公开(公告)号：KR1020090093173A

公开(公告)日：2009-09-02

申请号：KR1020080018544

申请日：2008-02-28

Applicant: (주)이모트 ,  재단법인서울대학교산학협력재단

Inventor： 권성훈 ,  김준회 ,  이승아 ,  이경욱 ,  이경열

IPC: B82B3/00 ,  B82Y40/00

Abstract: A method for manufacturing chromogenic molds is provided to mass-produce chromogenic molds conveniently and to secure the production of repeatedly usable chromogenic molds. A method for manufacturing chromogenic molds comprises the following steps of: laminating one or more first photoresists(120) and one or more second photoresists on a substrate(100) in turn; selectively exposing the laminated first and second photoresists to light or electric beam such that one of two kinds of photoresists having higher sensitivity than the other reacts in the wide area, at the same time another one reacts in the narrow area; and allowing the self-aligned first and second photoresists to form a single or multi-layered T-shaped laminate structure.

Abstract translation: 提供了一种制造显色模具的方法，用于大量批量生产显色模具，并确保生产可反复使用的显色模具。 制造显色模具的方法包括以下步骤：依次将一个或多个第一光致抗蚀剂（120）和一个或多个第二光致抗蚀剂层叠在基材（100）上; 将层叠的第一和第二光致抗蚀剂选择性地曝光到光束或电子束，使得具有比其他光敏元件更高的灵敏度的两种光致抗蚀剂中的一种在广泛的区域中反应，同时另一种在狭窄的区域中反应; 并且允许自对准的第一和第二光致抗蚀剂形成单层或多层T形层压结构。

公开(公告)号：KR1020090042211A

公开(公告)日：2009-04-29

申请号：KR1020090010496

申请日：2009-02-10

Applicant: 재단법인서울대학교산학협력재단

Inventor： 윤의준 ,  권성훈

IPC: H01L21/027 ,  H01L33/02

CPC classification number: G03F7/0002 ,  B82Y40/00 ,  G03F7/0037

Abstract: A manufacturing method of a substrate on which a pattern is formed is provided to prevent damage applied to a substrate in a dry etching by patterning an oxide bead on a substrate with a desired shape. A temporary structure is installed on a top of a substrate in order to form a micro channel on a substrate. A bead mixture is formed by mixing an oxide bead and a polymer bead. The oxide bead and the polymer bead are assembled on the substrate by injecting the bead mixture to the micro channel(S220). The temporary structure is separated from the substrate. The substrate is sintered after removing the polymer bead(S240). A refractive index of the oxide bead is 1.2~2.0.

Abstract translation: 提供其上形成有图案的基板的制造方法，以通过在所需形状的基板上图案化氧化物珠来防止在干蚀刻中对基板的损伤。 为了在基板上形成微通道，将临时结构安装在基板的顶部。 通过混合氧化物珠粒和聚合物珠粒形成珠粒混合物。 通过将珠粒混合物注射到微通道（S220）将氧化物珠粒和聚合物珠粒组装在基材上。 临时结构与基板分离。 在除去聚合物珠之后烧结基材（S240）。 氧化物珠的折射率为1.2〜2.0。

公开(公告)号：KR1020090035280A

公开(公告)日：2009-04-09

申请号：KR1020070100472

申请日：2007-10-05

Applicant: 재단법인서울대학교산학협력재단

Inventor： 권성훈 ,  정수은 ,  박욱

IPC: G03F7/20 ,  G03F7/004

CPC classification number: B81B1/004 ,  B81C1/00119

Abstract: A system for fabricating and handling microstructure of energy-cured materials is provided to manufacture a microstructure moved according to various forms of treatment units and to accurately control the positional of the manufactured microstructure. A system for fabricating and handling microstructure(90) of energy-cured materials comprises an energy source; a deformation unit changing the energy generated from an energy source into the energy having the selected property; a stream tube(30) generating a microstructure by selectively curing the energy-curable fluid(31); and a treatment unit(36) moving, arranging or combining the microstructure according to the constant pattern.

