公开(公告)号：US20090009858A1

公开(公告)日：2009-01-08

申请号：US12188603

申请日：2008-08-08

Applicant: Torsten Feigl ,  Nicolas Benoit ,  Sergiy Yulin ,  Nobert Kaiser

Inventor： Torsten Feigl ,  Nicolas Benoit ,  Sergiy Yulin ,  Nobert Kaiser

IPC: G02B5/08

CPC classification number: G02B5/0891 ,  B82Y10/00 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/064 ,  G21K2201/067

Abstract: A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.

Abstract translation: 多层反射镜包括布置在基板和多个层对上的层序列。 每个层对包括由第一材料构成的第一层和由第二材料构成的第二层。 第一层和第二层各自具有大于2nm的厚度，并且第一材料或第二材料是硅化硼或氮化钼。

公开(公告)号：US20080159472A1

公开(公告)日：2008-07-03

申请号：US11928676

申请日：2007-10-30

Applicant: Albrecht Frey ,  Norbert Pailer ,  Jess Koehler

Inventor： Albrecht Frey ,  Norbert Pailer ,  Jess Koehler

IPC: G21K1/06

CPC classification number: G21K1/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: The present invention describes a device for improving the resolution capability of an x-ray optical apparatus for an x-ray (24) incident from a direction of incidence, which device comprises a mirror element (52, 54) with a mirror edge (52), the mirror edge (52) being formed around an edge axis (58) by a cylindrical shell section, the mirror element (52, 54) being arranged spaced apart in a radial direction (42) with respect to a focal axis (25) parallel to the direction of incidence by a focal point of the x-ray optical apparatus, and the mirror element (52, 54) being furthermore arranged rotated about an axis extending in the radial direction (42) with respect to the direction of incidence such that the edge axis (58) is tilted with respect to the direction of incidence.

Abstract translation: 本发明描述了一种用于提高从入射方向入射的x射线（24）的X射线光学装置的分辨能力的装置，该装置包括具有镜面（52）的镜子元件（52,54） ），镜边缘（52）通过圆柱形壳体部分围绕边缘轴线（58）形成，所述镜子元件（52,54）相对于焦点轴线（25）沿径向方向（42）间隔开设置 ），并且所述镜元件（52,54）进一步相对于所述径向方向（42）沿着所述径向方向（42）延伸的轴线旋转地布置，所述反射镜元件（52,54）平行于所述X射线光学设备的焦点的入射方向 使得边缘轴线（58）相对于入射方向倾斜。

公开(公告)号：US07298817B2

公开(公告)日：2007-11-20

申请号：US11000535

申请日：2004-11-30

Applicant: Zewu Chen ,  Walter M. Gibson

Inventor： Zewu Chen ,  Walter M. Gibson

IPC: G01N23/223

CPC classification number: G01N23/223 ,  G01N33/18 ,  G01N33/1813 ,  G01N2223/076 ,  G21K2201/064

Abstract: An x-ray fluorescence technique for detecting the level of arsenic in a sample of water or body fluid. Arsenic and lead are expected to fluoresce in a first energy band and lead is expected to also fluoresce separately in a second energy band. An excitation path directs x-rays toward the sample; a first detection path detects x-ray fluorescence of the first energy band from the sample; and a second detection path detects x-ray fluorescence of the second energy band from the sample. The level of arsenic can be obtained by analyzing the x-ray fluorescence from both detection paths, and using a constant which relates the level of lead in the second energy band to the level of lead in the first energy band. The excitation path and each detection path may each include a monochromating optic to transmit the desired x-ray energy band, e.g., a doubly curved optic.

Abstract translation: 用于检测水或体液样品中砷水平的x射线荧光技术。 预计砷和铅将在第一个能带中发出荧光，预计在第二个能带中铅也将分别发荧光。 激发路径将X射线引向样品; 第一检测路径检测来自样品的第一能带的X射线荧光; 并且第二检测路径检测来自样品的第二能带的x射线荧光。 可以通过分析来自两个检测路径的x射线荧光并使用将第二能带中的铅的水平与第一能带中的铅的水平相关联的常数来获得砷的水平。 激发路径和每个检测路径可以各自包括单色光学器件，以传输期望的x射线能带，例如双曲面光学元件。

公开(公告)号：US20070258156A1

公开(公告)日：2007-11-08

申请号：US11799936

申请日：2007-05-02

Applicant: Hexin Wang ,  Kurt Becker ,  Lutz Autschbach

Inventor： Hexin Wang ,  Kurt Becker ,  Lutz Autschbach

IPC: C03B23/20 ,  C03B23/00 ,  C03B21/00 ,  G02B5/08

CPC classification number: C03B23/0252 ,  C03B23/203 ,  C03B23/22 ,  G21K1/06 ,  G21K2201/064 ,  G21K2201/067 ,  Y10S359/90

Abstract: A method for producing a shaped body (10) made of glass or glass ceramics comprises the steps of: (a) placing at least two glass blanks (12a, 12b) side by side on a shaped surface (14) of a temperature-resistant sagging mold (13); (b) sagging the glass blanks (12a, 12b) onto the shaped surface (14) by heating the sagging mold (13) and the glass blanks (12a, 12b); (c) attaching the sagged glass blanks (10a, 10b) to each other in order to form the shaped body (10); and (d) lifting the shaped body (10) from the sagging mold (13). A shaped body (10) comprises at least two glass blanks (10a, 10b) attached side by side and formed by sagging.

