公开(公告)号：JPH0974734A

公开(公告)日：1997-03-18

申请号：JP23170895

申请日：1995-09-08

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： SUGIMINE MASANOBU ,  KOBARIKAWA YASUSHI ,  TOMITA YOSHIYUKI ,  MAKINO KENICHI

IPC: H02P25/06 ,  H02K41/03 ,  H02P7/00

Abstract: PROBLEM TO BE SOLVED: To make it possible to achieve high-speed movement and accurate positioning by providing a linear motor, which develops the symmetrical driving forces at both sides of a virtual plane in parallel with a movable plane and applies the forces on a stage member. SOLUTION: In an XY stage apparatus, a linear motor 30 is arranged in a square shape so that a movable stage 20 surrounds a moving movable region. Furthermore, a coil 32A is constituted so as to include the upper current path in the direction of an X axis arranged at the gap between the magnet line comprising permanent magnets 33Aa-33Ae and a center yoke and the lower current path in the direction of the X axis arranged at the gap between the magnet line comprising permanent magnets 33Af-33Aj and the center yoke. Then, on the upper surface of a base 10, a position sensor 13 is arranged at the movable region of the movable stage 20. The position of a position detecting point fixed at the lower surface of the movable stage 20 is detected, and the position signal is outputted. A control means 40 receives the signal and controls linear motor 30, based on the position signal. As a result, the movable stage can be driven at a high speed, and the accurate positioning can be performed.

公开(公告)号：JPH0833995A

公开(公告)日：1996-02-06

申请号：JP16943994

申请日：1994-07-21

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： TOMITA YOSHIYUKI ,  KOBARIKAWA YASUSHI

IPC: B23K26/064 ,  B23K26/08 ,  B23K26/06

Abstract: PURPOSE:To provide a laser beam machine capable of freely driving a nozzle section for casting a laser beam without hindrance by a laser introducing path. CONSTITUTION:A laser casting section 100 is composed of the nozzle section 30, a first rotational driving mechanism 10 which is mounted at a moving frame 64 and rotationally drives the nozzle section around a first shaft extending in a vertical direction, a connecting mechanism 40 which is connected rotatably together with this first rotational driving mechanism and a second rotational driving mechanism 20 which is mounted at this connecting mechanism and rotationally drives the nozzle section around a second shaft intersecting at a sharp angle with the first shaft. The nozzle section is connected to an optical fiber cable 67 for introduction of the laser beam and is mounted at the second rotational driving mechanism so as to be made rotatable around the first shaft and the second shaft. The connecting mechanism is composed freely displaceably by plural spring means arranged apart spaced intervals in a circumferential direction around the first shaft.