Abstract:
PURPOSE: Provided are a siloxane-based copolymer having very low dielectric constant, and a method for forming an interlayer insulating film of semiconductor having low dielectric constant by using the same. CONSTITUTION: The siloxane-based resin is produced by hydrolyzing and polycondensing a cyclic siloxane compound having a structure of formula 1 and a silane compound having a structure of formula 2: SiX1X2X3X4 in organic solvent in the presence of a catalyst and water. In the formula 1, R is a hydrogen atom, alkyl group having C1-C3, cycloalkyl group having C3-C10 or aryl group having C6-C15; X1, X2 and X3 are, independently, an alkyl group having C1-C3, alkoxy group having C1-C10 or halogen group, wherein at least one of X1, X2 and X3 are alkoxy or halogen group; p is an integer of 3-8; and m is an integer of 1-10, and in the formula 2, X1, X2, X3 and X4 are, independently, an alkoxy group having C1-C10 or halogen group.
Abstract:
PRAM 소자 및 그 제조방법이 개시된다. 본 발명에 따르면, 트랜지스터와 상기 트랜지스터에 연결되는 데이터 저장부를 포함하고, 상기 데이터 저장부는 상부전극(top electrode)과 하부전극(bottom electrode) 및 상기 상부전극과 하부전극 사이에 개재된 다공성의 상변화물질층을 포함하는 PRAM 소자 및 그 제조방법이 제공된다.
Abstract:
본 발명은 하기 화학식 1a, 1b 또는 1c의 구조를 갖는 케이지형 실록산 화합물과 하기 화학식 2의 구조를 갖는 환형 실록산 화합물 또는 하기 화학식 3의 구조를 갖는 실란 화합물을 유기용매 중에서 산촉매의 존재하에 가수분해 및 축합중합시켜 제조된 실록산계 수지, 및 이를 이용한 반도체 층간 절연막의 형성방법에 관한 것으로, 본 발명의 실록산계 수지를 이용하면 고집적도 반도체 제조시 저유전율의 절연막을 용이하게 형성할 수 있다. [화학식 1a]
[화학식 1b]
[화학식 1c]
[화학식 2]
[화학식 3] RSiX 1 X 2 X 3 상기 화학식에서, R은 수소 원자, C 1 ~C 3 의 알킬기, C 3 ~C 10 의 환형알킬기 또는 C 6 ~C 15 의 아릴기이고; X 1 , X 2 및 X 3 는 각각 독립적으로 C 1 ~C 3 의 알킬기, C 1 ~C 10 의 알콕시기 또는 할로겐 원자이며; p는 3 내지 8의 정수이고; m은 1 내지 10의 정수이며; n은 1 내지 12의 정수임.
Abstract:
PURPOSE: A method of fabricating quantum dot silicate layer for a light-emitting device is provided to increase density of quantum dots within a thin film by replacing a substrate surface including quantum dots with a predetermined material having a sol-gel reactive group and forming the thin film thereon. CONSTITUTION: A substrate surface including semiconductor quantum dots of 1-100nm fabricated by a wet method is replaced with a silane compound having a functional group of a phosphine series, an amine series, or a thiol series and a sol-gel reactive group. A sol-gel reaction process for the replaced quantum dots is performed and the sol-gel reacted quantum dots are coated on a substrate. A sol-gel reaction process is performed and a heat treatment is performed.
Abstract:
PURPOSE: Provided are a siloxane-based resin, which can easily form an insulating film having low dielectric constant in producing highly integrated semiconductor, and a method for forming an interlayer insulating film of semiconductor by using the same. CONSTITUTION: The siloxane-based resin is produced by hydrolyzing a cage type siloxane compound having the structure of formula 1a, 1b or 1c, and a cyclic siloxane compound having the structure of formula 2, or a silane compound having the structure of formula 3: RSiX1X2X3, into organic solvent in the presence of an acid catalyst, and polycondensing the above compounds. In the formulae, R represents hydrogen atom, alkyl group of C1-C3, cyclic alkyl group of C3-C10, or aryl group of C6-C15; each of X1, X2 and X3 independently represents an alkyl group of C1-C3, alkoxy group of C1-C10, or halogen atom; p is an integer of 3-8; m is an integer of 1-10; and n is an integer of 1-12.
Abstract:
PURPOSE: Provided are a syndiotactic allyl benzene-styrene copolymer and a method for preparing the same, which has high syndiotacticity. CONSTITUTION: The syndiotactic allyl benzene-styrene copolymer is represented by formula 1. In the formula 1, n is 400-20,000, m is 1-500. The syndiotactic allyl benzene-styrene copolymer is prepared by copolymerizing allyl benzene and styrene monomer by using a mixture of alkyl aluminum oxane or non-coordination Lewis acid and alkyl aluminum as a metallocene catalyst and cocatalyst.
Abstract:
PURPOSE: Provided are a preparation method and manufacturing equipment of syndiotactic styrene polymer. The process is divided by pre-polymerization and main polymerization step and the catalyst and support catalyst are also introduced separately in each step. To the reactor, stylene monomer, macromonomer, transition metal catalyst and organic aluminum support catalyst are added and polymerized to obtain the product of 10,000-3,000,000 average mol. wt. and 5000-1,500,000 number average mol. wt. The conversion rate is so fixed to 10% and 60% in each step that adhering of material to the inner walls of the reactors is effectively prevented. CONSTITUTION: Not to have the adhering problem at the top and inner wall, two spiral unsymmetrical stirring ribbon blades are installed. They are inner ribbon stirring blade (13) winding spirally along the stirring axis (12) and other spirally winding outer ribbon stirring blade (14) in opposite direction to the blade (13). Stopping plate (16) is placed to prevent the bumping of reaction mixture to the top and anchor stirring blade (15) revolves by the movement of stirring axis (12) keeping the inner space against the inner wall of the bottom part.
Abstract:
PRAM 소자 및 그 제조방법이 개시된다. 본 발명에 따르면, 트랜지스터와 상기 트랜지스터에 연결되는 데이터 저장부를 포함하고, 상기 데이터 저장부는 상부전극(top electrode)과 하부전극(bottom electrode) 및 상기 상부전극과 하부전극 사이에 개재된 다공성의 상변화물질층을 포함하는 PRAM 소자 및 그 제조방법이 제공된다.