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公开(公告)号：KR101712940B1
公开(公告)日：2017-03-08
申请号：KR1020160015542
申请日：2016-02-11
Applicant: 서울대학교산학협력단
CPC classification number: G01N33/54326 , B01L3/502753 , B01L2200/12 , B01L2300/0867 , B01L2300/0874 , B01L2400/043 , B01L2400/086 , C23C16/0245 , C23C16/345 , C23C16/401 , Y10T436/255
Abstract: 본발명은미세유체칩을이용한나노입자의분리및 이를이용하는생체물질분석방법에관한발명이다. 본발명에따른미세유체칩은보다민감하고정밀하게분석대상을검출하는효과가있으며, 상기본 발명에따른미세유체칩을이용하여생체물질분석방법을통해분석을실시하면본 발명과같은나노입자분리홀을이용하여크기에따른나노입자의분리가가능하므로신뢰성높은생체물질의분석이가능하다. 결과적으로본 발명에따른미세유체칩은분리하려는나노입자의크기에맞는맞춤형나노입자분리홀을제작한후, 이를이용하여생체물질분석의신뢰도를크게높일수 있는발명에관한것으로서, 미세유체공학및 미세유체시스템을통한분석의신뢰도를크게향상시킬수 있다.
Abstract translation: 本发明涉及使用微流控芯片分离纳米粒子并分析生物物质的方法。 本发明的微流体芯片对于分析物的敏感性和精确度的检测是有效的。 根据本发明，微流控芯片的使用使得能够基于尺寸将分离孔分离成纳米粒子，实现对生物物质的高度可靠的分析。 总之，本发明的微流体芯片使用适合于纳米颗粒尺寸的分离孔，以大大提高生物物质分析的可靠性，这将有助于基于微流体和微流体系统的分析可靠性的显着提高 。
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公开(公告)号：KR101380497B1
公开(公告)日：2014-04-01
申请号：KR1020130036210
申请日：2013-04-03
Applicant: 서울대학교산학협력단
Abstract: According to an embodiment of the present invention, in a method for fabricating an optical device having a micro lens, an optical device fabricating method comprises a step of bonding a first glass substrate to a main substrate formed with a first cavity; a step of filling the cavity with glass by a first thermal reflow process; a step of forming a glass column from the glass filled in the cavity; a step of forming a micro lens from the glass column by a second thermal reflow process; and a step of forming a driving apparatus of an optical device on the main substrate. [Reference numerals] (AA) Start; (BB) End; (S110) Etch a silicon substrate; (S120) Bond glass to the silicon substrate; (S130) First thermal reflow; (S140) Form a glass column; (S150) Form a lens by a second thermal reflow process; (S160) Wet etch the glass; (S170) Anodic bonding; (S180) Polish the silicon substrate and deposit a mask; (S190) Etch the silicon substrate; (S200) Package
Abstract translation: 根据本发明的实施例，在一种具有微透镜的光学器件的制造方法中，光学器件制造方法包括将第一玻璃衬底接合到形成有第一腔的主衬底的步骤; 通过第一热回流工艺用玻璃填充空腔的步骤; 从填充在空腔中的玻璃形成玻璃柱的步骤; 通过第二热回流工艺从玻璃柱形成微透镜的步骤; 以及在主基板上形成光学装置的驱动装置的步骤。 （附图标记）（AA）开始; （BB）结束; （S110）蚀刻硅衬底; （S120）将玻璃贴到硅衬底上; （S130）第一热回流; （S140）形成玻璃柱; （S150）通过第二热回流工艺形成透镜; （S160）湿法蚀刻玻璃; （S170）阳极接合; （S180）抛光硅衬底并沉积掩模; （S190）蚀刻硅衬底; （S200）包装
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公开(公告)号：KR101270136B1
公开(公告)日：2013-06-04
申请号：KR1020110045276
申请日：2011-05-13
Applicant: (주)마이크로인피니티 , 전북대학교산학협력단 , 서울대학교산학협력단
Abstract: 차분 구동의 장점을 그대로 유지하면서도 잡음의 원인이 되는 피드 쓰루 정전용량을 대폭 축소시키는 MEMS 공진기가 제공된다. 본 발명의 MEMS 공진기는 기판, 상기 기판 상부에 위치하는 진동자, 상기 기판 상부에 위치하고, 상기 진동자의 양측에, 상기 진동자와 비접촉하여 위치하는 제1고정자 및 제2고정자를 포함하되, 상기 제1 고정자는 제1 구동전극과, 제1 감지전극을 포함하고, 상기 제2 고정자는 제2 구동전극과, 제2 감지전극을 포함하고, 상기 제1 및 제2 구동전극은 각각 제1 및 제2 구동신호를 제공받고, 상기 제1 및 제2 감지전극은 상기 제1 및 제2 구동신호에 따른 출력신호를 출력할 수 있다.
