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    Microparticle measuring apparatus
    243.
    发明授权
    Microparticle measuring apparatus 有权
    微粒测量仪

    公开(公告)号：US09429508B2

    公开(公告)日：2016-08-30

    申请号：US14434404

    申请日：2013-08-30

    Applicant: SONY CORPORATION

    Inventor： Taichi Takeuchi ,  Shingo Imanishi

    IPC: G01N15/14 ,  G01N21/53 ,  G01N21/21 ,  G01N21/49 ,  G01N21/47 ,  G01N15/10

    CPC classification number: G01N15/1436 ,  G01N15/1429 ,  G01N15/1434 ,  G01N15/1459 ,  G01N21/21 ,  G01N21/47 ,  G01N21/49 ,  G01N21/53 ,  G01N21/645 ,  G01N2015/0065 ,  G01N2015/1006 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/0683

    Abstract: A microparticle measuring apparatus for highly accurately detecting the position of a microparticle flowing through a flow channel includes a light irradiation unit for irradiating a microparticle flowing through a flow channel with light, and a scattered light detection unit for detecting scattered light from the microparticle, including an objective lens for collecting light from the microparticle, a light splitting element for dividing the scattered light from the light collected by the objective lens, into first and second scattered light, a first scattered light detector for receiving an S-polarized light component, and an astigmatic element disposed between the light splitting element and the first scattered light detector, and making the first scattered light astigmatic. A relationship between a length L from a rear principal point of the objective lens to a front principal point of the astigmatic element, and a focal length f of the astigmatic element satisfies the following formula I. 1.5f≦L≦2.5f  (I)

    Abstract translation: 用于高精度地检测流过流路的微粒的位置的微粒测量装置包括：用于照射流过流路的微粒的光照射单元，以及用于检测来自微粒的散射光的散射光检测单元，包括 用于收集来自微粒的光的物镜，将从物镜收集的光中散射的光分成第一和第二散射光的分光元件，用于接收S偏振光分量的第一散射光检测器，以及 设置在所述分光元件和所述第一散射光检测器之间的散光元件，以及使所述第一散射光散光。 从物镜的后方主点到散光元件的前方主点的长度L与散光元件的焦距f的关系满足下式I1.5f≤L≤2.5f（I）

    SCANNING MICROSCOPE WITH POLARISED SAMPLE ILLUMINATION
    244.
    发明申请
    SCANNING MICROSCOPE WITH POLARISED SAMPLE ILLUMINATION 有权
    扫描显微镜与极化样品照明

    公开(公告)号：US20160223457A1

    公开(公告)日：2016-08-04

    申请号：US14916538

    申请日：2014-09-03

    Applicant: LEICA MICROSYSTEMS CMS GMBH

    Inventor： Vishnu Vardhan KRISHNAMACHARI

    IPC: G01N21/21 ,  G01N21/65 ,  G02B21/00

    CPC classification number: G01N21/21 ,  G01N21/65 ,  G01N2201/067 ,  G01N2201/0683 ,  G02B21/002 ,  G02B21/0032 ,  G02B21/0068 ,  G02B27/283 ,  G02B27/286

    Abstract: The invention relates to a method for investigating a sample, the sample being impinged upon by illuminating light, and detected light emerging from the sample being directed to a detector, and the illuminating light being directed through an acousto-optic component with which the impingement upon the sample by illuminating light can be temporarily interrupted. The method is notable for the fact that the sample is illuminated with a first illuminating light bundle that has a first linear polarization direction, and with a second illuminating light bundle whose linear polarization direction is continuously switched over between the first linear polarization direction and a second linear polarization direction different from the first linear polarization direction, the illuminating light having the first linear polarization direction proceeding along a first light path and illuminating light having the second linear polarization direction proceeding along a second light path, and the acousto-optic component combining the light paths.

