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1.发明公开IC TILING PATTERN METHOD, IC SO FORMED AND ANALYSIS METHOD 审中-公开KACHELUNGSMUSTERVERFAHREN用于集成电路，这样成形集成电路和分析程序
公开(公告)号：EP1573808A4
公开(公告)日：2009-12-09
申请号：EP02799293
申请日：2002-12-20
Applicant: IBM
Inventor： ALLEN ROBERT J , COHN JOHN M , HABITZ PETER A , LEIPOLD WILLIAM , WEMPLE IVAN , ZUCHOWSKI PAUL S
IPC: H01L23/48 , G06F9/45 , G06F13/00 , G06F17/50 , H01L21/321 , H01L23/52 , H01L23/528 , H01L23/535 , H01L27/02
CPC classification number: G06F17/5068 , H01L21/3212 , H01L27/0207
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公开(公告)号：AU2002364218A1
公开(公告)日：2004-07-22
申请号：AU2002364218
申请日：2002-12-20
Applicant: IBM
Inventor： COHN JOHN M , HABITZ PETER A , LEIPOLD WILLIAM , WEMPLE IVAN , ZUCHOWSKI PAUL S , ALLEN ROBERT J
IPC: G06F9/45 , G06F13/00 , G06F17/50 , H01L21/321 , H01L23/48 , H01L23/52 , H01L23/528 , H01L23/535 , H01L27/02
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