公开(公告)号：US08049944B2

公开(公告)日：2011-11-01

申请号：US12389399

申请日：2009-02-20

Applicant: Abdul Jaleel K. Moidu

Inventor： Abdul Jaleel K. Moidu

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/2931 ,  G02B6/3518 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584

Abstract: A two-axis tiltable linear array of MEMS micromirrors is described. The individual micromirrors of the array are flexibly suspended over a common substrate by using two pairs of serpentine hinges coupled by a gimbal ring and are actuated by using tilt and roll electrodes. The tilt actuator regions of the micromirrors are disposed within the gimbal rings, the roll hinges connecting the tilt actuator regions to the micromirrors, which provides for decoupling of the tilt and the roll of the micromirror. The structure allows for considerable decoupling of the tilt and the roll and, or the pistoning effects observed upon micromirror actuation. The structure is suitable for application in a wavelength selective optical switch.

Abstract translation: 描述了MEMS微镜的两轴可倾斜线性阵列。 通过使用由万向环联接的两对蛇形铰链，阵列的各个微镜可以灵活地悬挂在共同的基板上，并通过使用倾斜和滚动电极来驱动。 微镜的倾斜致动器区域设置在万向环内，辊铰链将倾斜致动器区域连接到微镜，其提供微镜的倾斜和辊的解耦。 该结构允许倾斜和辊的显着解耦，或者在微镜驱动时观察到的活塞效应。 该结构适用于波长选择光开关。

公开(公告)号：US08018118B2

公开(公告)日：2011-09-13

申请号：US12145063

申请日：2008-06-24

Applicant: Osamu Tsuboi ,  Norinao Kouma ,  Hiromitsu Soneda ,  Hisao Okuda ,  Yoshihiro Mizuno ,  Tsuyoshi Matsumoto ,  Ippei Sawaki

Inventor： Osamu Tsuboi ,  Norinao Kouma ,  Hiromitsu Soneda ,  Hisao Okuda ,  Yoshihiro Mizuno ,  Tsuyoshi Matsumoto ,  Ippei Sawaki

IPC: H02N1/00 ,  G02B26/08

CPC classification number: B81B3/0078 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.

Abstract translation: 微振荡元件包括基架，振荡部和将基架和振荡部彼此连接的连杆部。 振荡部分具有可移动功能部分，连接到可移动功能部分的第一驱动电极和连接到第一驱动电极的配重部分。 连杆部分限定摆动部分的摆动运动的轴线。 固定在基架上的第二驱动电极与第一驱动电极协作产生用于振荡运动的驱动力。

公开(公告)号：US20110198202A1

公开(公告)日：2011-08-18

申请号：US12708265

申请日：2010-02-18

Applicant: John E. Rogers

Inventor： John E. Rogers

IPC: H01H57/00

CPC classification number: B81B3/0056 ,  B81B3/0054 ,  B81B2201/033

Abstract: A gap closing actuator (GCA) device (200) is provided. The GCA device includes at least one device drive comb structure (202a, 202b), at least one input/output (I/O) comb structure (216a, 216b) defining an output of the GCA device, and at least one device truss comb structure (204) interdigitating the device drive comb structure and the I/O comb structure, the truss comb structure configured to move along a first motion axis (205) between a plurality of interdigitated positions based on a first bias voltage (VBIAS) applied between the truss comb structure and the device drive comb structure. The GCA device also includes a brake portion (230) configured for selectively physically engaging the device truss comb structure to fix a position of the device truss comb structure along the first motion axis.

Abstract translation: 提供间隙关闭致动器（GCA）装置（200）。 GCA设备包括至少一个设备驱动梳结构（202a，202b），限定GCA设备的输出的至少一个输入/输出（I / O）梳结构（216a，216b）和至少一个设备桁架梳 结构（204）交错设备驱动梳结构和I / O梳结构，桁架梳结构被配置为基于施加在多个叉指位置之间的第一偏置电压（VBIAS）沿第一运动轴线（205）移动 桁架梳结构和装置驱动梳结构。 GCA装置还包括制动部分（230），其构造成用于选择性地物理地接合装置桁架梳结构以固定装置桁架梳结构沿着第一运动轴的位置。

