公开(公告)号：EP3109894A4

公开(公告)日：2017-11-08

申请号：EP15752589

申请日：2015-02-17

Applicant: NGK INSULATORS LTD

Inventor： IDE AKIYOSHI ,  TAKAGAKI TATSURO ,  MIYAZAWA SUGIO ,  IWASAKI YASUNORI

IPC: H01L21/02 ,  H01L21/20 ,  H01L21/3105 ,  H01L21/321 ,  H01L21/762 ,  H01L21/86 ,  H01L27/12

CPC classification number: H01L21/86 ,  H01L21/2007 ,  H01L21/31053 ,  H01L21/32105 ,  H01L21/76251 ,  H01L21/76256 ,  H01L27/1203

公开(公告)号：EP3113211A4

公开(公告)日：2017-10-11

申请号：EP15754804

申请日：2015-01-13

Applicant: NGK INSULATORS LTD

Inventor： MIYAZAWA SUGIO ,  IWASAKI YASUNORI ,  TAKAGAKI TATSURO ,  IDE AKIYOSHI ,  NAKANISHI HIROKAZU

IPC: H01L21/02 ,  C04B35/115 ,  C04B37/02

CPC classification number: C04B35/115 ,  C01F7/02 ,  C04B35/62675 ,  C04B35/6268 ,  C04B35/645 ,  C04B37/00 ,  C04B37/005 ,  C04B2235/3206 ,  C04B2235/3225 ,  C04B2235/3244 ,  C04B2235/5436 ,  C04B2235/549 ,  C04B2235/72 ,  C04B2235/963 ,  C04B2237/062 ,  C04B2237/30 ,  C04B2237/343 ,  C04B2237/708 ,  H01L21/2007

公开(公告)号：EP2930751A4

公开(公告)日：2016-09-14

申请号：EP14774099

申请日：2014-03-26

Applicant: NGK INSULATORS LTD

Inventor： IDE AKIYOSHI ,  IWASAKI YASUNORI ,  MIYAZAWA SUGIO

IPC: H01L21/02 ,  C04B37/00 ,  H01L21/18

CPC classification number: H01L21/76251 ,  B23K20/00 ,  C04B35/111 ,  C04B35/115 ,  C04B35/565 ,  C04B35/581 ,  C04B35/587 ,  C04B37/001 ,  C04B37/005 ,  C04B2235/3206 ,  C04B2235/3225 ,  C04B2235/3244 ,  C04B2235/5409 ,  C04B2235/5445 ,  C04B2235/6562 ,  C04B2235/6582 ,  C04B2235/661 ,  C04B2235/662 ,  C04B2235/72 ,  C04B2235/725 ,  C04B2235/963 ,  C04B2237/062 ,  C04B2237/064 ,  C04B2237/343 ,  C04B2237/365 ,  C04B2237/366 ,  C04B2237/368 ,  C04B2237/52 ,  C04B2237/708 ,  H01L21/02002 ,  H01L21/0243 ,  H01L21/187 ,  H01L21/2007 ,  H01L21/76254 ,  Y10T428/24355

Abstract: A composite substrate for a semiconductor includes a handle substrate 11 and a donor substrate bonded to a surface of the handle substrate 11 directly or through a bonding layer. The handle substrate 11 is composed of an insulating polycrystalline material, a surface 15 of the handle substrate 11 has a microscopic central line average surface roughness Ra of 5 nm or smaller, and recesses 6 are formed on the surface of the handle substrate.

公开(公告)号：EP1795930A4

公开(公告)日：2010-07-07

申请号：EP05788209

申请日：2005-09-29

Applicant: NGK INSULATORS LTD

Inventor： IDE AKIYOSHI ,  IWASAKI YASUNORI ,  FUKUYAMA MASASHI

IPC: G02B6/42 ,  G02B6/293 ,  H01L31/0232 ,  H01S5/022

CPC classification number: G02B6/4246 ,  G02B6/29368 ,  G02B6/29382 ,  G02B6/4214 ,  H01L2224/48091 ,  H01S5/02212 ,  H01S5/02248 ,  H01L2924/00014

公开(公告)号：EP1574887A4

公开(公告)日：2006-05-31

申请号：EP03782849

申请日：2003-12-19

Applicant: NGK INSULATORS LTD

Inventor： FUKUYAMA MASASHI ,  IWASAKI YASUNORI ,  IDE AKIYOSHI

IPC: G02B6/42

CPC classification number: G02B6/4214 ,  G02B6/4206 ,  G02B6/4212

Abstract: An optical device, wherein when the multi-layer film (56) side surface of a filter member (20) is defined as a first surface (70) and the quartz substrate (54) side surface thereof is defined as a second surface (72), and the inner wall surface of a slit (18) opposed to the first surface (70) of the filter member (20) is defined as a first inner wall surface (74) and the inner wall surface thereof opposed to the second surface (72) of the filter member (20) is defined as a second inner wall surface (76), one or more of the first inner wall surface (74) and the second inner wall surface (76) of the slit (18) and the second surface (72) of the filter member (20) are positioned non-parallel with the first surface (70) of the filter member (20).

Abstract translation: 一种光学器件，其中当过滤器部件（20）的多层膜（56）侧表面被定义为第一表面（70）并且其石英衬底（54）侧表面被定义为第二表面（72）时， ），并且与过滤构件（20）的第一表面（70）相对的狭缝（18）的内壁表面被定义为第一内壁表面（74），并且其内壁表面与第二表面 （20）的第一内壁表面（74）和第二内壁表面（76）中的一个或多个被限定为第二内壁表面（76），并且所述过滤构件 过滤构件20的第二表面72与过滤构件20的第一表面70不平行地定位。