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公开(公告)号：KR1020100075061A
公开(公告)日：2010-07-02
申请号：KR1020080133663
申请日：2008-12-24
Applicant: 전자부품연구원
IPC: H01L29/786 , H05B33/00 , B82Y30/00
CPC classification number: H01L51/105 , H01L51/0005 , H01L51/0545
Abstract: PURPOSE: An organic thin film transistor and a manufacturing method thereof are provided to form an organic semiconductor channel with high crystallization and high charge mobility by forming an organic semiconductor layer, with a requested shape and size, on a channel region. CONSTITUTION: A gate electrode is formed on a substrate. A gate insulating layer(130) is formed on the gate electrode. A source electrode, a drain electrode, and a data electrode are formed on the gate insulation layer. A self-assembly monolayer(160) is formed on the upper side of the source electrode and the drain electrode. The channel region is removed to expose a part of the source electrode and the drain electrode. An organic semiconductor layer(170) is formed on the channel region.
Abstract translation: 目的：提供一种有机薄膜晶体管及其制造方法，通过在沟道区上形成具有要求形状和尺寸的有机半导体层，形成具有高结晶性和高电荷迁移率的有机半导体沟道。 构成：在基板上形成栅电极。 在栅电极上形成栅极绝缘层（130）。 在栅极绝缘层上形成源电极，漏电极和数据电极。 在源电极和漏电极的上侧形成自组装单层（160）。 去除沟道区以露出源电极和漏电极的一部分。 在沟道区上形成有机半导体层（170）。
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公开(公告)号：KR100458124B1
公开(公告)日：2004-11-20
申请号：KR1020020027141
申请日：2002-05-16
Applicant: 전자부품연구원
Abstract: PURPOSE: A method is provided to reduce manufacturing costs for plasma display panel and allow for ease of manufacture of barrier ribs. CONSTITUTION: A method comprises a step of forming a metal electrode structure pattern(S2-1) of 1mm or larger on a glass substrate(S1) by using a silver(Ag); a step of forming an insulator(S3) on the glass substrate on which the metal electrode structure pattern is formed; a step of forming a barrier rib through a single process by using a metal mask; and a step of producing a lower substrate by depositing a protective film on the barrier rib.
Abstract translation: 目的：提供一种方法来降低等离子显示面板的制造成本并且容易制造障壁。 构成：一种方法包括通过使用银（Ag）在玻璃基板（S1）上形成1mm或更大的金属电极结构图案（S2-1）的步骤; 在其上形成有金属电极结构图案的玻璃基板上形成绝缘体（S3）的步骤; 通过使用金属掩模通过单个工艺形成障壁的步骤; 以及通过在障壁上沉积保护膜来制造下基板的步骤。
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公开(公告)号：KR1020040047998A
公开(公告)日：2004-06-07
申请号：KR1020020075741
申请日：2002-12-02
Applicant: 전자부품연구원
IPC: B32B27/00
Abstract: PURPOSE: Provided is a functional protective membrane for a flexible display film, which has reduced moisture- and oxygen-transmission and excellent gas barrier property, and improves the reliability and mechanical strength of the display. CONSTITUTION: The functional protective film(30) for a flexible display film comprises a polymer film(31); a perylene film(32,33,35) deposited on one or both sides of the polymer film(31); and a supplementary gas barrier film(34) deposited on the other surface of the perylene film(32,33,35). The perylene film is deposited by an electron beam deposition, vacuum deposition or sputtering deposition method. Further, the functional membrane comprises inorganic substances of AlOx.
Abstract translation: 目的：提供了柔性显示膜的功能性保护膜，其具有减少的透湿性和优异的阻气性，并且提高了显示器的可靠性和机械强度。 构成：用于柔性显示膜的功能性保护膜（30）包括聚合物膜（31）; 沉积在聚合物膜（31）的一侧或两侧上的苝膜（32,33,35）; 和沉积在苝膜（32,33,35）的另一个表面上的辅助阻气膜（34）。 通过电子束沉积，真空沉积或溅射沉积方法沉积苝膜。 此外，功能膜包含AlO x的无机物质。
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公开(公告)号：KR2020000013180U
公开(公告)日：2000-07-15
申请号：KR2019980026318
申请日：1998-12-23
Applicant: 전자부품연구원
IPC: H01L21/68
Abstract: 본 고안은 플라스틱 필름기판과 같은 쉽게 휘어지는 기판을 사용하는 소자의 제작시 기판의 고정에 필요한 기판 고정용 진공 척을 개시한다.
