公开(公告)号：US20090290155A1

公开(公告)日：2009-11-26

申请号：US12464273

申请日：2009-05-12

Applicant: Katsumi SHIBAYAMA ,  Tomofumi SUZUKI ,  Masaki HIROSE

Inventor： Katsumi SHIBAYAMA ,  Tomofumi SUZUKI ,  Masaki HIROSE

IPC: G01J3/28

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/18

Abstract: In a spectroscopy module 1, a light passing hole 50 through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 50 and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light detecting element 5 is bonded to a front plane 2a of a substrate 2 with an optical resin adhesive 63. Thus, it is possible to reduce a stress generated onto the light detecting element 5 due to a thermal expansion difference between the light detecting element 5 and the substrate 2. Additionally, on the light detecting element 5, a first convex portion 101 is formed so as to be located at least between the light detecting portion 5a and the light passing hole 50 when viewed from a direction substantially perpendicular to the front plane 2a. Thus, when the light detecting element 5 is attached to the substrate 2 via the optical resin adhesive 63, the optical resin adhesive 63 is dammed at the first convex portion 101. Thus, the optical resin adhesive 63 is prevented from penetrating into the light passing hole 50.

Abstract translation: 在光谱模块1中，在光检测元件5中形成有通过向分光部4前进的光L1通过的光通过孔50.因此，能够防止光通过孔50与 光检测元件5的光检测部分5a偏离。 此外，光检测元件5利用光学树脂粘合剂63接合到基板2的前面2a。因此，可以减少由于光的热膨胀差而在光检测元件5上产生的应力 检测元件5和基板2.此外，在光检测元件5上，当从基本上垂直的方向观察时，形成至少位于光检测部分5a和光通过孔50之间的第一凸部101 到前平面2a。 因此，当光检测元件5经由光学树脂粘合剂63安装到基板2上时，光学树脂粘合剂63被阻挡在第一凸部101处。因此，防止光学树脂粘合剂63渗透到光通过 孔50。

公开(公告)号：US07616319B1

公开(公告)日：2009-11-10

申请号：US11890354

申请日：2007-08-05

Applicant: John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

Inventor： John A. Woollam ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt ,  Galen L. Pfeiffer

IPC: G01B9/02 ,  G01J3/45 ,  G01J4/00

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0243 ,  G01J4/00 ,  G01N21/21 ,  G01N21/211 ,  G01N2021/213 ,  G02B17/008 ,  G02B27/286

Abstract: A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

Abstract translation: 具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统，偏振器，用于支撑材料系统的分级器，分析器，分散光学器件和检测器系统，其包括多个检测器元件，该系统 功能上存在于环境控制室中，因此适用于宽光谱范围（例如，130-1700nm）。 优选的补偿器设计包括基本上消色差的多元件补偿器系统，其中多个全内反射进入到输入的电磁辐射束的延迟，并且其元件被定向为使净延迟相对于由于 元素系统的位置和/或旋转。

公开(公告)号：US07382455B2

公开(公告)日：2008-06-03

申请号：US11564446

申请日：2006-11-29

Applicant: Lihua Zhou ,  Jinhong Qiu

Inventor： Lihua Zhou ,  Jinhong Qiu

IPC: G01N21/25

CPC classification number: G01J3/51 ,  G01J3/0243 ,  G01J3/12 ,  G01J2003/1217 ,  G01N2201/0453

Abstract: A spectrophotometric optical system of a microplate reader and a filter wheel thereof are disclosed. The filter wheel comprises a pivotable wheel body, at least one narrow-band filter with a relatively long central wavelength mounted to the wheel body, and at least one narrow-band filter with a relatively short central wavelength mounted to the wheel body. The narrow-band filter with a relatively long central wavelength is provided with a diaphragm on a front surface thereof The diaphragm is formed with a plurality of apertures. By the diaphragm attached to the front surface of the narrow-band filter with a relatively long central wavelength, an energy matching between light of longer wavelength and light of shorter wavelength may be achieved. Further, due to the uniformly distributed apertures in the diaphragm, an even light spot may be obtained.

