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公开(公告)号:KR100521350B1
公开(公告)日:2005-10-12
申请号:KR1019990000264
申请日:1999-01-08
Applicant: 삼성전자주식회사
Inventor: 박문수
IPC: H01L21/302
Abstract: 본 발명은 반도체 소자의 제조공정중 웨이퍼 표면에 현성된 막질을 평탕화시키기 위한 CMP 설비에 관한 것으로, 좀 더 구체적으로는 컨디셔너(conditioner) 유닛이 안정적인 이동할 수 있도록 한 반도체 웨이퍼의 평탄화 장치에 관한 것으로, 반도체 웨이퍼의 평탄화 설비는 중심부근인 인 포지션과 가장자리인 아웃 포지션을 갖는 폴리싱 플래튼과, 웨이퍼가 수용되는 폴리싱 헤드 및 폴리싱 플래튼의 표면을 컨디셔닝하기 위한 컨디셔너 유닛을 포함하되, 컨디셔너 유닛은 폴리싱 플래튼의 표면을 거칠게 다듬기 위한 디스크와, 디스크를 폴리싱 플래튼의 인 포지션과 아웃 포지션을 넘지 않는 범위내에서 왕복 이동시키기 위한 구동부 및 디스크가 인 포지션 또는 아웃 포지션에 위치되었을 때 구동부의 구동을 제어시키기 위한 수단을 구비한다.
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公开(公告)号:KR100341786B1
公开(公告)日:2002-06-26
申请号:KR1019990044314
申请日:1999-10-13
Applicant: 삼성전자주식회사
IPC: G03G9/087
CPC classification number: G03G9/08702 , G03G9/0804 , G03G9/0806 , G03G9/08704 , G03G9/08711 , G03G9/08773 , G03G9/08782
Abstract: 전자사진장치에서피전사물에화상을형성하는중합형전자사진용건식토너가개시된다. 본발명의전자사진용건식토너는중합공정에서하기의구조식을가지며분자구조의표면에소수성작용기를포함하는실리카계화합물을안정제로사용하여합성하는것을특징으로한다.
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公开(公告)号:KR1020010037032A
公开(公告)日:2001-05-07
申请号:KR1019990044314
申请日:1999-10-13
Applicant: 삼성전자주식회사
IPC: G03G9/087
CPC classification number: G03G9/08702 , G03G9/0804 , G03G9/0806 , G03G9/08704 , G03G9/08711 , G03G9/08773 , G03G9/08782
Abstract: PURPOSE: A polymerized dry toner for an electrophotograph is provided which freely controls the particle size of the toner and provides good quality of picture of materials to be transferred due to high uniformity of the particle size of the toner and does not influence on environment by using harmless hydrophobic silicic stabilizer. CONSTITUTION: The polymerized dry toner being used as transferring materials in an electrophotograph unit is prepared by polymerizing a monomer of thermoplastic resin with using a hydrophobic silicic compound of the formula (1) as a stabilizer. In the formula, each x, y and z is a positive integer, where (x+y) is at least 60% of the surface, and each R1 and R2 is independently selected from the group consisting of C1-C30 aliphatic compound, C1-C30 aliphatic compound having at least one substituents(G), C1-C30 hetero aliphatic compound, C1-C30 hetero aliphatic compound having at least one substituents(G), C1-C30 cyclo aliphatic compound, C1-C30 cyclo aliphatic compound having at least one substituents(G), C1-C30 hetero cyclo aliphatic compound, C1-C30 hetero cyclo aliphatic compound having at least one substituents(G), C1-C30 aromatic compound and C1-C30 aromatic compound having at least one substituents(G), where G is selected from the group consisting of amino group, amidino group, amine group, hydrazine group, hydrazone group, halide group, hydroxy group, nitro group, cyano group, thiocyano group, thiol group, carboxyl group, alkaline salt of carboxylic acid, sulfuric acid group, alkaline salt of sulfuric acid, phosphoric acid group and alkaline salt of phosphoric acid.