본 고안은 기판의 바닥면을 흡착하는 흡착판과, 흡착판의 중앙에 형성되어 진공발생장치로부터 공기를 빨아들이는 파이프를 구비하는 기판 고정용 진공 척에 있어서, 흡착판 내부에 형성되어 파이프와 연통된 진공라인과, 진공라인으로부터 흡착판 상면으로 관통 형성된 다수의 진공구멍을 구비함으로써 쉽게 휘어지는 기판의 휨이나 그루브 현상 등을 해결하여 공정의 효율성 및 불량률의 저하 및 수율의 향상을 가져올 수 있다.-
公开(公告)号：KR1020000041832A
公开(公告)日：2000-07-15
申请号：KR1019980057839
申请日：1998-12-23
Applicant: 전자부품연구원
IPC: H01J19/24
Abstract: PURPOSE: A field emission display is provided to block a harmful gas component lowering the internal vacuum of the device by forming a protection film on a fluorescent film. CONSTITUTION: A field emission display includes: a cathode substrate(1) and an anode substrate(6); a cathode electrode(2) formed on the cathode substrate; an emitter(5) formed in a micro tip on the cathode electrode; an anode electrode(7) formed with a transparent conductive film on the anode substrate; a fluorescent film(8) formed on a bottom of the anode electrode; and a protection film(20) where polymer having the characteristics of passing electrons emitted from the emitter to the phosphor and blocking gas components generated from the phosphor is formed on the bottom of the fluorescent film. The field emission display can prolong the lifetime of the FED and can assure the reliability and can improve the performance of the FED.
Abstract translation: 目的：提供场致发射显示器，通过在荧光膜上形成保护膜来阻止降低器件内部真空度的有害气体成分。 构成：场发射显示器包括：阴极基板（1）和阳极基板（6）; 形成在所述阴极基板上的阴极电极; 形成在阴极上的微尖端的发射极（5） 在所述阳极基板上形成有透明导电膜的阳极电极; 形成在所述阳极电极的底部的荧光膜（8） 以及保护膜（20），其中在荧光膜的底部上形成具有使从发射体发射的电子通过荧光体和阻挡由荧光体产生的气体成分的特性的聚合物。 场发射显示可以延长FED的使用寿命，并可以保证FED的可靠性，并可以提高FED的性能。
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Patent Agency Ranking
公开(公告)号：KR101456239B1
公开(公告)日：2014-11-13
申请号：KR1020120153256
申请日：2012-12-26
Applicant: 전자부품연구원 , 중앙대학교 산학협력단
IPC: H01L21/26 , H01L21/324
Abstract: 본 발명은 용액공정을 이용한 산화물 박막 소결용 자외선 램프 장치를 개시한다. 본 발명은 샘플탑재부와, 내부에 챔버 공간을 가지며, 일정 간격을 가지고 이격 분리되어 형성된 하우징을 구비하되, 하우징은 적어도 2개의 영역으로 분리된 구조를 가지며, 일 영역에는 챔버 공간의 상부에는 상기 샘플탑재부와 대향되게 형성되어 하부로 자외선을 조사하기 위한 자외선 램프부를 포함하고, 일영역 내부로 불활성가스를 주입하기 위한 불활성가스주입부를 구비하고, 다른 영역에는 자외선 램프부가 설치되지 않으며, 샘플탑재부는 샘플을 탑재한 상태에서 이동가능하게 구성된다.
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公开(公告)号：KR1020140084432A
公开(公告)日：2014-07-07
申请号：KR1020120153255
申请日：2012-12-26
Applicant: 전자부품연구원 , 중앙대학교 산학협력단
IPC: H01L21/268
CPC classification number: H01L21/67098 , C23C16/482 , H01L21/67017
Abstract: Disclosed is an ultraviolet lamp device for sintering an oxide thin film using a solution process. The ultraviolet lamp device includes a sample mounting part; a housing which has a structure which surrounds the sample mounting part and includes a chamber space in side; an ultraviolet lamp part which faces the sample mounting part in the upper part of a chamber space and emits ultraviolet rays downwards; and an inert gas injection part which injects inert gas into a sample which is mounted on the sample mounting part and is formed in a region of the housing.
