Apparatus and method for extreme ultraviolet spectrometer calibration
    21.
    发明授权
    Apparatus and method for extreme ultraviolet spectrometer calibration 有权
    用于极紫外光谱仪校准的仪器和方法

    公开(公告)号:US09188485B1

    公开(公告)日:2015-11-17

    申请号:US14490948

    申请日:2014-09-19

    CPC classification number: G01J3/0297 G01J3/10 G01J3/28 G01J3/2803 G01J2003/282

    Abstract: Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.

    Abstract translation: 本文公开了用于极紫外(EUV)分光仪校准的装置和方法。 用于EUV分光仪校准的装置包括EUV生成模块,Al滤光片,衍射光栅,CCD照相机,光谱转换模块和控制模块,该模块将与频谱峰值中的最大峰值对应的波长值与 根据高次谐波的顺序,从频谱转换模块转换成具有预定参考波长值的EUV光的顺序,以计算具有最接近参考波长值的差值,并根据EUV的顺序来控制光谱 从光谱转换模块转换为沿波长轴方向移动计算出的差值的光。 因此,可以精确地测量在EUV曝光技术和掩模检查技术中使用的EUV光的光谱的波长。

    DEVICE FOR EXTRACTING DEPTH INFORMATION USING INFRARED LIGHT AND METHOD THEREOF
    28.
    发明申请
    DEVICE FOR EXTRACTING DEPTH INFORMATION USING INFRARED LIGHT AND METHOD THEREOF 审中-公开
    使用红外光提取深度信息的设备及其方法

    公开(公告)号:US20140361175A1

    公开(公告)日:2014-12-11

    申请号:US14067028

    申请日:2013-10-30

    Abstract: Disclosed is a device for extracting depth information using infrared light which can be provided at low cost in such a way to apply a nonlinear crystal and a photonic crystal to a depth camera and comprises infrared light emission unit which emits a first infrared light toward a subject; a wavelength conversion unit which concerts the first infrared light reflected from the subject into a second infrared light having a wavelength shorter than the wavelength of the first infrared light; and depth information extraction unit which detects the converted second infrared light and extracts depth information of the subject, wherein the wavelength conversion unit is formed of a crystal capable of concerting the length of the wavelength. The wavelength conversion unit is formed of a crystal which is capable of converting the length of wavelength.

    Abstract translation: 公开了一种使用红外光提取深度信息的装置,其可以以低成本提供以将非线性晶体和光子晶体应用于深度相机的方式提供,并且包括向被摄体发射第一红外光的红外光发射单元 ; 波长转换单元,其将从被摄体反射的第一红外光共振成具有比第一红外光的波长短的波长的第二红外光; 以及深度信息提取单元,其检测所转换的第二红外光并提取被摄体的深度信息,其中所述波长转换单元由能够协调所述波长长度​​的晶体形成。 波长转换单元由能够转换波长长度的晶体形成。

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