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公开(公告)号：KR1020160021176A
公开(公告)日：2016-02-24
申请号：KR1020160015542
申请日：2016-02-11
Applicant: 서울대학교산학협력단
CPC classification number: G01N33/54326 , B01L3/502753 , B01L2200/12 , B01L2300/0867 , B01L2300/0874 , B01L2400/043 , B01L2400/086 , C23C16/0245 , C23C16/345 , C23C16/401 , Y10T436/255
Abstract: 본발명은미세유체칩을이용한나노입자의분리및 이를이용하는생체물질분석방법에관한발명이다. 본발명에따른미세유체칩은보다민감하고정밀하게분석대상을검출하는효과가있으며, 상기본 발명에따른미세유체칩을이용하여생체물질분석방법을통해분석을실시하면본 발명과같은나노입자분리홀을이용하여크기에따른나노입자의분리가가능하므로신뢰성높은생체물질의분석이가능하다. 결과적으로본 발명에따른미세유체칩은분리하려는나노입자의크기에맞는맞춤형나노입자분리홀을제작한후, 이를이용하여생체물질분석의신뢰도를크게높일수 있는발명에관한것으로서, 미세유체공학및 미세유체시스템을통한분석의신뢰도를크게향상시킬수 있다.
Abstract translation: 本发明涉及使用微流控芯片分离纳米颗粒和使用其的生物材料分析方法。 根据本发明，微流控芯片具有以敏感且精确的方式检测分析对象的效果。 根据本发明，在通过使用微流体芯片的生物材料分析方法进行分析的情况下，通过使用本发明的纳米粒子分离孔来分离纳米颗粒相对于尺寸，从而分析具有 高可靠性。 结果，根据本发明，微流控芯片涉及本发明，其能够在制造根据要分离的纳米颗粒尺寸的纳米颗粒分离孔之后，通过使用该微生物材料分析孔，显着提高生物材料分析的可靠性。 因此，微流控芯片能够通过微流体和微流体系统显着提高分析的可靠性。
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公开(公告)号：KR1020140068758A
公开(公告)日：2014-06-09
申请号：KR1020130139222
申请日：2013-11-15
Applicant: 서울대학교산학협력단
CPC classification number: G01N33/54326 , B01L3/502753 , B01L2200/12 , B01L2300/0867 , B01L2300/0874 , B01L2400/043 , B01L2400/086 , C23C16/0245 , C23C16/345 , C23C16/401 , Y10T436/255
Abstract: The present invention relates to the separation of a nanoparticle using a microfluidic chip and a method for analyzing a biomaterial using the same. The microfluidic chip according to the present invention has an effect of more sensitively and precisely detecting an object. The method for analyzing a biomaterial using the microfluidic chip according to the present invention enables the reliable analysis of a biomaterial since the separation of nanoparticles according to the size of the nanoparticles using nanoparticle separation holes. The microfluidic chip according to the present invention can increase the reliability of the analysis of a biomaterial using customized nanoparticle separation holes corresponding to the size of the nanoparticles to be separated. The present invention can greatly improve the reliability of analysis through microfluidic engineering and a microfluidic system.
Abstract translation: 本发明涉及使用微流控芯片分离纳米颗粒，以及使用其分析生物材料的方法。 根据本发明的微流体芯片具有更灵敏和精确地检测物体的效果。 根据本发明的使用微流控芯片分析生物材料的方法能够对生物材料进行可靠的分析，因为根据使用纳米颗粒分离孔的纳米颗粒的尺寸分离纳米颗粒。 根据本发明的微流体芯片可以使用与待分离的纳米颗粒的尺寸相对应的使用定制的纳米颗粒分离孔来增加对生物材料的分析的可靠性。 本发明可以通过微流体工程和微流体系统大大提高分析的可靠性。
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Patent Agency Ranking
公开(公告)号：KR1020140002973A
公开(公告)日：2014-01-09
申请号：KR1020120070054
申请日：2012-06-28
Applicant: 서울대학교산학협력단 , 전북대학교산학협력단 , 이화여자대학교 산학협력단
IPC: B81C1/00 , H01L21/027 , H01L21/306
CPC classification number: B81C1/00031 , H01L21/0273 , H01L21/30604
Abstract: A method for fabricating vertical structures using a wet etching method is provided. The method comprises a step of forming identical patterns corresponding to the vertical through type structures on both sides of a base plate using a first mask; a step of etching the base plate after the patterning step using a first solution; and a step of stopping the etching of the base plate on the vertical through type structure. [Reference numerals] (AA) Vertical
Abstract translation: 提供了使用湿式蚀刻方法制造垂直结构的方法。 该方法包括使用第一掩模在基板的两侧上形成与垂直通孔型结构对应的相同图案的步骤; 在使用第一溶液的图案化步骤之后蚀刻所述基板的步骤; 以及在垂直贯通型结构上停止基板的蚀刻的步骤。 （标号）（AA）垂直
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公开(公告)号：KR1020110002952A
公开(公告)日：2011-01-11
申请号：KR1020090060498
申请日：2009-07-03
Applicant: 서울대학교산학협력단
IPC: G01N33/543 , C12M1/38 , G01N33/53
Abstract: PURPOSE: A bead-based microchip with a temperature control function is provided to shorten chemical reaction time and to simplify test procedure. CONSTITUTION: A bead-based microchip with a temperature control function comprises: a microchip body(140) with a first reaction chamber(142) and second reaction chamber(144) which are connected through a fluid channel; a bead filled in the reaction chamber in which a ligand is fixed on the surface; a heater(150) which is attached on the lower side of the microchip body; and a cover(130) which is attached at the upper side of the microchip body and has a sample inlet and enzyme inlet.
