中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

869 records (took 0.027 seconds)

    Multi-axis magnetically actuated device
    281.
    发明授权
    Multi-axis magnetically actuated device 有权
    多轴磁力驱动装置

    公开(公告)号：US06388789B1

    公开(公告)日：2002-05-14

    申请号：US09666018

    申请日：2000-09-19

    Applicant: Jonathan Bernstein

    Inventor： Jonathan Bernstein

    IPC: G02B2608

    CPC classification number: G02B6/3572 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/085 ,  G02B26/101 ,  Y10S359/90

    Abstract: A multi-axis magnetically actuated device, an array of multi-axis magnetically actuated devices, and a method of fabrication of a multi-axis magnetically actuated device are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide such as, for example, an optical fiber. The multi-axis magnetically actuated device of the invention is capable of rotational movement in two orthogonal directions. In one embodiment, the multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within an outer rotational member that in turn is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member. The inner torsional flexures define an inner axis of rotation while the outer torsional flexures define an outer axis of rotation. The rotational motions of each rotational member arise in response to an interaction between a magnetic influence and a magnetic moment generated by a current passing through coils arranged adjacent to a surface of the inner rotational member. Bulk micromachining techniques enable the members to be formed from a monolithic silicon wafer and can produce a member with a smooth surface. The smooth surface of a member may function as a reflector. In one embodiment, the inner rotational member functions as a reflector.

    Abstract translation: 公开了一种多轴磁致动装置，多轴磁致动装置的阵列以及制造多轴磁致动装置的方法。 此外，公开了一种光开关，其由多轴磁致动装置的阵列和适于接收诸如光纤的光波导的端口阵列组成。 本发明的多轴磁力驱动装置能够沿两个正交方向旋转运动。 在一个实施例中，多轴磁致动装置包括两个嵌套旋转构件，嵌套在外旋转构件内的内旋转构件，其又嵌套在基构件内。 内部旋转构件通过两个内部扭转挠曲件安装到外部旋转构件，外部旋转构件又通过两个外部扭转挠曲件安装到基座构件。 内部扭转弯曲限定了内部旋转轴线，而外部扭转挠曲限定了外部旋转轴线。 每个旋转构件的旋转运动响应于磁力影响和由通过与内旋转构件的表面相邻布置的线圈的电流产生的磁矩之间的相互作用而产生。 散装微加工技术使得部件能够由单片硅晶片形成，并且可以产生具有光滑表面的部件。 构件的光滑表面可以用作反射器。 在一个实施例中，内旋转构件用作反射器。

    Transition metal dielectric alloy materials for MEMS
    282.
    发明申请
    Transition metal dielectric alloy materials for MEMS 有权
    用于MEMS的过渡金属介电合金材料

    公开(公告)号：US20020047172A1

    公开(公告)日：2002-04-25

    申请号：US09910537

    申请日：2001-07-20

    Inventor： Jason S. Reid

    IPC: H01L029/82

    CPC classification number: B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118 ,  H01G5/18 ,  H01G5/40

    Abstract: Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion formed of a nitride of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a group 3A to 6A element. The target can have other major constituents or impurities (e.g. additional group 3A to 6A element(s)). The target is reactively sputtered in a nitrogen ambient so as to result in a sputtered hinge. It is possible to form both stiff and/or flexible portions of the micromechanical device in this way.

    Abstract translation: 提供能够由于柔性部分而移动的微机械装置。 微机械装置可以具有柔性部分，该柔性部分由优选来自元素周期表3A至6A的元素的氮化物（优选地来自这些基团的前两行）和后过渡金属（优选地来自该组的第8B或1B族） 周期表）。 微机械装置可以是任何装置，特别是优选地具有诸如加速度计，DC继电器或RF开关，光交叉连接或光开关的柔性部分的MEMS传感器或致动器，或用于直视和投影显示器的阵列的微镜部分。 柔性部分优选通过溅射具有组8B或1B元素和组3A至6A元素的靶来形成。 靶可以具有其它主要成分或杂质（例如另外的3A至6A族元素）。 靶在氮气环境中反应溅射，从而产生溅射的铰链。 以这种方式可以形成微机械装置的刚性和/或柔性部分。

    Microelectromechanical apparatus for elevating and tilting a platform
    283.
    发明申请
    Microelectromechanical apparatus for elevating and tilting a platform 有权
    用于升降平台的微机电装置

    公开(公告)号：US20010048265A1

    公开(公告)日：2001-12-06

    申请号：US09827858

    申请日：2001-04-05

    Inventor： Samuel Lee Miller ,  Paul Jackson McWhorter ,  Murray Steven Rodgers ,  Jeffry J. Sniegowski ,  Stephen M. Barnes

    IPC: H02N001/00

    CPC classification number: B81B3/004 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0307 ,  B81B2203/053 ,  B81B2203/058 ,  G02B6/122 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841 ,  G02B2006/12104 ,  G11B7/0927 ,  H02N1/006 ,  H02N1/008

    Abstract: A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.