公开(公告)号：US20110186944A1

公开(公告)日：2011-08-04

申请号：US13055298

申请日：2009-06-15

Applicant: Thomas Friedrich ,  Daniel Christoph Meisel ,  Carsten Raudzis

Inventor： Thomas Friedrich ,  Daniel Christoph Meisel ,  Carsten Raudzis

IPC: H01L29/84 ,  H01L21/02

CPC classification number: B81B3/0037 ,  B81B2201/033 ,  H02N1/008

Abstract: A micromechanical structure, includes at least two structure sections configured to bound a working gap, the at least two structure sections being movable relative to one another, and a working gap width setting device configured to broaden the at least one working gap by movement of a first structure section of the at least two structure sections relative to a second structure section of the at least two structure section, the first structure section is stationary relative to a reference point during operation of the micromechanical structure and (ii) the second structure section is movable relative to the reference point during operation.

Abstract translation: 微机械结构包括至少两个构造成结合工作间隙的结构部分，所述至少两个结构部分可相对于彼此移动;以及工作间隙宽度设定装置，其经配置以通过移动所述至少一个工作间隙 所述至少两个结构部分的第一结构部分相对于所述至少两个结构部分的第二结构部分，所述第一结构部分在所述微机械结构的操作期间相对于参考点是静止的，并且所述第二结构部分是 在运行期间相对于参考点可移动。

公开(公告)号：US20110182150A1

公开(公告)日：2011-07-28

申请号：US13122464

申请日：2009-10-01

Applicant: Yuval Cohen ,  Shay Kaplan ,  Daniel Lewin ,  Alex Sromin ,  Meir Ben Simon

Inventor： Yuval Cohen ,  Shay Kaplan ,  Daniel Lewin ,  Alex Sromin ,  Meir Ben Simon

IPC: H04R19/00

CPC classification number: H04R19/005 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2201/033 ,  B81B2203/053 ,  H02N1/006 ,  H04R1/005 ,  H04R1/403 ,  H04R3/002 ,  H04R3/007 ,  H04R3/12 ,  H04R7/18 ,  H04R19/02 ,  H04R31/00 ,  H04R2201/401

Abstract: Actuator apparatus comprising at least one moving elements, each comprising comb drive apparatus including at least first and second comb elements at least one of which is free to be in motion in a medium, and a controller controlling the motion responsive to an input signal representing a desired sound.

Abstract translation: 致动器装置包括至少一个移动元件，每个移动元件包括梳状驱动装置，其至少包括第一和第二梳状元件，其中至少一个可以在介质中自由运动;以及控制器，响应于表示 所需的声音。

公开(公告)号：US07923894B2

公开(公告)日：2011-04-12

申请号：US12447503

申请日：2007-12-03

Applicant: Hiroshi Obi ,  Hironori Tomita ,  Akira Kurozuka

Inventor： Hiroshi Obi ,  Hironori Tomita ,  Akira Kurozuka

IPC: G02B26/08 ,  H02N1/00

CPC classification number: G02B26/0841 ,  B81B3/007 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  B81B2207/07 ,  H02N1/006 ,  H04N1/113 ,  H04N2201/0082

Abstract: The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applying a driving voltage to each of the first movable section and the second movable section are provided on the second movable section, in a state of being split by isolation trenches and being stabilized by the backlining provided under the second movable section. By providing such backlining, mutual stabilization of the first conductive portion and the second conductive portion in an electrically isolated state, and simplification of the production steps for the actuator are realized. By providing a mirror on the first conductive portion of the actuator of the present invention as such, it becomes possible to provide a bi-axial pivoting type mirror device through a simple production process.

Abstract translation: 本发明涉及具有第一可移动部分，支撑第一可移动部分的第二可动部分和背衬的双轴向枢转型致动器。 第一可动部分和第二导电部分，用于独立施加驱动电压到第一可移动部分和第二可移动部分中的每一个，在被隔离沟槽分开的状态下设置在第二可动部分上，并且通过背衬 设置在第二可移动部分下方。 通过在电气隔离状态下提供这种背衬，相互稳定的第一导电部分和第二导电部分，并且实现致动器的制造步骤的简化。 通过在本发明的致动器的第一导电部分上设置反射镜，可以通过简单的制造工艺提供双轴向枢转型反射镜装置。

