公开(公告)号：DE69022864T2

公开(公告)日：1996-05-30

申请号：DE69022864

申请日：1990-01-15

Applicant: IBM

Inventor： HARAME DAVID L ,  PATTON GARY L ,  STORK JOHANNES M C

IPC: H01L29/73 ,  H01L21/331 ,  H01L21/82 ,  H01L21/8228 ,  H01L27/082 ,  H01L29/732 ,  H01L27/08

Abstract: A transistor structure including a complementary pair of vertical bipolar transistors on a common semiconductor substrate. A first epitaxial layer (12) of semiconductor material of a first conductivity type is formed on the surface of a semiconductor substrate (10) of a second conductivity type, and a sub-emitter region for one of said complementary transistors being formed in said first layer (12). A sub-collector region (14) of a second conductivity type for the other of said complementary transistors is formed in the first layer (12). A second epitaxial layer (16) of semiconductor material of said second conductivity type is formed on the surface of said first layer (12). A third epitaxial layer (18) of semiconductor material of said first conductivity type is formed on the surface of said second layer (16). Deep recessed isolation regions (30, 32, 34) extend from the surface of said third layer (18) into said substrate (10), said deep isolation regions surround each of said transistors. Intrinsic base and collector regions (54, 56) of said one transistor are formed in said second and third layers (16, 18) respectively and intrinsic collector and base regions (58, 60) of said other transistor are formed in said second and third layers (16, 18) respectively. Shallow recessed isolation regions (44, 46, 48, 50, 52) are formed in said second and third layers (16, 18) surrounding said intrinsic base and collector regions (54, 58). A pair of extrinsic base regions (76, 78) of said first conductivity type for said other transistor and an extrinsic collector region (72) of said first conductivity type for said one transistor are formed on the surface of said third layer (18). An emitter reach-through region (74) of said first conductivity type is formed in said second and third layers (16, 18). An extrinsic base region (92) of said second conductivity type for said one transistor overlies said collector region (56) of said first conductivity type. A sub-collector reach-through region (94) of said second conductivity type is formed in said second and third layers (16, 18), and an emitter region (96) of said second conductivity type for said other transistor is formed overlying said base region (60) of said first conductivity type.

公开(公告)号：DE69014359D1

公开(公告)日：1995-01-12

申请号：DE69014359

申请日：1990-02-03

Applicant: IBM

Inventor： HARAME DAVID L ,  MEYERSON BERNHARD S ,  STORK JOHANNES M C

IPC: H01L29/73 ,  H01L21/20 ,  H01L21/331 ,  H01L21/74 ,  H01L21/8222 ,  H01L21/8228 ,  H01L21/8238 ,  H01L21/8249 ,  H01L27/06 ,  H01L29/08 ,  H01L21/314 ,  H01L21/265 ,  H01L29/70