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公开(公告)号：JPS60109226A
公开(公告)日：1985-06-14
申请号：JP21598183
申请日：1983-11-18
Applicant: CANON KK
Inventor： YAMAMURA MITSUGI , YOMODA MINORU
Abstract: PURPOSE:To achieve the position control of rapid response and good accuracy by providing the first position detector for setting plural drive quantities and the second position detector which corresponds to driving sources for feedback control of the plural driving sources. CONSTITUTION:The piezoelectric elements 23a, 23b and 23c (virtually, the element is formed by plurality of piezoelectric element chips laminated) arranged by equal angles through a wafer chuck base 21 are driven to move a wafer chuck 20 vertically in Z-direction (23c is not shown in the drawing.) Eddy current type position detectors 22a, 22b and 22c are attached in the position corresponding to each of the piezoelectric elements 23a, 23b and 23c and distances between overhangs of driving shafts of piezoelectric elements and the wafer chuck base 21 are measured thereby measuring the driving quantity of the piezoelectric elements. Also, nozzles 25a, 25b and 25c of an air microsensor are attached to the side part of a reduced projection lens 3 and the distances between the nozzles and the surface of the wafer are measured according to the change of backpressure or flow of the air blown off from the nozzle.
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公开(公告)号：JPS60108913A
公开(公告)日：1985-06-14
申请号：JP21597983
申请日：1983-11-18
Applicant: CANON KK
Inventor： YAMAMURA MITSUGI , YOMODA MINORU
Abstract: PURPOSE:To obtain the changed variable of an electrostriction element precisely by comparing a wafer driving variable by the electrostriction element which is detected by an eddy current type position detector with a driving variable specified by a microprocessor sequentially and driving the wafer until the difference of the compared values is included in an allowable error range. CONSTITUTION:When the wafer 4 is vertically driven by the electrostriction element 23, the driving variable is detected by air sensor nozzles 34-37 and the eddy current type position detector 22 and measured. The output of the detector 22 is converted into a voltage proportional to the displaced variable by a displacement/voltage converting circuit 48 and the voltage is outputted to a differential amplifier 45 and an A/D converter 47. The amplifier 45 compares the wafer 4 driving variable by the element 23 which is detected by the detector 22 sequentially with the driving variable specified by the micro-processor 40 to drive the wafer 4 until the difference is included in the allowable error range. Consequently, the surface of the wafer 4 can be positioned to a prescribed focus position accurately.
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公开(公告)号：JPS56163411A
公开(公告)日：1981-12-16
申请号：JP6695180
申请日：1980-05-20
Applicant: CANON KK
Inventor： YOMODA MINORU , SATOU TERUYA
Abstract: PURPOSE:To provide multiple outputs of complex correlation by reading out data from ROM by the output of a joy stick lever. CONSTITUTION:Analog outputs X1 and Y1 of an X-axis potentiometer 2 and a Y- axis potentiometer 3 respectively are converted into digital signals 7 and 8 by AD converters 4 and 5 for addressing of ROM6 and cause the ROM6 to provide data X0 and Y0 which have previously been stored in the specified addresses.
