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公开(公告)号：JPS614968A
公开(公告)日：1986-01-10
申请号：JP12452584
申请日：1984-06-19
Applicant: CANON KK
Inventor： SATOU TERUYA
Abstract: PURPOSE:To automate the positioning of the probe card by providing the probe card with a positioning mark, and providing a detecting means which detects an alignment at the wafer stage side of a prober. CONSTITUTION:A wafer stage 9 is moved under the probe card 1 in the X and Y directions, and then a photosensor 12 makes a scan on alignment marks 3a- 3c to detect an error of the probe card 1 based upon a desired positioning position. Then, a controller 13 sends a command to a pulse motor 8 with information on a rotational direction to rotate a rotary disk 6 and correct an error in the rotational direction of the rotary disk 6, thereby aligning a probe 2 accurately to the bonding pad of each pad in a wafer 11.
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公开(公告)号：JPS60168149A
公开(公告)日：1985-08-31
申请号：JP2289084
申请日：1984-02-13
Applicant: CANON KK
Inventor： SATOU TERUYA , YOMODA MINORU
IPC: H01L21/30 , G03F7/20 , G03F9/00 , G11B15/26 , H01L21/027
Abstract: PURPOSE:To offer a position matching signal processing device which can execute a position matching with high accuracy, by selecting a threshold which can be detected with high accuracy. CONSTITUTION:Outputs of the first and the second amplitude discriminating circuits 6, 7 connected to the first and the second amplifiers 3, 4 are connected to a controlling circuit provided with an operating part and a storage part, through a signal synthesizing circuit 8 for extracting selectively only a necessary signal component and synthesizing it. On the other hand, outputs of the first or the second amplifiers 3, 4, which have passed through a switch 5 are provided to an A/D conveter 12 through a low-pass filter 10 and a changeover switch 11, and also sent out to the controlling circuit 9. Also, outputs of the first or the second amplifiers 3, 4 further pass through a switch 13 and the transmitted to a peak holding circuit 14, and connected to the A/D converter 12 through the changeover switch 11. The controlling crcuit 9 stores and calculates a value obtained from the A/D converter 12 and the signal synthesizing circuit 8, also sends out a calculated threshold to the first and the second amplitude discriminating circuits 6, 7, and also transmits a switching instructing signal to the changeover switches 5, 11 and the switch 13.
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公开(公告)号：JPS60249072A
公开(公告)日：1985-12-09
申请号：JP10373984
申请日：1984-05-24
Applicant: CANON KK
Inventor： SATOU TERUYA
Abstract: PURPOSE:To improve measuring efficiency by providing an OR circuit which detects the defect of the other semiconductor element from the dissidence signal from plural comparators so that the plural elements to be measured can be simultaneously measured. CONSTITUTION:A pattern generator 2 applies test pattern data (a) to the elements 31-3n to be measured and applies expected value data (c) to a comparator 41 by the command from a controller 1. The elements 31-3n output data b1-bn and apply the same to the comparators 41-4n according to said data. Acceptance or reject data d1 is outputted from the comparator 41. The controller 1 discriminates the acceptance or reject of the element 31. The comparators 42-4n compare the output b1 from the element 31 and the output data b2-bn from the elements 32-3n in parallel with said operation and feed the dissidence signals d2-dn to the OR circuit in the stage of dissidence. The circuit 5 generates a signal (e) in accordance with one dissidence signal and transmits the signal to the controller 1.
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公开(公告)号：JPS56163411A
公开(公告)日：1981-12-16
申请号：JP6695180
申请日：1980-05-20
Applicant: CANON KK
Inventor： YOMODA MINORU , SATOU TERUYA
Abstract: PURPOSE:To provide multiple outputs of complex correlation by reading out data from ROM by the output of a joy stick lever. CONSTITUTION:Analog outputs X1 and Y1 of an X-axis potentiometer 2 and a Y- axis potentiometer 3 respectively are converted into digital signals 7 and 8 by AD converters 4 and 5 for addressing of ROM6 and cause the ROM6 to provide data X0 and Y0 which have previously been stored in the specified addresses.
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公开(公告)号：JPS5617424A
公开(公告)日：1981-02-19
申请号：JP9458279
申请日：1979-07-23
Applicant: CANON KK
Inventor： SHIMODA ISAMU , YOMODA MINORU , SATOU TERUYA
Abstract: PURPOSE:To prevent the number of data transfer lines from increasing not in proportion to the volume of data of a terminal, by providing a RAM memory between CPU and the terminal unit. CONSTITUTION:CPU performs data transfer with RAM, which provides time- division data transfer with a circuit in a time other than the access time of CPU. While CPU is not in input-output operation with RAM, selector 4 selects an artificial address signal from counter 2 and data from RAM are selected, thereby exercising data transfer. CPU attains access to output RAM5 on an interface without access direct to the terminal and, after storing RAM5 temporarily with data to be output, outputs them from RAM5. Then, data are output by making use of the latch function that RAM possesses, so that a decoder on an address line can be eliminated
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Patent Agency Ranking
公开(公告)号：JPS614970A
公开(公告)日：1986-01-10
申请号：JP12452784
申请日：1984-06-19
Applicant: CANON KK
Inventor： SATOU TERUYA
Abstract: PURPOSE:To perform optimum control over the contact load of a contacting means for measurement on a body to measured and take an invariably stable measurement by providing a means which detects the contact load. CONSTITUTION:A wafer stage 13 is moved horizontally to position an IC chip mounted on a wafer 3 under a probe stylus 2, and then a cam 11 is rotated by the rotation of a pulse motor 12 to elevate a wafer chuck 4. If an edge sense stylus 14 detects the wafer 3 in the middle of the elevation, the wafer chuck 4 is reduced in elevation speed and elevated while the increasing load, i.e. contact load on the wafer is detected by a load cell 10. Then, the low-speed elevation is stopped when the increasing load on the wafer attains to an optimum value in the middle of the low-speed elevation.