Abstract translation: 公开了一种使用溶液法烧结氧化物薄膜的紫外线灯装置。 紫外线灯装置包括样品安装部; 壳体，其具有围绕所述样品安装部并且包括侧面的室空间的结构; 紫外灯部分，其面对样品安装部分在室空间的上部并向下射出紫外线; 以及惰性气体注入部，其将惰性气体注入到安装在样品安装部上并形成在壳体的区域中的样品中。
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公开(公告)号：KR1020130116785A
公开(公告)日：2013-10-24
申请号：KR1020120137532
申请日：2012-11-30
Applicant: 전자부품연구원 , 중앙대학교 산학협력단
IPC: H01L21/316
CPC classification number: H01L21/02628 , H01L21/02554 , H01L21/02565 , H01L21/02664 , H01L21/26 , H01L29/24 , H01L29/7869
Abstract: PURPOSE: A method for manufacturing an oxide thin film by using a low temperature process, the oxide thin film, and an electric device thereof are provided to prevent the deterioration of an oxide property by emitting an ultraviolet ray under an inert gas atmosphere. CONSTITUTION: An oxide solution (2) is coated on a substrate (10). The coated oxide solution is irradiated with an ultraviolet ray under an inert gas atmosphere. The wavelength of the ultraviolet ray is 150 to 260 nm. The holding time of the ultraviolet irradiation is 1 to 240 minutes. The inert gas atmosphere is a nitrogen atmosphere, an argon atmosphere, or a helium atmosphere. [Reference numerals] (AA) Inert gas atmosphere
Abstract translation: 目的：提供一种通过使用低温工艺制造氧化物薄膜的方法，该氧化物薄膜及其电气装置，以通过在惰性气体气氛下发射紫外线来防止氧化物性质的劣化。 构成：将氧化物溶液（2）涂覆在基材（10）上。 在惰性气体气氛下用紫外线照射被覆氧化物溶液。 紫外线的波长为150〜260nm。 紫外线照射的保持时间为1〜240分钟。 惰性气体气氛为氮气氛，氩气氛或氦气氛。 （附图标记）（AA）惰性气体气氛
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公开(公告)号：KR1020100128892A
公开(公告)日：2010-12-08
申请号：KR1020090047557
申请日：2009-05-29
Applicant: 전자부품연구원
IPC: H01L29/786
CPC classification number: H01L29/78696 , H01L29/41733 , H01L29/7869 , H01L51/0558 , H01L51/105
Abstract: PURPOSE: A manufacturing method of thin film transistor and a thin film transistor manufactured by the same are provided to be applied to an OLED(Organic Light Emitting Diode) requiring great amount of current by offering a short channel thin film transistor having a channel width of less than 1μm while using general exposing device. CONSTITUTION: A gate electrode(120), a gate insulating layer(130), and a source electrode(140) are successively formed on a substrate(110). A photoresist layer for forming the channel region on the source electrode is formed. The source electrode is etched on the gate insulating layer in order to form the drain electrode.
Abstract translation: 目的：提供一种薄膜晶体管及其制造的薄膜晶体管的制造方法，其应用于需要大量电流的OLED（有机发光二极管），其通过提供具有沟道宽度的短沟道薄膜晶体管 使用一般曝光装置时小于1μm。 构成：在基板（110）上依次形成栅电极（120），栅极绝缘层（130）和源电极（140）。 形成用于在源电极上形成沟道区的光致抗蚀剂层。 在栅极绝缘层上蚀刻源电极以形成漏电极。
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公开(公告)号：KR1020040044755A
公开(公告)日：2004-05-31
申请号：KR1020020072926
申请日：2002-11-22
Applicant: 전자부품연구원
IPC: G02F1/1333
CPC classification number: G02F1/133345 , G02F1/1333 , G02F2202/02 , G02F2202/09
Abstract: PURPOSE: A double structure insulation film mixed organic and inorganic is provided to reduce a surface distortion of a substrate by stacking an organic insulation layer on the substrate. CONSTITUTION: A gas barrier layer(2) is formed on a polymer substrate(1). A gate electrode(3) is formed on the gas barrier layer(2). An organic insulation layer(4) is formed on the gate electrode(3). An inorganic insulation layer(5) is formed on the organic insulation layer(4). A source-drain electrode(6) and a semiconductor layer(7) used as a thin film transistor are formed on the inorganic insulation layer(5). The organic insulation layer(4) is made of anyone material of polycarbonate, polyimide and acryl which have below 2.5GPa of Young's module and superior mechanical and electrical characteristics. The inorganic insulation layer(5) is made of SiO2 having 80-100GPa of Young's module and its thickness is within 200nm.
Abstract translation: 目的：提供混合有机和无机的双重结构绝缘膜，以通过在基板上层叠有机绝缘层来减小基板的表面变形。 构成：在聚合物基材（1）上形成阻气层（2）。 在阻气层（2）上形成栅电极（3）。 在栅电极（3）上形成有机绝缘层（4）。 在有机绝缘层（4）上形成无机绝缘层（5）。 在无机绝缘层（5）上形成用作薄膜晶体管的源 - 漏电极（6）和半导体层（7）。 有机绝缘层（4）由聚碳酸酯，聚酰亚胺和丙烯酸树脂的任何材料制成，其杨氏模量小于2.5GPa，具有优异的机械和电气特性。 无机绝缘层（5）由具有80-100GPa的杨氏模块的SiO 2制成，其厚度在200nm以内。
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