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公开(公告)号：AT455370T
公开(公告)日：2010-01-15
申请号：AT04756373
申请日：2004-06-30
Applicant: IBM
Inventor： CHIDAMBARRAO DURESETI , DOKUMACI OMER H , GLUSCHENKOV OLEG G
IPC: H01L21/8238 , H01L21/311 , H01L21/76 , H01L21/82 , H01L21/84 , H01L27/12 , H01L29/10 , H01L29/24 , H01L29/808
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