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公开(公告)号：JPS614969A
公开(公告)日：1986-01-10
申请号：JP12452684
申请日：1984-06-19
Applicant: CANON KK
Inventor： SATOU TERUYA
Abstract: PURPOSE:To polish a probe stylus effectively by allowing the probe stylus to abut on an abrasive part at different positions and thus preventing dust such as scraps of aluminum produced from the probe stylus from sticking on the probe stylus again. CONSTITUTION:A wafer stage 9 is moved in the X and Y directions during a test of a wafer 6 to position an IC chip mounted on the wafer 6 under the probe stylus 2 successively, and then a Z stage 8 is moved up and down to bring the probe stylus 2 into electric contact with the bonding pad of the IC chip. If the probe stylus needs to be polished during the test of the wafer, the wafer stage 9 is moved in the X and Y directions to position the abrasive plate 3 under the probe stylus 2, and the Z stage 8 is moved up and down at this position to allow the abrasive plate 3 to abut on the probe stylus 2 several times. In this case, the wafer stage 9 is moved finely in the X and Y directions every time the abrasive plate 3 to make a shift of the abutting position of the probe stylus 2 to the abrasive plate 3.
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公开(公告)号：JPS612081A
公开(公告)日：1986-01-08
申请号：JP12198784
申请日：1984-06-15
Applicant: CANON KK
Inventor： SATOU TERUYA
Abstract: PURPOSE:To shorten the detecting time of positional information of a wafer and to reduce the titled device in size by arranging plural sensor groups on the periphery of a probe card. CONSTITUTION:A wafer stage 8 holding a wafer 6 is moved to the lower part of an electrostatic capacity type sensor 52 at first, then moved in the X and Y directions to execute wafer edge sensing for the right half of the wafer 6. Then, the stage 8 is moved to the lower part of an electrostatic capacity type sensor 51 to execute wafer edge sensing for the left half of the wafer 6. Thus, the peripheral information of the wafer 6 is obtained, and the stage 8 is rotated to set up an orientation flat of the wafer 6 to a prescribed direction. Then, the wafer height sensing for the right and left halves of the wafer 6 is executed again by the sensors 52, 51. After completing rough positioning due to the external shape of the wafer 6, final alignment is executed by a TV camera 42 when the final alignment area is included in the right half of the wafer 6, or by a TV camera 41 when in the left half.
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公开(公告)号：JPS60249342A
公开(公告)日：1985-12-10
申请号：JP10374084
申请日：1984-05-24
Applicant: CANON KK
Inventor： SATOU TERUYA
Abstract: PURPOSE:To improve the reliability and durability of wafer probers by enabling electrical connection or separation of an edge sense needle and a sense circuit by a method wherein a detecting means is connected to the power source via transformer, and a controller which cuts off the voltage of the power source according to the variation of transformer current is provided. CONSTITUTION:Prior to the test of a wafer 1, an oscillator 9 makes oscillation at a required frequency. When the wafer 1 is moved to a required testing position in this state, the movable part 3 of an edge sense needle is separates off from the fixing part 4 of said needle by being pushed upward on an increase of the wafer 1 if the movable part 3 is located on the wafer 1. Observation of this situation from the side of the oscillator 9 shows an increase in the primary side current of the transformer 7 because of no flows of the secondary side current of the transformer 7. In other words, the state of connecting the edge sense movable part 3 to the fixing part 4 is detected by an ampere meter 8, and the result is transmitted to the controller 10; then, the oscillator 9 stops oscillation on its command. Accordingly, the wafer 1 comes out of effects of the sense circuit and is subjected to wafer test.
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公开(公告)号：JPS5980520A
公开(公告)日：1984-05-10
申请号：JP18968382
申请日：1982-10-27
Applicant: CANON KK
Inventor： SATOU TERUYA , SHIMODA ISAMU
Abstract: PURPOSE:To avoid contact of a fixed portion with a movable portion of a fluid bearing by switching a control system at the time of abnormality where pressure amounts to a fixed value exceeding the upper and lower limits to maintain safe pressure. CONSTITUTION:An air bearing 13 is moved in such a manner as to follow a preset pressure designating curve 31. If a pressure curve exceeds limit set values B, A as indicated by 32, an abnormal approach is caused. As the first safety mechanism, if the pressure curve exceeds the limit only a little as indicated by 32a, 32b, the air bearing is restored to follow the pressure designating curve 31 by a limit servo-amplifier. Where the pressure is very lower than the lower limit set value B, and is lowered to a pressure switch operating pressure value C, as the second safety mechanism, a control system power supply is restored to the off-state, or switched to a control system for maintaining a fixed safe pressure, so that as shown by a curve 33, during a trouble recovering time, the safe pressure can be maintained to avoid an abnormal approach. The reference character D indicates a pressure value for operating an approach switch.
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