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公开(公告)号：KR100889814B1
公开(公告)日：2009-03-20
申请号：KR1020060069416
申请日：2006-07-25
Applicant: 삼성전자주식회사
IPC: H01L21/027
Abstract: 본 발명은 스탬퍼 및 그 제조방법과 스탬퍼를 이용한 기판의 임프린팅 공정에 관한 것으로서, 상세하게는 대면적 유연스탬퍼의 수축 및 팽창 등의 변형을 억제함으로써 미세 패턴이 각인된 유연스탬퍼의 형상 정확도 및 기판과의 정렬 정밀도를 개선시키기 위한 발명이다.
이러한 목적을 달성하기 위한 본 발명은 일정한 패턴이 형성된 스탬퍼몸체부 및; 상기 스탬퍼몸체부의 강도를 보강하기 위해 상기 스탬퍼몸체부에 마련되는 강도보강부를 포함하는 것을 특징으로 하는 스탬퍼와, 그 제조방법 및 그 스탬퍼를 이용한 기판의 임프린트 공정에 관한 것이다.-
公开(公告)号：KR1020080105524A
公开(公告)日：2008-12-04
申请号：KR1020070053228
申请日：2007-05-31
Applicant: 삼성전자주식회사
IPC: H01L21/027 , B82Y40/00
CPC classification number: G03F7/0002 , B82Y10/00 , B82Y40/00 , B41D7/00 , G03F7/2012 , Y10S977/887
Abstract: A mask mold and a manufacturing method, and a large area micro-pattern molding method using the same are provided to apply the fine patterns of nano-scale or complicated three dimensional shapes with the simple method and the cheap cost. A mask mold manufacturing method comprises the following steps: the step for coating the resist onto a plurality of miniature molds in which a mask or a micro-pattern is imprinted(110); the step for imprinting the micro-pattern on the resist by pressurizing a plurality of miniature molds(150); the step for solidifying the resist(160); the step for separating the resist from the plurality of molds(170).
Abstract translation: 提供掩模模具和制造方法以及使用其的大面积微图案模塑法以简单的方法和廉价的成本来应用纳米级或复杂三维形状的精细图案。 掩模模具制造方法包括以下步骤：将抗蚀剂涂布在其中印有掩模或微图案的多个微型模具（110）上的步骤; 通过加压多个微型模具（150）将微图案印刷在抗蚀剂上的步骤; 凝固抗蚀剂（160）的步骤; 用于将抗蚀剂与多个模具（170）分离的步骤。
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公开(公告)号：KR101541814B1
公开(公告)日：2015-08-05
申请号：KR1020080124379
申请日：2008-12-09
Applicant: 삼성전자주식회사
IPC: H01L21/027
CPC classification number: G03F7/0002 , B82Y10/00 , B82Y40/00
Abstract: 본발명은나노임프린트리소그래피방법에관한것으로, 기판의면적보다작은면적을가지는몰드를이용하여기판에패턴오차없이패턴을형성할수 있도록하기위해, 본발명에따른나노임프린트리소그래피방법은에칭층의복수영역들중 일부에도포된레진을제1 몰드로제1 레진패턴형성한후 상기제1 레진패턴을마스크로하여상기에칭층을에칭하는단계; 및상기복수영역들중 다른일부에다시도포된레진을제2 몰드로제2 레진패턴을형성한후 상기제2 레진패턴을마스크로하여상기에칭층을에칭하는단계를포함한다.
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公开(公告)号：KR1020120034940A
公开(公告)日：2012-04-13
申请号：KR1020100096338
申请日：2010-10-04
Applicant: 삼성전자주식회사
IPC: H01L21/027
CPC classification number: B29C45/2632 , B29C33/0033 , B29C33/306 , B29C33/424 , B29C39/26 , B29K2101/10 , H01L21/0274 , B29C33/3842
Abstract: PURPOSE: A patterning mold and a manufacturing method thereof are provided to precisely form a fine pattern by preventing the deformation of a patterning mold. CONSTITUTION: A patterning unit(22) is formed on one side of a body. The patterning unit forms a channel by contacting with one side of a substrate. The patterning unit includes a convex unit(26) and a concave unit(28). An ink supply path(24) is connected to the channel to supply ink to the channel. A fixing member(50) is combined with the outside of the body to prevent the deformation of the body.
Abstract translation: 目的：提供图案形成模具及其制造方法，以通过防止图案形成模具的变形来精确地形成精细图案。 构成：图案形成单元（22）形成在身体的一侧。 图案形成单元通过与衬底的一侧接触形成通道。 图案形成单元包括凸形单元（26）和凹形单元（28）。 墨水供应路径（24）连接到通道以将墨水供应到通道。 固定构件（50）与身体的外部组合以防止身体的变形。
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公开(公告)号：KR1020080009782A
公开(公告)日：2008-01-30
申请号：KR1020060069416
申请日：2006-07-25
Applicant: 삼성전자주식회사
IPC: H01L21/027
CPC classification number: G03F7/0002 , B29C59/022 , B82Y40/00 , G03F7/2012
Abstract: A stamper and a production method thereof and an imprinting process of a substrate using a stamper are provided to prevent the stamper from being distorted by external circumferences by enhancing the intensity of the stamper. A production method of a stamper includes the steps of: stacking a stamper material on a substrate(100) with a predetermined pattern(110) and forming a stamper body(120) with the pattern replicated thereon; placing a strength reinforcing member(130) at the stamper body; hardening the stamper body and the strength reinforcing member; and separating the substrate and the stamper body from each other. The production method of the stamper further includes the step of stacking the stamper material on the strength reinforcing member to fix the strength reinforcing member after placing the strength reinforcing member at the stamper body. The strength reinforcing member is made of a minute fiber.