Abstract translation: 目的:提供一种用于电子照相机的聚合干燥调色剂,其可以自由地控制调色剂的颗粒尺寸并且由于调色剂的粒度的高均匀性而提供良好的转印材料的质量,并且不会通过使用 无害疏水硅石稳定剂。 构成:在电子照相单元中用作转印材料的聚合干燥调色剂通过使用式(1)的疏水性硅化合物作为稳定剂聚合热塑性树脂的单体来制备。 在该式中,x,y和z各自为正整数,其中(x + y)为表面的至少60%,R1和R2各自独立地选自C1-C330脂族化合物,C1 具有至少一个取代基(G)的C30脂族化合物,具有至少一个取代基(G)的C 1 -C 30杂脂族化合物,C 1 -C 30杂脂族化合物,C 1 -C 30环脂族化合物,具有 至少一个取代基(G),C 1 -C 30杂环脂族化合物,具有至少一个取代基(G)的C 1 -C 30杂环脂族化合物,具有至少一个取代基(G)的C 1 -C 30芳族化合物和C 1 -C 30芳族化合物, 其中G选自氨基,脒基,胺基,肼基,腙基,卤基,羟基,硝基,氰基,硫氰基,硫醇基,羧基,羧基的碱金属盐 酸,硫酸基,硫酸碱盐,磷酸a cid组和磷酸碱盐。
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公开(公告)号:KR1020000050403A
公开(公告)日:2000-08-05
申请号:KR1019990000264
申请日:1999-01-08
Applicant: 삼성전자주식회사
Inventor: 박문수
IPC: H01L21/302
Abstract: PURPOSE: A chemical mechanical polishing apparatus is to prevent a conditioner from colliding with a polishing head or to prevent the conditioner from deviating from a polishing platen. CONSTITUTION: A chemical mechanical polishing apparatus comprises a polishing section for polishing a wafer, and a cleaning section for cleaning the polished wafer. The polishing section includes a polishing head for accommodating a wafer to be polished, a polishing platen having a surface for polishing the wafer, a conditioner(20) for finishing the surface of the platen, and a member for controlling a driving section of the conditioner. The conditioner includes a disk(22) and a driving section(24). When the conditioner moves from a waiting station to a polishing station, the disk is moved by the driving section to finish the surface of the polishing platen. The driving section reciprocates from an in-position to an out-position of the polishing platen.
Abstract translation: 目的:化学机械抛光装置是防止调理剂与抛光头碰撞或防止调理剂偏离研磨台板。 构成:化学机械抛光装置包括用于抛光晶片的抛光部分和用于清洁抛光晶片的清洁部分。 抛光部包括用于容纳待抛光晶片的抛光头,具有用于抛光晶片的表面的研磨台板,用于完成压板表面的调节器(20)和用于控制调节器的驱动部分的部件 。 调节器包括盘(22)和驱动部(24)。 当调节器从等待站移动到抛光站时,盘被驱动部分移动以完成抛光台板的表面。 驱动部分从抛光台板的就位到往复运动。
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公开(公告)号:KR1020080073085A
公开(公告)日:2008-08-08
申请号:KR1020070011649
申请日:2007-02-05
Applicant: 삼성전자주식회사
Inventor: 박문수
IPC: H01L33/48 , H01L33/64 , H01L23/498
CPC classification number: H05K1/0209 , G02F1/133603 , G02F2001/133612 , H01L2224/32245 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H05K1/0206 , H05K1/111 , H05K3/3442 , H05K3/42 , H05K2201/094 , H05K2201/09781 , H05K2201/10106 , H05K2201/10636 , Y02P70/611 , H01L2924/00014 , H01L2924/00
Abstract: A light emitting diode module and a display device using the same are provided to effectively radiate heat from a light emitting chip of the light emitting diode by enlarging first and second expanded electrodes. An LED module includes an LED(Light Emitting Diode)(81) and a PCB(Printed Circuit Board) for a light source. The LED includes a light emitting chip and first and second electrode portions. The first and second electrode portions are electrically connected to the light emitting chip. The LED is implemented on the PCB. The PCB includes a base substrate(825), a first expanded electrode(821), and a second expanded electrode(822). The base substrate is made by using a dielectric resin material. The first expanded electrode is formed on the base substrate and connected to the first electrode portion. The second expanded electrode is formed on the base substrate and connected to the second electrode portion.
Abstract translation: 提供了一种发光二极管模块和使用其的显示装置,以通过扩大第一和第二扩展电极来有效地辐射来自发光二极管的发光芯片的热量。 LED模块包括用于光源的LED(发光二极管)(81)和PCB(印刷电路板)。 LED包括发光芯片和第一和第二电极部分。 第一和第二电极部分电连接到发光芯片。 LED在PCB上实现。 PCB包括基底(825),第一扩展电极(821)和第二扩展电极(822)。 基底通过使用介电树脂材料制成。 第一扩展电极形成在基底基板上并连接到第一电极部分。 第二扩展电极形成在基底基板上并连接到第二电极部分。
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公开(公告)号:KR1020060065947A
公开(公告)日:2006-06-15
申请号:KR1020040104561
申请日:2004-12-11
Applicant: 삼성전자주식회사
CPC classification number: F24F11/30 , F25B2313/023
Abstract: 본 발명은 냉난방 동시형 멀티공기조화기의 제어방법에 관한 것으로, 특히 본 발명은 난방주체운전시, 난방실내기의 난방효율을 저하시키지 않으면서도 냉방실내기의 동결을 효과적으로 방지한다.