    Abstract translation: 本发明涉及一种用于研究样品的方法，通过照射光照射样品，并且检测到从样品中出射的光被引导到检测器，并且照明光被引导通过声光部件，撞击在其上 可以暂时中断通过照明光的样品。 该方法值得注意的是，样品被具有第一线偏振方向的第一照明光束照射，并且第二照明光束的线偏振方向在第一线偏振方向和第二线偏振方向之间连续切换 线偏振方向与第一线偏振方向不同的是，具有第一线偏振方向的照明光沿第一光路行进，具有第二线偏振方向的照明光沿第二光路行进，声光分量合成 光路。

    CHEMICAL CHARACTERIZATION OF SURFACE FEATURES
    245.
    发明申请
    CHEMICAL CHARACTERIZATION OF SURFACE FEATURES 有权
    表面特征的化学特征

    公开(公告)号：US20160178513A1

    公开(公告)日：2016-06-23

    申请号：US15053946

    申请日：2016-02-25

    Applicant: Seagate Technology LLC

    Inventor： Joachim Walter Ahner ,  Samuel Kah Hean Wong ,  Maissarath Nassirou ,  Henry Luis Lott ,  David M. Tung ,  Florin Zavaliche ,  Stephen Keith McLaurin

    IPC: G01N21/47

    CPC classification number: G01N21/4738 ,  G01N21/95 ,  G01N2021/4764 ,  G01N2021/4792 ,  G01N2201/0635 ,  G01N2201/0683

    Abstract: Provided herein is an apparatus, including an optical characterization device; a photon detector array configured to sequentially receive a first set of photons scattered from surface features of an article and a second set of photons scattered from surface features of the article and subsequently processed by the optical characterization device; and a chemical characterization means for chemically characterizing the surface features of the article, wherein the chemical characterization means is configured for processing the first set of photons received by the photon detector array and the second set of photons received by the photon detector array.

    Abstract translation: 本文提供的装置包括光学表征装置; 光子检测器阵列，其被配置为顺序地接收从制品的表面特征散射并随后由所述光学表征装置处理的物品的表面特征散射的第一组光子和第二组光子; 以及用于化学表征所述制品的表面特征的化学表征装置，其中所述化学表征装置被配置用于处理由所述光子检测器阵列接收的第一组光子和由所述光子检测器阵列接收的所述第二组光子。

    Method using laser ellipsometry for determining the quality of liquid product containing polyphenols
    247.
    发明授权
    Method using laser ellipsometry for determining the quality of liquid product containing polyphenols 有权
    使用激光椭圆偏光法测定含有多酚的液体产品的质量的方法

    公开(公告)号：US09354162B2

    公开(公告)日：2016-05-31

    申请号：US14141602

    申请日：2013-12-27

    Applicant: Paul Anthony Martino, Sr.

    Inventor： Paul Anthony Martino, Sr.

    IPC: G01J4/00 ,  G01N21/00 ,  G01N21/21 ,  G01N21/01

    CPC classification number: G01N21/211 ,  G01B11/0641 ,  G01N21/01 ,  G01N21/4133 ,  G01N2021/0106 ,  G01N2021/213 ,  G01N2201/06113 ,  G01N2201/0683

    Abstract: The objective is to develop a method for determining the quality of a liquid product containing polyphenols. The present invention is a method that is a significant improvement over existing methods that use conventional laboratory instrumentation to study the quality of liquid products. The method uses an adsorption cell with a small mirror as a reflecting surface and acts as a substrate for the adsorption of the liquid's polyphenols on its surface. The polyphenol's film thickness is measured by laser ellipsometry. Light from a monochromatic light source is reflected from the thin film of polyphenol, which changes the light's optical properties and are sensed using the principles of ellipsometry. The changes in state of polarized light are translated into graphical illustrations of measured and computed parameters that can be recognized and interpreted as distinctive properties of liquid product quality.

    Abstract translation: 目的是开发一种用于测定含有多酚的液体产品的质量的方法。 本发明是一种比使用常规实验室仪器研究液体产品质量的现有方法的显着改进方法。 该方法使用具有小反射镜的吸附单元作为反射面，作为表面吸附液体多酚的基板。 通过激光椭圆测量法测量多酚的膜厚度。 来自单色光源的光从多酚的薄膜反射，其改变光的光学性质并且使用椭偏仪的原理来感测。 偏振光状态的变化被转换为可以被识别和解释为液体产品质量的独特性质的测量和计算参数的图示。