Abstract translation: 公开了微板读数器及其滤光轮的分光光度学系统。 所述滤光轮包括可枢转的轮体，至少一个安装在所述车轮主体上的具有较长的中心波长的窄带过滤器以及至少一个具有相对短的中心波长的窄带过滤器，安装在所述车轮主体上。 具有相对长的中心波长的窄带滤光片在其前表面上设置有隔膜。隔膜形成有多个孔。 通过附着在具有较长中心波长的窄带滤光片的前表面的光阑，可以实现较长波长的光与较短波长的光之间的能量匹配。 此外，由于隔膜中均匀分布的孔，可以获得均匀的光点。

公开(公告)号：US07317530B2

公开(公告)日：2008-01-08

申请号：US11085450

申请日：2005-03-22

Applicant: Martin M. Liphardt ,  Ping He

Inventor： Martin M. Liphardt ,  Ping He

IPC: G01J4/00

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0243 ,  G01J4/00 ,  G01N21/211 ,  G02B17/008

Abstract: Low aberration relay systems modified to perform as spatial filters in reflectometer, spectrophotometer, ellipsometer, polarimeter and the like systems.

Abstract translation: 低像差继电器系统被修改为在反射计，分光光度计，椭偏仪，偏振计等系统中作为空间滤光器。

公开(公告)号：US20070268591A1

公开(公告)日：2007-11-22

申请号：US11832837

申请日：2007-08-02

Applicant: David Scheiner ,  Michael Winik ,  Yakov Lyubchik

Inventor： David Scheiner ,  Michael Winik ,  Yakov Lyubchik

IPC: G02B27/14 ,  G02B5/10

CPC classification number: G02B21/16 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0243 ,  G01N21/211 ,  G01N21/47 ,  G01N21/956 ,  G02B17/06 ,  G02B17/0605 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/0095 ,  G02B21/04 ,  G02B27/10 ,  G02B27/283

Abstract: A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.

Abstract translation: 呈现镜头布置。 透镜装置包括具有凹面反射表面并限定透镜装置的光轴的第一元件以及沿着光轴与第一元件间隔开的第二基本平坦且至少部分反射的元件。 第二元件被配置为允许光通过其并且相对于光轴和第一元件定向，使得在输入光束到第二元件的预定入射角度处，输入光束被反射到反射 第一元件的表面并从其反射以穿过第二元件。

公开(公告)号：US07253970B2

公开(公告)日：2007-08-07

申请号：US11003012

申请日：2004-12-03

Applicant: David Scheiner ,  Michael Winik ,  Yakov Lyubchik

Inventor： David Scheiner ,  Michael Winik ,  Yakov Lyubchik

IPC: G02B17/08 ,  G02B27/14

CPC classification number: G02B21/16 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0243 ,  G01N21/211 ,  G01N21/47 ,  G01N21/956 ,  G02B17/06 ,  G02B17/0605 ,  G02B19/0023 ,  G02B19/0047 ,  G02B19/0095 ,  G02B21/04 ,  G02B27/10 ,  G02B27/283

Abstract: A lens arrangement is presented. The lens arrangement comprises a first element having a concave reflective surface and defining an optical axis of the lens arrangement, and a second substantially flat and at least partially reflective element spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle of incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.

Abstract translation: 呈现镜头布置。 透镜装置包括具有凹面反射表面并限定透镜装置的光轴的第一元件以及沿着光轴与第一元件间隔开的第二基本平坦且至少部分反射的元件。 第二元件被配置为允许光通过其并且相对于光轴和第一元件定向，使得在输入光束到第二元件的预定入射角度处，输入光束被反射到反射 第一元件的表面并从其反射以穿过第二元件。

公开(公告)号：US07248362B2

公开(公告)日：2007-07-24

申请号：US11599906

申请日：2006-11-15

Applicant: Adam E. Norton ,  Kenneth C. Johnson ,  Fred E. Stanke

Inventor： Adam E. Norton ,  Kenneth C. Johnson ,  Fred E. Stanke

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0224 ,  G01J3/0243 ,  G01J3/28 ,  G01N21/21 ,  G01N21/31 ,  G01N21/956 ,  G01N2021/213 ,  G02B5/3083 ,  G02B27/28 ,  G02B27/286 ,  G02B27/288 ,  G03F7/70625 ,  G03F7/70991

Abstract: A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.

