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公开(公告)号：KR100995313B1
公开(公告)日：2010-11-19
申请号：KR1020080018544
申请日：2008-02-28
Applicant: (주)이모트 , 재단법인서울대학교산학협력재단
Abstract: 본 발명은 (a) 기판 위에 적어도 하나의 제1 포토레지스트 및 적어도 하나의 제2 포토레지스트-상기 제1 포토레지스트와 상기 제2 포토레지스트 중 어느 하나는 다른 하나보다 높은 감도를 가짐-를 교대로 적층하는 단계; (b) 상기 적층된 제1 및 제2 포토레지스트를 광 또는 전자 빔에 선택적으로 노출함으로써 상기 노출된 영역을 중심으로 하여 상기 제1 및 제2 포토레지스트 중 감도가 높은 것은 더 넓은 영역에서 반응되는 동시에, 감도가 낮은 것은 더 좁은 영역에서 반응되도록 하는 단계; 및 (c) 현상을 수행함으로써, 상기 제1 및 제2 포토레지스트가 자기 정렬된(self-aligned) 상태로 단일 또는 다중의 T형 적층구조체를 형성하는 단계를 포함하는 나노 구조물의 제조 방법과 나노 구조물, 및 이를 이용하여 제조되는 발색체 몰드를 제공한다. 본 발명에 따르면 금속과 같은 단단한 재질로 반영구적으로 반복적 사용이 가능한 발색체 몰드를 제조할 수 있고, 이로부터 대량으로 간편하게 발색체를 생산할 수 있어 생산 단가를 낮출 수 있다는 장점이 있다. 또한 이러한 발색체 몰드에 다양한 종류의 재료를 주입하여 원하는 재질의 발색체를 만들어낼 수 있으므로 이러한 발색체를 다양한 소재에 적용할 수 있다. 더욱이, 몰드 제조용 나노 구조물의 구조를 원하는 대로 변경할 수 있으므로 최종 발색체의 광학적 특성을 다양하게 조절할 수 있다.
몰포나비, 광결정, 나노 구조물, 발색체 몰드, 발색체-
公开(公告)号：KR1020090093173A
公开(公告)日：2009-09-02
申请号：KR1020080018544
申请日：2008-02-28
Applicant: (주)이모트 , 재단법인서울대학교산학협력재단
Abstract: A method for manufacturing chromogenic molds is provided to mass-produce chromogenic molds conveniently and to secure the production of repeatedly usable chromogenic molds. A method for manufacturing chromogenic molds comprises the following steps of: laminating one or more first photoresists(120) and one or more second photoresists on a substrate(100) in turn; selectively exposing the laminated first and second photoresists to light or electric beam such that one of two kinds of photoresists having higher sensitivity than the other reacts in the wide area, at the same time another one reacts in the narrow area; and allowing the self-aligned first and second photoresists to form a single or multi-layered T-shaped laminate structure.
Abstract translation: 提供了一种制造显色模具的方法，用于大量批量生产显色模具，并确保生产可反复使用的显色模具。 制造显色模具的方法包括以下步骤：依次将一个或多个第一光致抗蚀剂（120）和一个或多个第二光致抗蚀剂层叠在基材（100）上; 将层叠的第一和第二光致抗蚀剂选择性地曝光到光束或电子束，使得具有比其他光敏元件更高的灵敏度的两种光致抗蚀剂中的一种在广泛的区域中反应，同时另一种在狭窄的区域中反应; 并且允许自对准的第一和第二光致抗蚀剂形成单层或多层T形层压结构。
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公开(公告)号：KR1020100025838A
公开(公告)日：2010-03-10
申请号：KR1020080084556
申请日：2008-08-28
Applicant: 재단법인서울대학교산학협력재단
Inventor： 권성훈
Abstract: PURPOSE: A manufacturing method of a nanostructure is provided to efficiently and conveniently manufacture the nanostructure of a desired shape and size with one patterning on several surfaces with one patterning process. CONSTITUTION: A manufacturing method of a nanostructure includes the following steps: forming a multilayer stack with at least a sacrificial layer and a structural layer on a substrate(100); patterning the multilayer stance to form the nanostructure; and releasing the nanostructure(200) form the multilayer stack. In a forming step of the multilayer stack, a deposition step is included to alternatively deposit the structural layer and the sacrificial layer on the substrate. A patterning step for the multilayer stack includes a step for transcribing patterns on the multilayer stack and a step for etching the structural layer and the sacrificial layer according to the transcribed pattern.