    ACTIVE REAL-TIME CHARACTERIZATION SYSTEM
    248.
    发明申请
    ACTIVE REAL-TIME CHARACTERIZATION SYSTEM 有权
    主动实时特征系统

    公开(公告)号：US20160119557A1

    公开(公告)日：2016-04-28

    申请号：US14526246

    申请日：2014-10-28

    Applicant: The Boeing Company

    Inventor： Jeffrey H. Hunt ,  John H. Belk

    IPC: H04N5/33 ,  B64F5/00 ,  G01N21/95 ,  H04N5/225 ,  G01N21/88

    CPC classification number: H04N5/332 ,  B64F5/60 ,  G01N21/8806 ,  G01N21/95 ,  G01N2021/8472 ,  G01N2021/8845 ,  G01N2201/0683 ,  H04N5/2256

    Abstract: A system for providing active real-time characterization of an article under test is disclosed. An infrared light source, a first visible light source and a second visible light source each outputs and directs a beam of coherent light at a particular area on the article under test. A visible light camera and a visible light second harmonic generation camera, an infrared camera and an infrared second harmonic generation camera, a sum frequency camera and a third order camera are each configured to receive a respective predetermined return beam of light from the particular area on the article under test. A processor receives signals from the cameras and calculates in real time respective spectroscopic signals and compares each calculated signal with each other calculated signal and with a predetermined baseline signal to ensure that the article under test conforms to an expected value.

    Abstract translation: 公开了一种用于提供被测物品的主动实时表征的系统。 红外光源，第一可见光源和第二可见光源各自输出并引导被测物品上特定区域上的相干光束。 可见光摄像机和可见光二次谐波发生摄像机，红外摄像机和红外二次谐波发生摄像机，和频摄像机和三阶摄像机都被配置为从特定区域接收相应的预定的返回光束 被测文章。 处理器从摄像机接收信号并实时计算各自的光谱信号，并将每个计算的信号与每个其它计算的信号和预定的基线信号进行比较，以确保待测物品符合预期值。

    METHOD FOR DETECTING RESISTANCE OF A PHOTO RESIST LAYER
    250.
    发明申请
    METHOD FOR DETECTING RESISTANCE OF A PHOTO RESIST LAYER 有权
    检测耐光层电阻的方法

    公开(公告)号：US20160061722A1

    公开(公告)日：2016-03-03

    申请号：US14434187

    申请日：2014-08-15

    Applicant: BOE TECHNOLOGY GROUP CO., LTD.

    Inventor： Hui Tian

    IPC: G01N21/41 ,  H01L21/027 ,  H01L21/3115 ,  H01L21/3105 ,  G01N21/21 ,  H01L21/66

    CPC classification number: G01N21/41 ,  G01N21/211 ,  G01N2201/0683 ,  H01L21/0273 ,  H01L21/31058 ,  H01L21/31155 ,  H01L22/12

    Abstract: The present disclosure provides a method for detecting resistance of a photo resist layer. The method includes: providing a silicon wafer and measuring a refractive index of a surface of the silicon wafer as an initial refractive index of the surface of the silicon wafer; forming photo resist layers with different thicknesses on the surface of the silicon wafer; performing ion-implantation on the photo resist layers by predetermined amounts; peeling off the photo resist layers from the surface of the silicon wafer; and testing the refractive indexes of different areas on the surface of the silicon wafer after the ion-implantation, on which the photo resist layers with different thicknesses are located and determining the resistance of the photo resist layers with different thicknesses in contrast to the initial refractive index before the ion-implantation.

    Abstract translation: 本公开提供了一种用于检测抗蚀剂层的电阻的方法。 该方法包括：提供硅晶片并测量硅晶片的表面的折射率作为硅晶片表面的初始折射率; 在所述硅晶片的表面上形成具有不同厚度的光致抗蚀剂层; 在光致抗蚀剂层上进行预定量的离子注入; 从硅晶片的表面剥离光致抗蚀剂层; 并且在离子注入之后测试在硅晶片的表面上的不同区域的折射率，其上具有不同厚度的光致抗蚀剂层位于其上，并且确定与初始折射率相反的不同厚度的光致抗蚀剂层的电阻 离子注入前的指数。

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