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公开(公告)号：CA890894A
公开(公告)日：1972-01-18
申请号：CA890894D
Applicant: IBM
Inventor： FRANCO JACK R , TOTTA PAUL A , WHITE JAMES F
IPC: C23F1/02 , H01L21/00 , H01L23/522 , H05K3/06
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公开(公告)号：CA841212A
公开(公告)日：1970-05-05
申请号：CA841212D
Applicant: IBM
Inventor： VANDERSEA JOHN E , TOTTA PAUL A , HERDZIK RICHARD J , LEFF JERRY , SOPHER RAEMAN P , SHEPHEARD ROBERT G
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