이를 위해 본 발명은 실외열교환기를 구비한 실외기와, 실내열교환기를 각각 구비하고, 실외기에 연결된 복수의 실내기와, 실외기와 복수의 실내기 사이에 냉난절환기를 통해 접속되는 고압가스관, 저압가스관 및 고압액관을 포함하고, 난방주체로 동시 냉난방하는 난방주체운전시, 냉방실내기측 저압가스관을 개방시키고, 개방된 냉방실내기의 응축온도에 따라 냉방실내기측 실내열교환기의 동결조건인지를 판단하고, 동결조건이면, 개방된 냉방실내기측 저압가스관을 소정시간동안 폐쇄시키고, 소정시간이 경과한 후 저압가스관을 다시 개방시킨다.-
公开(公告)号:KR1020060034109A
公开(公告)日:2006-04-21
申请号:KR1020040083247
申请日:2004-10-18
Applicant: 삼성전자주식회사
CPC classification number: F25B13/00 , F25B2313/005 , F25B2313/007 , F25B2313/0231 , F25B2600/2513
Abstract: 공기 조화기 및 그 제어 방법을 개시한다. 본 발명에 따른 공기 조화기 및 그 제어 방법은, 실내 전자 팽창 밸브의 개도와 실내 열 교환기(증발기)의 과열도(Super Heating Temperature)에 따라 실내 열 교환기(증발기)로의 냉매 공급량을 조절함으로써 공기 조화기의 냉방 효율을 높이는데 그 목적이 있다. 이와 같은 목적의 본 발명에 따른 공기 조화기의 제어 방법은, 압축기를 운전하여 냉매를 압축하고, 압축된 냉매가 실외 열 교환기에서 응축되면 실외 팽창 밸브를 통해 실내기로 공급하며, 냉방 운전 중인 실내기의 실내 팽창 밸브의 개도와 실내기의 과열도에 따라 실외 팽창 밸브의 개도를 제어하여 실내기에 공급되는 냉매의 양을 조절한다.
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公开(公告)号:KR1020060029564A
公开(公告)日:2006-04-06
申请号:KR1020040078564
申请日:2004-10-02
Applicant: 삼성전자주식회사
CPC classification number: F25B13/00 , F25B2313/007 , F25B2313/0231 , F25B2600/2501 , F25B2700/2106 , F24F11/30 , F24F11/62 , F24F11/65
Abstract: Disclosed herein is a simultaneous cooling and heating operation controlling method of a multi air conditioner system comprising a plurality of indoor units connected in parallel to an outdoor unit. The simultaneous cooling and heating operation controlling method comprises differently setting a cooling and heating reference range to decide main operation mode of the multi air conditioner system based on outdoor temperature, measuring the outdoor temperature to select the cooling and heating reference range based on the outdoor temperature, summing capacities of the indoor units where a cooling or heating operation is set to calculate cooling and heating ratio, and identifying part of the cooling and heating reference range corresponding to the cooling and heating ratio to decide the main operation mode of the multi air conditioner system.
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公开(公告)号:KR1020040006440A
公开(公告)日:2004-01-24
申请号:KR1020020040721
申请日:2002-07-12
Applicant: 삼성전자주식회사
IPC: H01L21/68
Abstract: PURPOSE: A wafer carrier is provided to be capable of preventing the warpage of a wafer and restraining the contamination of an adjacent wafer due to the particles generated from the back side of the wafer by vertically loading and unloading the wafer. CONSTITUTION: A wafer carrier is provided with a case(110) having an inner space(112) for storing a plurality of wafers(W) and a plurality of holding parts installed at the upper and lower portions of the inner space corresponding to each other for vertically holding the wafers. Preferably, each holding part includes a pair of grips(120). Preferably, the wafer carrier further includes a moving part for horizontally moving one pair of grips. Preferably, the moving part includes a motor, a lead screw connected with the motor, and a transfer part for connecting the lead screw to the grip.
Abstract translation: 目的:提供晶片载体,以便能够防止晶片的翘曲,并且通过垂直装载和卸载晶片,由于从晶片的背面产生的颗粒而抑制相邻晶片的污染。 构成:晶片载体设置有壳体(110),该壳体具有用于存储多个晶片(W)的内部空间(112)和安装在彼此对应的内部空间的上部和下部的多个保持部 用于垂直保持晶片。 优选地,每个保持部分包括一对把手(120)。 优选地,晶片载体还包括用于水平移动一对把手的移动部件。 优选地,移动部件包括电动机,与电动机连接的导螺杆和用于将导螺杆连接到把手的转移部件。
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公开(公告)号:KR1020000020065A
公开(公告)日:2000-04-15
申请号:KR1019980038490
申请日:1998-09-17
Applicant: 삼성전자주식회사
IPC: H01L21/02
Abstract: PURPOSE: A dust collector for air sampling of clean room is provided to realize the reliable and reproductive analysis by simultaneously sampling under same conditions. CONSTITUTION: A dust collector for air sampling of clean room comprises containers(30a,30b,30c) filled with solution and having exhaust pipes(40,42,44), gauges(48,50,52) connected to the exhaust pipes, pumps(54) for forcibly exhausting the air within the container, and controllers(56) controlling the operation of the pump. The pumps are mounted in the positions which the exhaust pipes are connected to each other. The controller has a timer for operating the pump for prescribed time to perform sampling.
Abstract translation: 目的:提供洁净室空气取样的集尘器,通过在相同条件下同时采样实现可靠和生殖分析。 构成:洁净室空气取样的集尘器包括填充有溶液的容器(30a,30b,30c),并具有连接到排气管的排气管(40,42,44),量规(48,50,52),泵 (54),用于强制地排出容器内的空气;以及控制器(56),控制泵的操作。 泵安装在排气管彼此连接的位置。 控制器具有定时器,用于在规定时间内操作泵进行采样。
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