Abstract translation: 提供了一种用于制造和处理能量固化材料的微结构的系统，以制造根据各种形式的处理单元移动的微结构并且精确地控制所制造的微结构的位置。 用于制造和处理能量固化材料的微结构（90）的系统包括能量源; 变形单元，其将从能量源产生的能量改变为具有所选择的特性的能量; 流管（30），其通过选择性地固化所述能量可固化流体（31）产生微结构; 和处理单元（36），根据恒定图案移动，排列或组合微结构。

公开(公告)号：KR100875900B1

公开(公告)日：2008-12-26

申请号：KR1020070055934

申请日：2007-06-08

Applicant: 재단법인서울대학교산학협력재단

Inventor： 권성훈

IPC: H01L21/027

CPC classification number: G03F7/20 ,  B81B2203/0338 ,  B81C1/00111 ,  B81C99/0095 ,  B81C2201/0159

Abstract: 본 발명은 마스크를 사용하지 아니하는 광유체적 리소그래피 시스템으로서,본 발명의 일측면은 광원; 상기 광원에서 제공되는 광을 변조하는 공간 광 변조기; 및 내부에 광경화성 액체가 흐르며, 상기 공간 광 변조기에서 제공되는 상기 변조된 광에 따라 상기 광경화성 액체를 선택적으로 경화하여 출력하는 마이크로유체관을 구비하는 광유체적 리소그래피 시스템을 제공한다.

Abstract translation: 提供了一种光流体无掩模光刻系统。 光流光刻系统包括光源; 用于调制由光源提供的光的空间光调制器; 以及包含在其中流动的光固化液体的微流体通道，其中微流体通道根据由空间光调制器提供的调制光选择性地固化光固化液体。

公开(公告)号：KR1020080082698A

公开(公告)日：2008-09-12

申请号：KR1020070023261

申请日：2007-03-09

Applicant: 재단법인서울대학교산학협력재단

Inventor： 권성훈 ,  박영준 ,  김수환

IPC: G06K19/07 ,  G06K17/00 ,  H04B5/02

CPC classification number: G06K19/0723 ,  G06K19/0728

Abstract: An optical ID tag, and a reader and a system thereof are provided to reduce an area of the ID tag largely by using a solar cell and a light emitter instead of an antenna occupying the largest area in a usual RFID(Radio Frequency IDentification) tag, and simplify a signal transmission circuit by converting a baseband signal into an optical signal and transceiving the optical signal without using any RF circuit. A solar cell(110) converts optical energy received from an optical ID reader into electric energy for operating an optical ID tag. Light received from the optical ID reader includes information and the solar cell transfers an electric reception signal corresponding to the information to an ID circuit(130). A light emitter(120) outputs an optical signal corresponding to the electric signal received from the ID circuit. A wavelength of light emitted from the light emitter is identical with the wavelength of the light inputted to the solar cell. The ID circuit is operated by the electric energy supplied from the solar cell and transfers the electric signal corresponding to ID information to the light emitter, and includes a memory(131) for storing the ID information.

Abstract translation: 提供光学ID标签以及阅读器及其系统以通过使用太阳能电池和光发射器代替在通常的RFID（射频识别）标签中占据最大区域的天线来大大减小ID标签的面积 并且通过将基带信号转换为光信号并且在不使用任何RF电路的情况下收发光信号来简化信号传输电路。 太阳能电池（110）将从光学ID读取器接收的光能转换成用于操作光学ID标签的电能。 从光学ID读取器接收的光包括信息，并且太阳能电池将与该信息对应的电接收信号传送到ID电路（130）。 光发射器（120）输出与从ID电路接收的电信号对应的光信号。 从发光体发射的光的波长与输入到太阳能电池的光的波长相同。 ID电路由从太阳能电池提供的电能进行操作，并将与ID信息相对应的电信号传送到发光器，并且包括用于存储ID信息的存储器（131）。