    Abstract translation: 公开了一种微机电（MEM）装置，其具有能够在基板上升高并以任意角度倾斜的平台，该平台使用支撑平台并控制其运动的多个柔性构件。 每个柔性构件由一个或多个用于弯曲柔性构件的MEM致动器进一步控制。 MEM致动器可以是静电梳状致动器或垂直拉链致动器，或其组合。 MEM装置可以包括镜面涂层以形成用于重定向或切换用于投影显示器的一个或多个光束的可编程镜子。 具有镜面涂层的MEM装置还具有用于在用于局域光纤网络的光纤之间切换光束或用于光纤电信或数据通信系统的应用。

    Optical switch array using rolling shutter optical switch elements
    284.
    发明申请
    Optical switch array using rolling shutter optical switch elements 审中-公开
    光开关阵列采用滚动快门光开关元件

    公开(公告)号：US20010028756A1

    公开(公告)日：2001-10-11

    申请号：US09799901

    申请日：2001-03-05

    Inventor： Dale C. Flanders ,  Peter S. Whitney

    IPC: G02B006/35

    CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

    Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

    Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

    Display device and method for manufacturing the same
    288.
    发明公开
    Display device and method for manufacturing the same 有权
    显示装置及其制造方法

    公开(公告)号：EP2527902A1

    公开(公告)日：2012-11-28

    申请号：EP12168826.1

    申请日：2012-05-22

    Applicant: Japan Display East Inc.

    Inventor： Fujiyoshi, Jun ,  Kimura, Yasukazu

    IPC: G02B26/02 ,  B81B3/00

    CPC classification number: B81C1/00182 ,  B81B2201/045 ,  B81C2203/054 ,  G02B26/02

    Abstract: A cut (76) which penetrates a resin layer (50) is formed in the resin layer (50) such that the cut (76) surrounds a third upper surface (68). A film (52) is formed such that the film (52) covers the whole resin layer (50) except for a bottom surface of the resin layer (50) inside the cut (76) and at least a portion of the resin layer (50) is exposed outside the cut (76). The resin layer (50) which is wholly covered with the film (52) is left inside the cut (76), and the whole resin layer (50) continuously formed with a surface exposed from the film (52) is removed outside the cut (76) . A bump (48) is formed by the resin layer (50) and the film (52) inside the cut (76), and a shutter (14) and at least a portion of a drive part (40) are formed by the film (52) outside the cut (76) in a state where these parts are floated from a first substrate (10).

    Abstract translation: 穿过树脂层（50）的切口（76）形成在树脂层（50）中，使得切口（76）围绕第三上表面（68）。 膜（52）形成为使得膜（52）覆盖除了切口（76）内的树脂层（50）的底面之外的整个树脂层（50）以及树脂层（50）的至少一部分 50）暴露在切口（76）的外部。 将完全被膜（52）覆盖的树脂层（50）留在切口（76）的内部，并且从膜（52）暴露的表面连续形成的整个树脂层（50）被去除 （76）。 通过树脂层（50）和切口（76）内的膜（52）形成凸块（48），并且挡板（14）和驱动部分（40）的至少一部分由膜 （52）在所述切口（76）外部以这些部分从第一基板（10）浮起的状态下移动。

    MEMS DEVICE WITH INTEGRATED VIA AND SPACER
    290.
    发明公开
    MEMS DEVICE WITH INTEGRATED VIA AND SPACER 审中-公开
    具有集成PATH和底座MEMS器件

    公开(公告)号：EP2401421A1

    公开(公告)日：2012-01-04

    申请号：EP10746658.3

    申请日：2010-02-18

    Applicant: Capella Photonics, Inc.

    Inventor： Ostrom, Robert

    IPC: C23F1/00

    CPC classification number: G02B26/0841 ,  B81B2201/045 ,  B81B2203/058 ,  B81B2207/096 ,  B81C1/00095 ,  G02B26/0866 ,  Y10T29/49002

    Abstract: A MEMS device and fabrication method are disclosed. A bottom substrate having an insulating layer sandwiched between an upper layer and a lower layer may be bonded to a device layer. One or more portions of the upper layer may be selectively removed to form one or more device cavities. Conductive vias may be formed through the lower layer at locations that underlie the one or more device cavities and electrically isolated from the lower layer. Devices may be formed from the device layer. Each device overlies a corresponding device cavity. Each device may be connected to the rest of the device layer by one or more corresponding hinges formed from the device layer. One or more electrical contacts may be formed on a back side of the lower layer. Each contact is electrically connected to a corresponding conductive via.

Patent Agency Ranking