Abstract translation: 用于制造由玻璃或玻璃陶瓷制成的成形体（10）的方法包括以下步骤：（a）将至少两个玻璃坯料（12a，12b）并排放置在温度成形表面（14）上 - 阻力下垂模具（13）; （b）通过加热下垂模具（13）和玻璃坯料（12a，12b）将玻璃坯料（12a，12b）下垂到成型表面（14）上; （c）将下垂的玻璃坯料（10a，10b）相互连接以形成成形体（10）; 和（d）将成形体（10）从下垂模具（13）提起。 成形体（10）包括至少两个玻璃坯料（10a，10b）并排并且通过下垂形成。

公开(公告)号：US20070121785A1

公开(公告)日：2007-05-31

申请号：US11491462

申请日：2006-07-21

Applicant: Reiner Dietsch ,  Thomas Holz

Inventor： Reiner Dietsch ,  Thomas Holz

IPC: G21K1/06

CPC classification number: G21K1/06 ,  B82Y10/00 ,  G21K2201/061 ,  G21K2201/064

Abstract: An X-ray optical element for and influencing of X-ray beam characteristics in two dimensions includes two reflective, curved elements arranged side-by-side to receive X-ray radiation from an X-ray beam source so that the radiation is directed onto both reflective elements and then reflected from one element onto the other element, wherein the two reflective elements are curved at different angles and have different focal lengths.

公开(公告)号：US07113567B2

公开(公告)日：2006-09-26

申请号：US10196805

申请日：2002-07-17

Applicant: Carsten Michaelsen ,  Rüdiger Bormann ,  Jörg Wiesmann

Inventor： Carsten Michaelsen ,  Rüdiger Bormann ,  Jörg Wiesmann

IPC: G21K1/06 ,  G01N23/223 ,  G01T1/36

CPC classification number: G02B5/0891 ,  B82Y10/00 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/064

Abstract: In an apparatus and a method for the analysis of atomic or molecular elements contained in a sample by wavelength dispersive X-ray spectrometry, wherein primary x ray or electron radiation is directed onto the sample whereby fluorescence radiation is emitted from the sample, the fluorescence radiation is directed onto a mirror or focussing device consisting of a multi-layer structure including pairs of layers of which one layer of a pair comprises carbon or scandium and the other comprises a metal oxide or a metal nitride and the fluorescence radiation is reflected from the mirror or focussing device onto an analysis detector for the analysis of the atomic or molecular elements contained in the sample.

Abstract translation: 在通过波长色散X射线光谱法分析样品中原子或分子元素的装置和方法中，其中初级x射线或电子辐射被引导到样品上，从而从样品发射荧光辐射，荧光辐射 被引导到由多层结构构成的反射镜或聚焦装置，该多层结构包括一对层，其中一层包括碳或钪，另一层包含金属氧化物或金属氮化物，并且荧光辐射从反射镜反射 或聚焦装置到分析检测器上，以分析样品中包含的原子或分子元素。

公开(公告)号：US07076026B2

公开(公告)日：2006-07-11

申请号：US10866057

申请日：2004-06-10

Applicant: Boris Verman ,  Jimpei Harada

Inventor： Boris Verman ,  Jimpei Harada

IPC: G21K1/06

CPC classification number: G21K1/062 ,  B82Y10/00 ,  G21K1/06 ,  G21K2201/061 ,  G21K2201/062 ,  G21K2201/064

Abstract: The present invention provides an x-ray beam conditioning system with a Kirkpatrick-Baez diffractive optic including two optical elements, of which one of the optical elements is a crystal. The elements are arranged in a side-by-side configuration. The crystal can be a perfect crystal. One or both diffractive elements can be mosaic crystals. One element can be a multilayer optic. For example, the multilayer optic can be an elliptical mirror or a parabolic mirror with graded d-spacing. The graded d-spacing can be either lateral grading or depth grading, or both.

