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公开(公告)号：AU2002364218A1
公开(公告)日：2004-07-22
申请号：AU2002364218
申请日：2002-12-20
Applicant: IBM
Inventor： COHN JOHN M , HABITZ PETER A , LEIPOLD WILLIAM , WEMPLE IVAN , ZUCHOWSKI PAUL S , ALLEN ROBERT J
IPC: G06F9/45 , G06F13/00 , G06F17/50 , H01L21/321 , H01L23/48 , H01L23/52 , H01L23/528 , H01L23/535 , H01L27/02
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