公开(公告)号：US20110050251A1

公开(公告)日：2011-03-03

申请号：US12846314

申请日：2010-07-29

Applicant: Axel FRANKE ,  Alexander Buhmann ,  Marian Keck

Inventor： Axel FRANKE ,  Alexander Buhmann ,  Marian Keck

IPC: G01R27/26

CPC classification number: G01P15/125 ,  B81B3/0094 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2201/033 ,  G01D5/2412 ,  H02N1/008

Abstract: A capacitive sensor and a capacitive actuator having at least one seismic mass deflectably mounted on a substrate. A comb electrode having comb fingers is mounted on the seismic mass, and a comb electrode having comb fingers is mounted on the substrate in such a way that the comb fingers are situated parallel to a deflection direction of the seismic mass and interlock in a comb-like manner. The characteristic curve of the sensor or actuator is adjusted by optimizing the geometry of at least one comb electrode, in particular of at least one comb finger.

Abstract translation: 电容式传感器和电容式致动器，其具有可偏转地安装在基板上的至少一个地震质量块。 具有梳齿的梳状电极安装在地震块上，并且具有梳齿的梳形电极以这样的方式安装在基底上，使得梳齿平行于抗震块的偏转方向定位， 喜欢的方式 通过优化至少一个梳状电极，特别是至少一个梳齿的几何形状来调节传感器或致动器的特性曲线。

公开(公告)号：US07893596B2

公开(公告)日：2011-02-22

申请号：US12761123

申请日：2010-04-15

Applicant: Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

Inventor： Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto

IPC: H02N2/00

CPC classification number: B81B3/0086 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).

Abstract translation: 提供一种适用于抑制驱动特性的劣化的微型可移动装置，以及包括这种微型可移动装置的微型可移动装置阵列。 本发明的微型可移动装置（X1）包括可动部，包括第一驱动电极，用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极，第一导体部分（22c），电连接到 第一驱动电极，与第二驱动电极电连接的第二导体部分（22b）和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分（21a） （22c）经由绝缘膜（23）经由绝缘膜（23）与第二导体部（22b）接合。

公开(公告)号：US07847995B2

公开(公告)日：2010-12-07

申请号：US12500665

申请日：2009-07-10

Applicant: Takashi Shimizu ,  Kazuyuki Mori

Inventor： Takashi Shimizu ,  Kazuyuki Mori

IPC: G02B26/08 ,  G02B26/00 ,  G02B6/26

CPC classification number: G02B26/0841 ,  B81B3/0086 ,  B81B2201/033

Abstract: A micro electro mechanical system device includes a fixed electrode that includes a first electrode group, and a movable electrode that moves with respect to the fixed electrode as voltage is applied and includes a second electrode group that opposes the first electrode group, wherein electrodes of at least one among the first electrode group and the second electrode group are connected via a resistor.

Abstract translation: 微电子机械系统装置包括：固定电极，其包括第一电极组;以及可动电极，其在施加电压时相对于固定电极移动，并且包括与所述第一电极组相对的第二电极组， 第一电极组和第二电极组中的至少一个经由电阻器连接。

公开(公告)号：US07715076B2

公开(公告)日：2010-05-11

申请号：US11945307

申请日：2007-11-27

Applicant: AbdulJaleel K. Moidu

Inventor： AbdulJaleel K. Moidu

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/058

Abstract: A hybrid electro-static actuator for rotating a two-dimensional micro-electro-mechanical micro-mirror device about two perpendicular axes includes a vertical comb drive for rotating the micro-mirror about a tilt axis, and a parallel plate drive for rotating the micro-mirror about a roll axis. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which is only rotatable about the tilt axis, while one of the parallel plate electrodes is mounted on the underside of a main platform, which generally surrounds the sub-frame. The vertical comb drive rotates both the sub-frame and the main platform about the tilt axis, while the parallel plate drive only rotates the main platform about the roll axis.

Abstract translation: 用于围绕两个垂直轴旋转二维微机电微反射镜装置的混合静电致动器包括用于围绕倾斜轴旋转微镜的垂直梳齿驱动器和用于旋转微型 - 关于卷轴的镜像。 梳状驱动器的转子梳齿从微镜的子框架延伸，该微镜仅能绕倾斜轴线旋转，而平行板电极中的一个安装在主平台的下侧，主平台通常围绕 子框架 垂直梳齿驱动器使副框架和主平台围绕倾斜轴线旋转，而平行板驱动器仅使主平台围绕辊轴线旋转。