Abstract translation: 本发明提供一种具有Kirkpatrick-Baez衍射光学元件的X射线束调节系统，其包括两个光学元件，其中一个光学元件是晶体。 这些元件并排配置。 水晶可以是一个完美的水晶。 一个或两个衍射元件可以是镶嵌晶体。 一个元件可以是多层光学元件。 例如，多层光学器件可以是具有梯度d间距的椭圆镜或抛物面镜。 分级d间距可以是横向分级或深度分级，或两者。

公开(公告)号：US06931097B1

公开(公告)日：2005-08-16

申请号：US10048138

申请日：2000-07-10

Applicant: Claude L. Davis, Jr. ,  Kenneth E. Hrdina

Inventor： Claude L. Davis, Jr. ,  Kenneth E. Hrdina

IPC: C03B8/04 ,  C03B20/00 ,  C03C17/36 ,  G02B5/08 ,  G02B5/10 ,  G02B5/26 ,  G02B5/28 ,  G02B17/06 ,  G03F1/00 ,  G03F1/24 ,  G03F1/60 ,  G03F7/20 ,  G21K1/06 ,  G21K5/02 ,  H01L21/027

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  C03B19/1415 ,  C03B2201/07 ,  C03B2201/42 ,  G02B5/0891 ,  G02B17/0615 ,  G02B17/0636 ,  G03F1/24 ,  G03F1/60 ,  G03F7/702 ,  G03F7/70233 ,  G03F7/70283 ,  G03F7/70891 ,  G03F7/70958 ,  G21K1/062 ,  G21K2201/064 ,  G21K2201/067

Abstract: The projection lithographic method for producing integrated circuits and forming patterns with extremely small feature dimensions includes an illumination sub-system (36) for producing and directing an extreme ultraviolet soft x-ray radiation λ from an extreme ultraviolet soft x-ray source (38); a mask stage (22) illuminated by the extreme ultraviolet soft x-ray radiation λ produced by illumination stage and the mask stage (22) includes a pattern when illuminated by radiation λ. A protection sub-system includes reflective multilayer coated Ti doped high purity SiO2 glass defect free surface (32) and printed media subject wafer which has a radiation sensitive surface.

Abstract translation: 用于制造集成电路和具有极小特征尺寸的图案的投影光刻方法包括用于产生和引导来自极紫外线软X射线源（38）的极紫外线软X射线辐射λ的照明子系统（36） ; 由照明级产生的极紫外线软X射线辐射λ照射的掩模台（22）和掩模台（22）包括当被辐射λ照射时的图案。 保护子系统包括具有辐射敏感表面的反射多层涂覆的Ti掺杂的高纯度SiO 2玻璃无缺陷表面（32）和印刷媒体对象晶片。

公开(公告)号：US06650728B2

公开(公告)日：2003-11-18

申请号：US10196806

申请日：2002-07-17

Applicant: Carsten Michaelsen ,  Rudiger Bormann ,  Jörg Wiesmann

Inventor： Carsten Michaelsen ,  Rudiger Bormann ,  Jörg Wiesmann

IPC: G01N23223

CPC classification number: B82Y10/00 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/064

Abstract: In an apparatus and a method for the analysis of atomic or molecular elements contained in a sample by wavelength dispersive X-ray spectrometry, wherein primary x ray or electron radiation is directed onto the sample whereby fluorescence radiation is emitted from the sample, the fluorescence radiation is directed onto a mirror or focussing device consisting of a multi-layer structure including pairs of layers of which one layer of a pair consists of lanthanum and the other consists of carbon and the fluorescence radiation is reflected from the mirror or focussing device onto an analysis detector for the analysis of the atomic or molecular elements contained in the sample.

Abstract translation: 在通过波长色散X射线光谱法分析样品中原子或分子元素的装置和方法中，其中初级x射线或电子辐射被引导到样品上，从而从样品发射荧光辐射，荧光辐射 被引导到由多层结构组成的反射镜或聚焦装置，该多层结构包括一对层，其中一层由镧构成，另一层由碳组成，另一层由碳组成，并且荧光辐射从反射镜或聚焦装置反射到分析 用于分析样品中包含的原子或分子元素的检测器。

公开(公告)号：US20020003662A1

公开(公告)日：2002-01-10

申请号：US09854907

申请日：2001-05-14

Inventor： Augusto Marcelli ,  Alexandre V. Soldatov ,  Mikhail I. Mazuritsky

IPC: G02B005/18 ,  G01N023/20

CPC classification number: B82Y10/00 ,  G21K1/06 ,  G21K1/062 ,  G21K2201/064 ,  G21K2201/067

Abstract: A diffractor for electromagnetic radiation is based on a pseudo-spherical stepped geometry designed under the constant step width conditions. The diffractor consists of a few small pseudo-spherical curved dispersive elements (oriented crystal surfaces or gratings) that are located on a focal circle. The location on the focal circle of each element is made to guarantee the same Bragg angle for the incident radiation. Thus a diffractor is an array of diffracting elements (nullstepsnull), each one contributing to the total solid angle of the diffractor, that increase the spectral output of the device without decreasing the resolution. Scheme and parameters of different devices based on the analysis of x-rays secondary are described.

Abstract translation: 用于电磁辐射的衍射器基于在恒定步长条件下设计的伪球形台阶几何。 衍射器由位于焦点圆上的几个小的假球形弯曲色散元件（定向晶体表面或光栅）组成。 使每个元件的焦点圆上的位置保证入射辐射相同的布拉格角。 因此，衍射器是衍射元件阵列（“台阶”），每个衍射元件都有助于衍射器的总立体角，从而在不降低分辨率的情况下增加器件的光谱输出。 描述了基于X射线二次分析的不同装置的方案和参数。