Abstract:
A method of fabricating and transferring a micro device and an array of micro devices to a receiving substrate are described. In an embodiment, a patterned sacrificial layer is utilized to form a self-aligned metallization stack and is utilized as an etch stop layer during etching of a p-n diode layer to form a plurality of micro p-n diodes.
Abstract:
Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.
Abstract:
A micro light emitting diode (LED) and a method of forming an array of micro LEDs for transfer to a receiving substrate are described. The micro LED structure may include a micro p-n diode and a metallization layer, with the metallization layer between the micro p-n diode and a bonding layer. A conformal dielectric barrier layer may span sidewalls of the micro p-n diode. The micro LED structure and micro LED array may be picked up and transferred to a receiving substrate.
Abstract:
A display module (201) and system applications including a display module are described. The display module may include a display substrate (202) including a front surface (203), a back surface (205), and a display area (201) on the front surface. A plurality of interconnects (204, 206) extend through the display substrate from the front surface to the back surface. An array (214) of light emitting diodes (LEDs) are in the display area and electrically connected with the plurality of interconnects, and one or more driver circuits (230, 234) are on the back surface of the display substrate. Exemplary system applications include wearable, rollable, and foldable displays.
Abstract:
Se describe un método para fabricar y transferir un microdispositivo y un arreglo de microdispositivos a un sustrato receptor. En una modalidad, una capa eléctricamente aislante se utiliza como capa de detención de grabado durante el grabado al ácido de una capa de diodos p-n para formar una pluralidad de microdiodos p-n. En una modalidad, una capa de enlace intermedia eléctricamente conductora se utiliza durante la formación y transferencia de los microdispositivos al sustrato receptor.
Abstract:
A method of fabricating and transferring a micro device and an array of micro devices to a receiving substrate are described. In an embodiment an electrically insulating layer is utilized as an etch stop layer during etching of a p n diode layer to form a plurality of micro p n diodes. In an embodiment an electrically conductive intermediate bonding layer is utilized during the formation and transfer of the micro devices to the receiving substrate.
Abstract:
Es werden Systeme und Verfahren zum Transfer einer Mikrovorrichtung von einem Trägersubstrat offenbart. In einer Ausführungsform enthält ein Massentransferinstrument eine Gelenk-Transferkopf-Einheit, einen Trägersubstrathalter und eine Stellgerät-Einheit, um ein räumliches Verhältnis zwischen einer Gelenk-Transferkopf-Einheit und dem Trägersubstrathalter anzupassen. Die Gelenk-Transferkopf-Einheit kann eine Verbindung zu einer elektrostatischen Spannungsquelle und ein Substrat, das ein Array von elektrostatischen Transferköpfen trägt, enthalten.
Abstract:
A display module (201) and system applications including a display module are described. The display module may include a display substrate (202) including a front surface (203), a back surface (205), and a display area (201) on the front surface. A plurality of interconnects (204, 206) extend through the display substrate from the front surface to the back surface. An array (214) of light emitting diodes (LEDs) are in the display area and electrically connected with the plurality of interconnects, and one or more driver circuits (230, 234) are on the back surface of the display substrate. Exemplary system applications include wearable, rollable, and foldable displays.