Abstract translation: 目的：提供具有温度控制功能的珠粒微芯片，以缩短化学反应时间并简化测试程序。 构成：具有温度控制功能的珠粒微芯片包括：具有通过流体通道连接的第一反应室（142）和第二反应室（144）的微芯片体（140）; 填充在反应室中的珠子，其中配体固定在表面上; 加热器（150），其安装在所述微芯片体的下侧; 以及附接在微芯片体的上侧并具有样品入口和酶入口的盖（130）。
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公开(公告)号：KR101445028B1
公开(公告)日：2014-09-26
申请号：KR1020130036211
申请日：2013-04-03
Applicant: 서울대학교산학협력단
CPC classification number: G02B26/0841 , B81C2201/014 , B81C2201/0181 , G02B26/105
Abstract: The present invention relates to a silicon nitride layer scanner with an improved tilt angle and a manufacturing method thereof and, more specifically, to a silicon nitride layer scanner including a silicon nitride layer; a grid which is connected to the outer lower part of the silicon nitride layer and supports the silicon nitride layer; a plurality of fixing comb teeth which is connected to the outer surface of the grid wherein the comb teeth are arranged at fixed intervals.
Abstract translation: 本发明涉及具有改进的倾斜角的氮化硅层扫描器及其制造方法，更具体地说，涉及包括氮化硅层的氮化硅层扫描器; 栅格，其与氮化硅层的外部下部连接并支撑氮化硅层; 多个固定梳齿连接到格栅的外表面，其中梳齿以固定间隔布置。
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公开(公告)号：KR101361610B1
公开(公告)日：2014-02-12
申请号：KR1020120070054
申请日：2012-06-28
Applicant: 서울대학교산학협력단 , 전북대학교산학협력단 , 이화여자대학교 산학협력단
IPC: B81C1/00 , H01L21/027 , H01L21/306
Abstract: 습식 식각을 이용한 수직 구조물 제작 방법이 제공된다. 수직 관통형 구조물을 제작하기 위한 제1마스크를 이용하여 수직 관통형 구조물에 해당하는 패턴을 기판의 양면에 동일하게 패터닝하는 단계와, 제1마스크에 의해 패터닝된 기판을 제1용액을 이용하여 식각하는 단계와, 수직 관통형 구조물에 포함된 기판의 식각을 중지하는 단계를 포함한다.
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公开(公告)号：KR1020120127051A
公开(公告)日：2012-11-21
申请号：KR1020110045276
申请日：2011-05-13
Applicant: (주)마이크로인피니티 , 전북대학교산학협력단 , 서울대학교산학협력단
CPC classification number: H03H9/24 , B81B7/02 , H01P7/02 , H03H9/2463 , H03H9/505
Abstract: PURPOSE: A micro electro mechanical system resonator is provided to minimize noises which are included in an output signal by drastically reducing a feed through electrostatic capacity. CONSTITUTION: A vibrator(330) is located on the top of a substrate. A first stator and a second stator are located on the top of the substrate. The first stator and the second stator are located in a non contact state with the vibrator on both sides of the vibrator. The first stator comprises a first driving electrode(310) and a first sensing electrode. The second stator comprises a second driving electrode(315) and a second sensing electrode. The first and second driving electrodes receive first and second driving signals, respectively. The first and second sensing electrodes output an output signal according to the first and second driving signal.
Abstract translation: 目的：提供微电子机械系统谐振器，通过大幅减少进料通过静电容量来最小化包含在输出信号中的噪声。 构成：振动器（330）位于基板的顶部。 第一定子和第二定子位于衬底的顶部。 第一定子和第二定子位于振动器两侧的振动器非接触状态。 第一定子包括第一驱动电极（310）和第一感测电极。 第二定子包括第二驱动电极（315）和第二感测电极。 第一和第二驱动电极分别接收第一和第二驱动信号。 第一和第二感测电极根据第一和第二驱动信号输出输出信号。
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