Abstract translation: 目的：提供纳米结构的制造方法，以通过一个图案化工艺在几个表面上进行一次图案化来有效地和方便地制造所需形状和尺寸的纳米结构。 构成：纳米结构的制造方法包括以下步骤：在衬底（100）上形成至少具有牺牲层和结构层的多层叠层; 图案化多层立体以形成纳米结构; 并释放纳米结构（200）形成多层叠层。 在多层堆叠的形成步骤中，包括沉积步骤以交替地将结构层和牺牲层沉积在衬底上。 用于多层堆叠的图案化步骤包括用于转录多层堆叠上的图案的步骤和根据转录图案蚀刻结构层和牺牲层的步骤。
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公开(公告)号：KR1020100013593A
公开(公告)日：2010-02-10
申请号：KR1020080075190
申请日：2008-07-31
Applicant: 재단법인서울대학교산학협력재단
IPC: H01L21/027
CPC classification number: B82B3/0009 , B82Y40/00
Abstract: PURPOSE: A method and a system for transporting a fine structure are provided to control the position of micro pipe to be vertical to the microstructure by using a protruded guide and a fine structure. CONSTITUTION: A microstructures transport system includes a fluidic channel(110) and a microstructures(120) is located inside the stream tube. The stream tube includes a rail(140) of the groove type. The microstructures moves along with the rail. The microstructures includes a protruded guide(150). The guide prevent the microstructures from deviated off the rail. The guide has one side of a wedge(160). The pointed edge(162) of wedge is not arranged at the center of the guide and is leaned one of both sides of the rail.
Abstract translation: 目的：提供一种运输精细结构的方法和系统，以通过使用突出的导向和精细结构来控制微管垂直于微结构的位置。 构成：微结构输送系统包括流体通道（110），微流体（120）位于流管内。 流管包括槽型的轨道（140）。 微结构与轨道一起移动。 微结构包括突出导向件（150）。 导轨可防止微结构偏离轨道。 导轨具有楔形物的一侧（160）。 楔形物的尖锐边缘（162）不布置在引导件的中心并且倾斜轨道两侧之一。
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公开(公告)号：KR1020090041858A
公开(公告)日：2009-04-29
申请号：KR1020070107577
申请日：2007-10-25
Applicant: 재단법인서울대학교산학협력재단
IPC: H01L21/027 , H01L33/00 , A00
Abstract: A manufacturing method of a substrate on which a pattern is formed is provided to prevent damage generated in a dry etching by patterning oxide beads on a substrate with a desired shape. A manufacturing method of a substrate on which a pattern is formed comprises the following steps: a step for forming a first binding pattern having a selective binding force on a forming position of an oxide bead pattern of a substrate(S210); a step for coating a second binding to the oxide bead(S220); a step for forming the oxide bead on which the second binding is coated through a coating on the first binding pattern(S230); and a step for heat-treating the substrate(S240).
Abstract translation: 提供其上形成有图案的基板的制造方法，以防止在具有所需形状的基板上图案化氧化物珠粒的干蚀刻中产生的损伤。 其上形成图案的基板的制造方法包括以下步骤：在基板的氧化物珠图案的成形位置上形成具有选择性结合力的第一装订图案的步骤（S210）; 涂覆第二次结合氧化物珠的步骤（S220）; 用于形成通过第一结合图案上的涂层涂覆第二粘合物的氧化物珠粒的步骤（S230）; 和用于对基材进行热处理的步骤（S240）。
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Patent Agency Ranking
公开(公告)号：KR1020080108207A
公开(公告)日：2008-12-12
申请号：KR1020080106246
申请日：2008-10-29
Applicant: 재단법인서울대학교산학협력재단
CPC classification number: G06K19/0716 , G06K19/0728 , H01L31/02008 , H01L31/04
Abstract: An optical identification tag, a reader and a system are provided to manufactured in small size. An optical identification tag(100) comprises: a solar cell(110) which converts an incident light into electric energy that the optical identification tag uses to operate; an identification circuit unit(130) which provides a transmission electric signal corresponding to identification information; a light-emitting unit(120) which provides the transmission optical signal corresponding to the transmission electric signal, and a sensor(140) which measures temperature, light, pressure, acceleration, magnetism, PH, etc.
