30.
    发明专利
    未知

    公开(公告)号:DE59711273D1

    公开(公告)日:2004-03-11

    申请号:DE59711273

    申请日:1997-08-05

    Inventor: TIHANYI JENOE

    Abstract: A field effect-controllable vertical semiconductor device consists of a semiconductor body having first conductivity type source (3, 3') and drain (2, 8) zones, a gate electrode (4) insulated from the semiconductor body (1) by a gate oxide (14), and a first conductivity type bulk region (10). The novelty is that the source connection (S) is located on the wafer back face (12) and preferably fixed on a copper heat sink (9), while the drain and gate connections (D, G) are located on the wafer front face (11). Also claimed is a process for producing the above device by (i) depositing the various interior zone (5) epitaxial layers on the bulk region (10) of a semiconductor body (1); (ii) epitaxially depositing the source/drain zones (2, 3) on the interior zone (5); (iii) structuring the wafer front face (11) and ion implanting the heavily doped source region (3'); (iv) re-structuring the wafer front face (11) and anisotropically etching the inter-cell zones (6); (v) using the etching mask for ion implantation of the channel zones (7); (vi) using the etching mask for thermally applying a thin SiO2 layer as gate oxide (14) on the trench walls of the inter-cell zones (6), filling the inter-cell zones (6) with polysilicon as gate material, etching away excess polysilicon from the inter-cell zones (6) and filling the inter-cell zones (6) with SiO2; (vii) re-structuring the wafer front face (11) and anisotropically etching trenches (13) in the region of the source zones (3, 3') down to the depth of the bulk zone (10); (viii) applying a thin oxide onto the walls of these further trenches (13) and filling with conductive material; (ix) metallising the entire wafer back face (12) to form the source connection (S); metallising the wafer front face (11) at corresponding contacts to form the drain and gate connections (D, G) isolated from one another by an intermediate oxide (15); and (x) conductively fixing the source connection (S) to the heat sink (9) by a solder.

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