Abstract:
본 발명은 요소 분해 능력을 개선시킨 바이오 센서의 제조방법에 관한 것으로, 상기 방법은 기판 상에 금속산화물 나노 막대를 형성하는 단계; 상기 금속산화물 나노 막대 상에 NiO 나노 입자를 부착하는 단계; 및 상기 NiO 나노 입자 상에 요소 분해 효소를 고정시키는 단계를 포함하며, 이와 같은 방법을 통해 요소분해효소를 고정화하는 NiO 나노입자를 편평한 2차원 표면보다는 3차원 구조를 가지는 금속산화물 나노막대 표면에 고정시킴으로써 단위면적 또는 단위부피 당 고정되는 요소분해효소의 양을 증가시켜 요소분해능력을 개선시킬 수 있다.
Abstract:
An electrode array according to an embodiment of the present invention comprises: a first electrode on a substrate; a second electrode arranged on the first electrode, and having the upper side and the lower side opposed to each other; an electrode supporter coming in contact with the second electrode and having an inner surface and an outer surface perpendicular to the substrate; and a third electrode coming in contact with the upper side of the second electrode and the inner surface of the electrode supporter. The electrode array of the present invention has an improved impedance performance, and an improved interface between a biological tissue and the electrode.
Abstract:
PURPOSE: A surface treatment method for a neural electrode array using a zinc oxide nanowire is provided to allow the array to have surface roughness using the nanowire and to form a neuron adhesion material on the nanowire, thereby stably growing a neuron on the front surface of the array. CONSTITUTION: A surface treatment method for a neural electrode array(10) using a zinc oxide nanowire(31) includes the following steps: a step of preparing the array; a step of forming a metal seed layer on the array; a step of etching the metal seed layer; a step of growing the nanowire on the metal seed layer which is not removed in the previous step of etching; and a step of forming a neuron adhesion material(41) on the nanowire.
Abstract:
PURPOSE: A method of manufacturing a titanium oxide film and a neural electrode including the titanium oxide film manufactured by the method are provided to produce a hierarchy structure where a micro structure and a nano structure simultaneously exist by surface-reforming a titanium oxide pattern to a nanoporous structure with an alkaline hydrothermal reaction. CONSTITUTION: A titanium oxide sol layer is formed by applying titanium oxide sol onto a substrate. A patterned titanium oxide gel layer is formed by heating the titanium oxide sol layer. The titanium oxide film having nano sized pores is formed by letting the patterned titanium oxide gel layer have hydrothermal reaction.
Abstract:
PURPOSE: A method for patterned growth of zinc oxide nanowires is provided to continuously implement a photoresist developing step and a zinc oxide seed layer etching step by using a tetramethyl ammonium hydroxide aqueous solution. CONSTITUTION: A method for patterned growth of zinc oxide nanowires includes the following steps: a zinc oxide seed layer(20) is formed on a substrate(10); a photoresist layer(30) is formed on the seed layer; the photoresist layer is patterned; the seed layer is etched and patterned by using the patterned photoresist layer; the photoresist layer is removed from the seed layer; and zinc oxide nanowires are grown on the seed layer. The patterning and etching steps are continuously implemented using tetramethyl ammonium hydroxide aqueous solution. The concentration of the tetramethyl ammonium hydroxide aqueous solution is 1-3%.
Abstract:
PURPOSE: A method for forming micro patterns of a neuronal signal measurement chip is provided to form the micro pattern with a desired shape and size without using a photo initiator, by forming the micro patterns of the neuronal signal measurement chip by using a photo cross linking polymer. CONSTITUTION: A substrate (10) is prepared, and surface treatment is performed with 70W plasma under Ar/N2 atmosphere for 10 minutes to form OH functional group. A bio-affinity polymer (12) of 50% is diluted to 2% density with ethanol, and the substrate where the OH functional group is formed is put into the diluted solution for 12 hours at room temperature for chemical bonding. The substrate which is chemically bonded to the bio-affinity polymer is cleaned with ethanol and is thermally-treated at 120°C for 10 minutes and then is cleaned with ultrasonic waves for 5 minutes to remove the bio-affinity polymer not bonded to the surface of the substrate. The cleaned substrate is cleaned with ethanol again and is dried with nitrogen.
Abstract:
PURPOSE: A fabrication method of an electrode support is provided to improve adhesion with a substrate and mechanical strength of an electrode support. CONSTITUTION: A fabrication method of an electrode support comprises: a step of forming a first insulating film(30) on a conductive substrate; a step of forming an adhered film(51) on a first insulating film; a step of forming a second insulating film on the adhered film; a step of patterning the second insulating film and the adhered film; a step of patterning the second insulating film and adhered film; a step of forming a tube-type electrode support(71) on the first insulating film; and a step of heat-treating a substrate which comprises an electrode support.