Abstract:
Es werden Systeme und Verfahren zum Übertragen einer Mikrovorrichtung von einem Trägersubstrat offenbart. In einer Ausführungsform weist eine Mikroaufnahmegruppierungshalterung eine Schwenkplattform auf, um einer Mikroaufnahmegruppierung eine automatische Ausrichtung mit einem Trägersubstrat zu ermöglichen. Ablenkung der Schwenkplattform kann erkannt werden, um weitere Bewegung der Mikroaufnahmegruppierung zu steuern.
Abstract:
A micro device transfer head and head array are disclosed. In an embodiment the micro device transfer head includes a base substrate a mesa structure with sidewalls an electrode formed over the mesa structure and a dielectric layer covering the electrode. A voltage can be applied to the micro device transfer head and head array to pick up a micro device from a carrier substrate and release the micro device onto a receiving substrate.
Abstract:
A micro light emitting diode (LED) and a method of forming an array of micro LEDs for transfer to a receiving substrate are described. The micro LED structure may include a micro p-n diode and a metallization layer, with the metallization layer between the micro p-n diode and a bonding layer. A conformal dielectric barrier layer may span sidewalls of the micro p-n diode. The micro LED structure and micro LED array may be picked up and transferred to a receiving substrate.
Abstract:
A method of fabricating and transferring a micro device and an array of micro devices to a receiving substrate are described. In an embodiment, an electrically insulating layer is utilized as an etch stop layer during etching of a p-n diode layer to form a plurality of micro p-n diodes. In an embodiment, an electrically conductive intermediate bonding layer is utilized during the formation and transfer of the micro devices to the receiving substrate.