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公开(公告)号：JPS5617424A
公开(公告)日：1981-02-19
申请号：JP9458279
申请日：1979-07-23
Applicant: CANON KK
Inventor： SHIMODA ISAMU , YOMODA MINORU , SATOU TERUYA
Abstract: PURPOSE:To prevent the number of data transfer lines from increasing not in proportion to the volume of data of a terminal, by providing a RAM memory between CPU and the terminal unit. CONSTITUTION:CPU performs data transfer with RAM, which provides time- division data transfer with a circuit in a time other than the access time of CPU. While CPU is not in input-output operation with RAM, selector 4 selects an artificial address signal from counter 2 and data from RAM are selected, thereby exercising data transfer. CPU attains access to output RAM5 on an interface without access direct to the terminal and, after storing RAM5 temporarily with data to be output, outputs them from RAM5. Then, data are output by making use of the latch function that RAM possesses, so that a decoder on an address line can be eliminated
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公开(公告)号：JPH0519298B2
公开(公告)日：1993-03-16
申请号：JP20959290
申请日：1990-08-07
Applicant: CANON KK
Inventor： YOMODA MINORU , TSUKAMOTO IZUMI
IPC: G03F9/00 , G03F7/20 , H01L21/027 , H01L21/30
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Patent Agency Ranking
公开(公告)号：JPH057726B2
公开(公告)日：1993-01-29
申请号：JP21597983
申请日：1983-11-18
Applicant: CANON KK
Inventor： YAMAMURA MITSUGI , YOMODA MINORU
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公开(公告)号：JPH0144010B2
公开(公告)日：1989-09-25
申请号：JP21598183
申请日：1983-11-18
Applicant: CANON KK
Inventor： YAMAMURA MITSUGI , YOMODA MINORU
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公开(公告)号：JPH0142492B2
公开(公告)日：1989-09-13
申请号：JP20846881
申请日：1981-12-23
Applicant: CANON KK
Inventor： YOMODA MINORU , TSUKAMOTO IZUMI
IPC: G03F9/00 , G03F9/02 , H01L21/027 , H01L21/30
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公开(公告)号：JPS60140827A
公开(公告)日：1985-07-25
申请号：JP24556383
申请日：1983-12-28
Applicant: CANON KK
Inventor： SHIMODA ISAMU , YOMODA MINORU , ISOHATA JIYUNJI , SATOU TERUYA
IPC: H01L21/30 , G03F7/20 , G03F9/00 , H01L21/027
Abstract: PURPOSE:To compensate an error on transfer in a short time by adjusting the temperature of at least one of an original plate and a sensitive body on the basis of the quantity of displacement between alignment marks for the original plate and the sensitive body obtained by an output from a photoelectric conversion means detecting the state of alignment between the alignment marks for the original plate and the sensitively body and their thermal expansion coefficients. CONSTITUTION:Reflected beams from a mask 8, a mirror inan optical system 9 and a wafer 10 are reflected by a half-mirror 45, and two condenser lenses 47 and two photoelectric conversion elements 48 are arranged along the reflected beams. Outputs from the photoelectric conversion elements 48 are applied to an arithmetic processing circuit 49, thermal expansion coefficients peculiar to the mask 8 and the wafer 10 are memorized to the arithmetic processing circuit 49, and the circuit 49 executes arithmetic operation from the memorizing values and output values from the photoelectric conversion elements 48. A fluid temperature controller 31 supplies a section in the vicinity of the wafer 10 with a fluid at a fixed temperature by an indication from the arithmetic processing circuit 49, and control valves 52, 53 supply a fluid bearing guide 51 with air at fixed pressure from a high-pressure air source by an indication from the arithmetic processing circuit 49, and adjust a minute angle in the direction of movement of a carriage 60.
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公开(公告)号：JPS60140826A
公开(公告)日：1985-07-25
申请号：JP24556283
申请日：1983-12-28
Applicant: CANON KK
Inventor： SHIMODA ISAMU , YOMODA MINORU , ISOHATA JIYUNJI , SATOU TERUYA
IPC: H01L21/30 , G03F7/20 , G03F9/00 , H01L21/027
Abstract: PURPOSE:To compensate an error in the direction of rotation at a plurality of points by arithmetically operating the quantity of displacement between alignment marks for an original plate and a sensitive body at each position by an output from a photoelectric conversion means detecting the state of alignment between the alignment marks of the original plate and the sensitive body and adjusting a carriage mechanism and a guide mechanism at a plurality of positions. CONSTITUTION:When an alignment mark 101 for a mask and alignment mark 102 for a wafer are superposed as shown in the figure (a), there is an alignment mark 102a for the wafer between alignment marks 101a, 101b for the mask, an alignment mark 102b is positioned between alignment marks 101c, 101d, and laser lights are scanned in the scanning A direction toward the right from the left. A photoelectric conversion element 70 detects a pulse-shaped output at a section where laser lights cross with the alignment marks 101, 102, and an output voltage waveform as shown in the figure (b) is obtained. Displacement on alignment is acquired by measuring the time interval W1, W2...W5 of the pulse signal.
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