제1 전극및 제2 전극에걸쳐전기전력을제공한다. 제1 전극, 제2 전극및 절연체중 하나는플라즈마로부터의광학신호를제공하는포트를포함한다.

Abstract translation: 在一个实施例中，等离子体源包括：第一电极，其被配置为通过第一内部穿孔输送一种或多种等离子体源气体; 绝缘体，所述绝缘体被布置为围绕所述第一电极的外围与所述第一电极接触; 第二电极 - 第二电极包括第一电极，第二电极和第二电极的外围部分，使得绝缘体限定等离子体生成腔。 第二电极被配置为通过第二电极将等离子体产物从等离子体生成腔移向处理室。 电源在第一电极和第二电极上提供电力以利用等离子体产生腔内的至少一个等离子体源气体点燃等离子体以产生等离子体产物。 第一电极，第二电极和绝缘体中的一个包括用于从等离子体提供光信号的端口。

公开(公告)号：KR1020170029892A

公开(公告)日：2017-03-16

申请号：KR1020150127034

申请日：2015-09-08

Applicant: 삼성전자주식회사 ,  연세대학교 산학협력단

Inventor： 김인중 ,  윤일구

IPC: G02B3/00 ,  H01J37/32 ,  G01J3/443 ,  H01L21/3213 ,  H01L21/768

CPC classification number: G01J3/0208 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/443 ,  G02B5/205 ,  G02B7/021 ,  H01J37/32972 ,  H01J37/3299 ,  H01L21/67253

Abstract: 본발명의기술적사상은플라즈마공정에서의플라즈마상태를정밀하게검출하는데이용할수 있는튜브형렌즈, 그튜브형렌즈를포함한 OES 장치, OES 장치를포함한플라즈마모니터링시스템및 그시스템을이용한반도체제조방법을제공한다. 그튜브형렌즈는원통형튜브; 광이입사하는상기튜브의입구쪽에배치되고, 중심영역으로상기광의투과가차단된제1 렌즈; 및상기광이출사하는상기튜브의출구쪽에배치된제2 렌즈;를포함한다.

Abstract translation: 本发明的技术特征提供了一种使用等离子监控系统和包括该OES设备，OES设备，包括等离子处理eseoui等离子体状态的筒状透镜的系统中，并且可用于精确地检测镜头管的半导体制造方法。 管状透镜包括圆柱形管; 它被设置在使光入射时，在第一透镜和光透射被阻挡在中央区域中的管的入口; 并且第二透镜设置在光出射的管的出口侧。