Abstract translation: 提供压模及其制造方法以及使用压模的基板的压印处理，以通过增强压模的强度来防止压模由外周扭曲。 压模的制造方法包括以下步骤：以预定图案（110）将压模材料堆叠在基板（100）上，并且形成具有复制在其上的图案的压模体（120）; 将强度加强构件（130）放置在压模体上; 使压模体和强度增强部件硬化; 并且将基板和压模体彼此分离。 压模的制造方法还包括将强化加强构件放置在压模体上之后，将强度补强材料堆叠在强化加强部件上的工序。 强度加强件由微细纤维制成。
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Patent Agency Ranking
公开(公告)号：KR1020070117134A
公开(公告)日：2007-12-12
申请号：KR1020060050928
申请日：2006-06-07
Applicant: 삼성전자주식회사
IPC: H01L21/027
CPC classification number: G03F7/0002 , B81C1/0046 , B82Y10/00 , B82Y40/00
Abstract: A method for forming a micro pattern using nano imprint is provided to form a pattern having various shapes and to output a hydrophile region and a hydrophobicity region alternately on a micro structure surface without chemical processing. A stamp(100) comprises a positive part(320) and a negative(120) part, wherein a micro structure having a hydrophile property is imprinted at the negative part. The micro structure of the stamp is copied at a surface region of a hydrophile property resist(300) which is coated on a substrate(200) by using a nano imprint.
Abstract translation: 提供了使用纳米压印形成微图案的方法，以形成具有各种形状的图案，并且在微结构表面上交替地输出亲水区域和疏水性区域而无需化学处理。 印模（100）包括正极（320）和负极（120）部分，其中具有亲水性的微结构印在负极部分。 通过使用纳米印记将印模的微结构复制在涂布在基板（200）上的亲水性抗蚀剂（300）的表面区域。
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公开(公告)号：KR100333557B1
公开(公告)日：2002-04-22
申请号：KR1019990052373
申请日：1999-11-24
Applicant: 삼성전자주식회사
IPC: H04M11/08
Abstract: 본발명은정보단말기(Data Terminal Equipment:DTE)로데이터통신을할 때상기단말기가통신망(예:LAN, ISDN 등)에연결되지않은상태에서도이더넷(Ethernet) 기능을갖춘디지털키폰전화기에연결이되어데이터통신을가능하게하는이더넷기능을구비한디지털키폰전화기에관한것이다. 통신수행의방식은통신채널로들어오거나나가는제어신호를참조하여이루어지는데채널신호가음성통신을나타내면음성통신을수행하며데이터통신을나타내면이더넷방식에의한데이터통신을수행한다. 본발명을통해디지털키폰전화기에이더넷기능을추가하여음성통신뿐만이아닌데이터통신도가능하게함으로써디지털키폰전화기의활용성을더욱증대시킬수 있다. 특히, 소규모집단(예를들어소규모사업장, 소호(SOHO)사무실등)에서는별도의데이터통신을위한망(예:LAN 망)을구축하지않아도이더넷기능전화기만을설치하여데이터통신을실시할수 있어종전과는달리통신장비설치에드는비용을현저하게절감시킬수 있다.
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公开(公告)号：KR1020000075044A
公开(公告)日：2000-12-15
申请号：KR1019990019366
申请日：1999-05-28
Applicant: 삼성전자주식회사
IPC: H04M1/00
Abstract: PURPOSE: An apparatus for performing data communication is provided to build Ethernet functions to carry out the data communication in small office home offices(SOHOs), so as to increase additional functions of a key phone system. CONSTITUTION: An internet service provider(100) is connected on the internet. A key phone system(300) is connected through the internet and an integrated service digital network(ISDN). A key phone(400) is connected with the key phone system through two B channels and one D channel, and supports the Ethernet. A personal computer(PC)(500) is connected with the key phone through one or more than one B channel.
Abstract translation: 目的：提供一种用于执行数据通信的设备，用于构建以太网功能，以执行小型办公室（SOHO）中的数据通信，从而增加关键电话系统的附加功能。 规定：互联网连接互联网服务提供商（100）。 一个关键的电话系统（300）通过互联网和综合业务数字网（ISDN）连接。 钥匙电话（400）通过两个B通道和一个D通道与钥匙电话系统连接，并支持以太网。 个人计算机（PC）（500）通过一个或多个B通道与钥匙电话连接。
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公开(公告)号：KR1020000021664A
公开(公告)日：2000-04-25
申请号：KR1019980040890
申请日：1998-09-30
Applicant: 삼성전자주식회사
Inventor： 김정길
IPC: H04M3/38
Abstract: PURPOSE: A method for utilizing a central office line using a password is provided to check a speech state by person by person, by preventing unnecessary calls. CONSTITUTION: A method for utilizing a central office line using a password in an exchange system comprises the steps of: demanding input of a password and a telephone number to a subscriber, when a telephone is off-hook by the predetermined subscriber; deciding whether the password is the same, and dialing the inputted telephone number, when the password is the same; providing a call service to the subscriber; exactly calculating a charge to the subscriber, when the telephone is on-hook by the subscriber after supplying the call service to the subscriber, and performing a database of the calculated charge; and printing/outputting a state according to the call service.
Abstract translation: 目的：提供一种使用密码使用中心局线路的方法，通过防止不必要的呼叫，逐个人地检查语音状态。 构成：在交换系统中使用密码使用中心局线路的方法包括以下步骤：当电话机被预定用户摘机时，要求向用户输入密码和电话号码; 确定密码是否相同，并且当密码相同时拨打输入的电话号码; 向用户提供呼叫服务; 在向用户提供呼叫服务之后，当用户挂机，并且执行所计算的费用的数据库时，向用户准确计算费用; 并根据呼叫服务打印/输出状态。
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