Abstract translation: 用于测量样品性质的小点成像光谱仪器具有结合在系统的偏振引导部件（例如分束器）之间的偏振加扰元件，例如双折射板去偏振器，以及显微镜物镜 系统。 板去极化器可以使波长偏振，并且可以是具有两个板的Lyot去极化器或具有多于两个板（例如三板去极化器）的去极化器。 可以通过数据处理技术去除所得测量光谱中的正弦扰动，或者如果消偏振器是厚的或高度双折射的，则扰动可能比仪器的波长分辨率窄。

公开(公告)号：US20070159626A1

公开(公告)日：2007-07-12

申请号：US11619629

申请日：2007-01-04

Applicant: Oren Aharon

Inventor： Oren Aharon

IPC: G01J3/28

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0221 ,  G01J3/024 ,  G01J3/0243 ,  G01J3/027

Abstract: A method and a matching system for providing high resolution spectroscopy measurements. Input light beam is spread, forming two dimensional array of beams. These beams are further intercepted by two dimensional detecting means. A corresponding electronic system interprets the power collected by each detecting element subsequently producing spectral data.

Abstract translation: 一种用于提供高分辨率光谱测量的方法和匹配系统。 输入光束传播，形成二维阵列的光束。 这些光束被二维检测装置进一步截取。 相应的电子系统解释由每个检测元件收集的功率，随后产生光谱数据。

公开(公告)号：US20070145276A1

公开(公告)日：2007-06-28

申请号：US11610824

申请日：2006-12-14

Applicant: XI-Cheng ZHANG ,  Jianming DAI ,  Xu XIE

Inventor： XI-Cheng ZHANG ,  Jianming DAI ,  Xu XIE

IPC: G01N21/35

CPC classification number: G01V8/005 ,  G01J3/02 ,  G01J3/0243 ,  G01J3/42 ,  G01N21/3563 ,  G01N21/3581 ,  G01N21/636 ,  G01S7/4802 ,  G01S13/887 ,  G01S17/026 ,  G02F1/353 ,  G02F2203/13

Abstract: A method of analyzing a remotely-located object includes the steps of inducing a volume of an ionized ambient gas to emit pulsed terahertz radiation directed toward a targeted object by focusing an optical pump beam in the volume and ionizing another volume of the ambient gas to produce a sensor plasma by focusing an optical probe beam in the other volume of ambient gas. The interaction, in the sensor plasma, of the focused optical probe beam and an incident terahertz wave, which is produced by the targeted object reflecting, scattering, or transmitting the pulsed terahertz radiation, produces a resultant radiation. Detecting an optical component of the resultant radiation emitted by the sensor plasma facilitates detection of a signature of the targeted object imposed onto the incident terahertz radiation.

Abstract translation: 分析远程物体的方法包括以下步骤：通过将光泵浦光束聚焦在体积中并使另一体积的环境气体电离以产生电离环境气体的体积，以发射朝向目标物体的脉冲太赫兹辐射 通过将光学探针光束聚焦在另一体积的环境气体中的传感器等离子体。 在传感器等离子体中，由目标物体反射，散射或传输脉冲太赫兹辐射产生的聚焦光学探针光束和入射的太赫兹波的相互作用产生合成的辐射。 检测由传感器等离子体发射的辐射的光学部件有助于检测施加在入射的太赫兹辐射上的目标物体的签名。

公开(公告)号：US07116418B2

公开(公告)日：2006-10-03

申请号：US10945404

申请日：2004-09-20

Applicant: Isaac Richman

Inventor： Isaac Richman

IPC: G01J3/18

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/2823

Abstract: Spectral imaging apparatus and methods are disclosed. In one embodiment, a spectral imaging apparatus includes a spectral imaging apparatus includes a diffraction grating having one or more entrance apertures formed therein, a collecting reflecting element for reflecting said incident radiation to a diffractive surface of said diffraction grating, and a reimaging system adapted to provide a spectral image at a focal surface. The collecting reflecting element may include an aspherically-shaped portion, and the entrance apertures may be distributed along a straight or a non-straight axis. Alternately, optical fibers may be disposed in the entrance apertures. The spectral image provides a spectrum of radiation such that a first portion of the spectrum of radiation from a first region can be distinguished from a second portion of the spectrum of radiation from a second region.

Abstract translation: 公开了光谱成像装置和方法。 在一个实施例中，光谱成像设备包括光谱成像设备，其包括具有形成在其中的一个或多个入射孔的衍射光栅，用于将所述入射辐射反射到所述衍射光栅的衍射表面的收集​​反射元件，以及适于 在焦点表面提供光谱图像。 收集反射元件可以包括非球面形状的部分，并且入口孔可以沿直线或非直线轴线分布。 或者，光纤可以设置在入口孔中。 光谱图像提供辐射光谱，使得来自第一区域的辐射光谱的第一部分可以与来自第二区域的辐射光谱的第二部分区分开。