Abstract translation: 提供光学识别标签，读取器和系统以制造成小尺寸。 光学识别标签（100）包括：太阳能电池（110），其将入射光转换成光学识别标签用于操作的电能; 识别电路单元，其提供与识别信息对应的发送电信号; 提供与发送电信号相对应的发送光信号的发光单元（120），以及测量温度，光，压力，加速度，磁力，PH等的传感器（140）
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公开(公告)号：KR1020080107744A
公开(公告)日：2008-12-11
申请号：KR1020070055934
申请日：2007-06-08
Applicant: 재단법인서울대학교산학협력재단
Inventor： 권성훈
IPC: H01L21/027
CPC classification number: G03F7/20 , B81B2203/0338 , B81C1/00111 , B81C99/0095 , B81C2201/0159 , H01L21/0274 , G03F7/2057
Abstract: An optofluidic maskless lithography system is provided to reduce the manufacturing cost required for replacing the mask by using the micorfluidic channel instead of the mask. An optofluidic maskless lithography system comprises the light source(10), the spatial light modulator(20), and the micorfluidic channel(40). The spatial light modulator modulates the light provided from the light source. The photo curable liquid flows inside the micorfluidic channel. The micorfluidic channel selectively hardens the photo curable liquid according to the modulated light provided from the spatial light modulator and outputs the result. The micro lens reduces the size of the modulated light provided from the spatial light modulator and provides the results to the micorfluidic channel.
Abstract translation: 提供了一种光流体无掩模光刻系统，以通过使用微流体通道代替掩模来降低更换面罩所需的制造成本。 光流体无掩模光刻系统包括光源（10），空间光调制器（20）和微流体通道（40）。 空间光调制器调制从光源提供的光。 可光固化液体在微流路内流动。 微流体通道根据从空间光调制器提供的调制光选择性地硬化可光固化液体并输出结果。 微透镜减小从空间光调制器提供的调制光的尺寸，并将结果提供给微流体通道。
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公开(公告)号：KR1020100013674A
公开(公告)日：2010-02-10
申请号：KR1020080075302
申请日：2008-07-31
Applicant: 재단법인서울대학교산학협력재단
IPC: H01L21/56 , H01L21/677 , H01L23/02
CPC classification number: H01L21/565 , H01L21/67121 , H01L21/67144 , H01L21/67721 , H01L23/02
Abstract: PURPOSE: A method and a system for fabricating and handling a fine structure are provided to implement high productivity by forming a chip package through hardening a photocurable fluid. CONSTITUTION: A solution having a chip therein is hardened selectively and a chip package is formed(S120). Thereafter, the chip is moved along with a rail of groove type and protruded type which is installed in the stream tube(S130). The chip is stopped at the end of the rail(S140). The next chip of which package is completed is moved along the rail and is stopped when it is contacted to the pervious chip(S150).
Abstract translation: 目的：提供一种用于制造和处理精细结构的方法和系统，以通过硬化可光固化流体形成芯片封装来实现高生产率。 构成：其中具有芯片的溶液选择性地硬化并形成芯片封装（S120）。 此后，芯片与安装在流管中的槽型突起型轨（S130）一起移动。 芯片停在轨道的末端（S140）。 完成该包装的下一个芯片沿轨道移动，并且当它与上述芯片接触时停止（S150）。
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公开(公告)号：KR101061966B1
公开(公告)日：2011-09-05
申请号：KR1020080084082
申请日：2008-08-27
Applicant: 재단법인서울대학교산학협력재단
Abstract: 다조성 나노와이어 및 이의 제조방법이 제공된다. 미세 유체 채널(microfluidic channel)로 복수의 수지들을 공급하고, 공급된 수지들을 광에 노출시켜 나노 와이어를 형성한다.
Abstract translation: 提供了多项式纳米线及其制造方法。 向微流体通道提供多种树脂并将所提供的树脂曝光以形成纳米线。
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公开(公告)号：KR101038233B1
公开(公告)日：2011-05-31
申请号：KR1020080075302
申请日：2008-07-31
Applicant: 재단법인서울대학교산학협력재단
IPC: H01L21/56 , H01L21/677 , H01L23/02
Abstract: 칩 패키징 방법에 있어서, 먼저, 칩이 제공된다. 그 후, 상기 칩이 담겨진 유체를 선택적으로 경화시킴으로써 상기 칩의 패키지를 형성한다. 그 후, 상기 패키지가 형성된 상기 칩을 유체관에 구비된 홈 형태 또는 돌기 형태의 레일을 따라 이동시킨다.
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