公开(公告)号：DE10255652B4

公开(公告)日：2005-07-14

申请号：DE10255652

申请日：2002-11-28

Applicant: INFINEON TECHNOLOGIES AG

Inventor： GEYER STEFAN

IPC: B24B37/00 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  B24D7/18 ,  B24D13/14 ,  C08K3/22 ,  C08K3/34 ,  C08L101/00 ,  H01L21/304 ,  B24D13/00 ,  B24B37/04

Abstract: The grinding pad (8) for wet-chemical grinding of a substrate surface comprises a polymer matrix consisting of polymers with repetition units and incorporating embedded abrasive particles (9). The water solubility of the polymer matrix lies between 0.03 and 3 g/liter. An Independent claim is also included for a method for wet-chemical grinding of a substrate surface with use of the proposed grinding pad.

公开(公告)号：DE10321278A1

公开(公告)日：2004-12-30

申请号：DE10321278

申请日：2003-05-13

Applicant: INFINEON TECHNOLOGIES AG

Inventor： GEYER STEFAN

IPC: A47G1/12 ,  B44F1/00 ,  C09J1/00 ,  G03B27/62 ,  G03F1/64 ,  G03F9/00 ,  G03F1/14

Abstract: An illuminating mask for structuring a photo-lacquer on a substrate disc comprises a frame (5) with a pellicle (4) spaced from the lithographic structured (3) reticle (2). Frame and pellicle are bonded by an inorganic adhesive holding material (6). Independent claims are also included for the following: (a) a production process for the mask;and (b) a production process for the inorganic adhesive.

公开(公告)号：DE19755131C2

公开(公告)日：2002-10-31

申请号：DE19755131

申请日：1997-12-11

Applicant: INFINEON TECHNOLOGIES AG

Inventor： GEYER STEFAN ,  HORN MICHAEL

IPC: G03F7/32

公开(公告)号：DE10020133A1

公开(公告)日：2001-10-25

申请号：DE10020133

申请日：2000-04-14

Applicant: INFINEON TECHNOLOGIES AG

Inventor： FISCHER ANDREAS ,  GEYER STEFAN

IPC: G01N30/00 ,  B01D43/00

Abstract: An apparatus for fractionating particles in a liquid comprises a separating channel (30) through which a liquid stream containing particles flows. The surfaces (47) of the channel facing the liquid stream are covered with a hydrophobic layer (15). Preferred Features: The hydrophobic layer has a thickness of approximately 50 microns m. The separating channel is limited by two metal blocks (5) spaced using a foil (20). The metal blocks are made from copper.