公开(公告)号：JP2002104656A

公开(公告)日：2002-04-10

申请号：JP2000299584

申请日：2000-09-29

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： MAKINO KENICHI ,  TOMITA YOSHIYUKI

IPC: B65G54/02 ,  B65G49/06 ,  B65G49/07 ,  H01L21/677 ,  H01L21/68 ,  H02K41/02 ,  H02N15/00

Abstract: PROBLEM TO BE SOLVED: To remarkably improve positioning precision by devising structurally and to reduce a power consumption related thereto and decrease a manufacturing cost. SOLUTION: In a magnetic levitation moving device 100, at least one of an upper or a lower electromagnet 18 or 120 is situated at the apex of a first virtual triangle 140 consisting of a first apex 141 positioned at one with an arbitrary virtual reference straight line on a table 114 positioned therebetween, and second and third apexes 142 and 143 positioned at the other. A gap 122 between a rail 112 and a table 114 is ensured. With the virtual reference straight line forming a boundary therebetween, a sensor 123 is situated corresponding to the respective apexes of a second virtual triangle 145 consisting of an A apex and a B apex on the same side as the first apex 141 and positioned with the first apex 141 nipped therebetween, and a C apex positioned on the same side as those of the second and third apexes 142 and 143 and between the second and third apexes 142 and 143.

公开(公告)号：JP2002043123A

公开(公告)日：2002-02-08

申请号：JP2000226943

申请日：2000-07-27

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： MORITA HIROSHI ,  MAKINO KENICHI

IPC: H01F7/16

Abstract: PROBLEM TO BE SOLVED: To make the area of an electromagnetic actuator, in which the current of the actuator becomes about zero making it actively utilizable by improving the control characteristic of the actuator, when the current becomes about zero. SOLUTION: This electromagnetic actuator 101 is provided with first and second electromagnets 102 and 104, which are arranged to face each other with a fixed gap S in between and a displacement body 106 arranged in the gap S. In the actuator 101, permanent magnets 130 are installed to the electromagnets 102 and 104, respectively, to generate bias magnetic fields B1 and B2 superimposed upon magnetic fields G1 and G2. The attractive forces of the electromagnets 102 and 104 are almost made linear in shape in the region, where the current of a conductor 110 becomes about zero and the displacement body 106 is relatively positioned by utilizing the area.

公开(公告)号：JP2001341037A

公开(公告)日：2001-12-11

申请号：JP2000165522

申请日：2000-06-02

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： MAKINO KENICHI ,  TOMITA YOSHIYUKI ,  NAKAMORI YASUHITO

IPC: G12B5/00 ,  B23Q1/00 ,  B23Q1/25 ,  B23Q1/44 ,  B23Q1/62

Abstract: PROBLEM TO BE SOLVED: To accurately control at a high speed and high accuracy the positioning of a moving table in the X direction, Y direction, and, θ z direction. SOLUTION: In this X-Y stage device 15 provided with the moving table 2 movable in an X-Y plane and capable of positioning a member placed on the moving table 2 within the X-Y plane, a predetermined gap in the Z direction is provided with respect to the moving table 2 for arranging a fixed base 1, and at least three strut members in the Z direction are provided in this gap in the Z direction. Y direction driving linear motors 3 and 5 capable of relatively moving the moving table 2 in the Y direction and at least two X direction driving linear motors 7 and 9 with mutually different Y direction positions are arranged in the fixed base 1 and the moving table 2 for propelling them by the X direction driving linear motors 7 and 9 so that relative displacements in the X direction are mutually different to rotate the moving table 2 using the Z direction as a base axis.

公开(公告)号：JP2002272175A

公开(公告)日：2002-09-20

申请号：JP2001064813

申请日：2001-03-08

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： MAKINO KENICHI

IPC: H02P6/16 ,  H02P6/20 ,  H02P7/00 ,  H02P21/00 ,  H02P21/22 ,  H02P21/34 ,  H02P23/16 ,  H02P25/022 ,  H02P25/026 ,  H02P25/06 ,  H02P25/064 ,  H02P27/04

Abstract: PROBLEM TO BE SOLVED: To provide an initial phase detection system and its method for accurately detecting an initial magnetic pole position in a synchronous motor. SOLUTION: In the initial phase detection method, while current flowing along either axis of control coordinates is set to zero, current is allowed to flow along the other axis, and the phase difference between control and rotational coordinates is corrected from the traveling state of the synchronous motor, by supplying a current when adjusting an initial phase in the rotational coordinates of the synchronous motor that is regulated by the rotational coordinates which have axes that orthogonally cross each other, and control coordinates, when controlling the synchronous motor.

公开(公告)号：JPH0974734A

公开(公告)日：1997-03-18

申请号：JP23170895

申请日：1995-09-08

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： SUGIMINE MASANOBU ,  KOBARIKAWA YASUSHI ,  TOMITA YOSHIYUKI ,  MAKINO KENICHI

IPC: H02P25/06 ,  H02K41/03 ,  H02P7/00

Abstract: PROBLEM TO BE SOLVED: To make it possible to achieve high-speed movement and accurate positioning by providing a linear motor, which develops the symmetrical driving forces at both sides of a virtual plane in parallel with a movable plane and applies the forces on a stage member. SOLUTION: In an XY stage apparatus, a linear motor 30 is arranged in a square shape so that a movable stage 20 surrounds a moving movable region. Furthermore, a coil 32A is constituted so as to include the upper current path in the direction of an X axis arranged at the gap between the magnet line comprising permanent magnets 33Aa-33Ae and a center yoke and the lower current path in the direction of the X axis arranged at the gap between the magnet line comprising permanent magnets 33Af-33Aj and the center yoke. Then, on the upper surface of a base 10, a position sensor 13 is arranged at the movable region of the movable stage 20. The position of a position detecting point fixed at the lower surface of the movable stage 20 is detected, and the position signal is outputted. A control means 40 receives the signal and controls linear motor 30, based on the position signal. As a result, the movable stage can be driven at a high speed, and the accurate positioning can be performed.

公开(公告)号：JPH0810977A

公开(公告)日：1996-01-16

申请号：JP14776494

申请日：1994-06-29

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： TOMITA YOSHIYUKI ,  SEKINE HIDETAKA ,  MAKINO KENICHI

IPC: B23K26/08 ,  B23K26/046 ,  B23K26/04

Abstract: PURPOSE:To provide a auto-focusing device which enables fine correction of the positional error in the direction of an optical axis that has effect on the focal position of a laser beam. CONSTITUTION:A robot wrist 12 is attached with a base member 13 that is provided with a shape enclosing the wrist at least from three directions, and the base member is connected vertically movably to an outgoing optical system 20 through a link driving mechanism 14. The link driving mechanism 14 contains a controller which performs fine adjustment of a position in the vertical direction of the outgoing optical system by means of the detection signal of a height sensor provided in the tip end of the outgoing optical system. Thus, the load on the robot is reduced.

公开(公告)号：JP2003167082A

公开(公告)日：2003-06-13

申请号：JP2001367499

申请日：2001-11-30

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： MORITA HIROSHI ,  MAKINO KENICHI ,  TOMITA YOSHIYUKI

IPC: G12B5/00 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To provide a stage apparatus having a driving device for moving a first table on which a moved body is mounted in Z-direction (vertical direction), capable of performing high-speed and high-accuracy positioning processing. SOLUTION: This stage apparatus includes a work table 33 for mounting a wafer W, a voice coil motor 45 for moving the work table 33 in the Z- direction, an X-table 40 loaded with the voice coil motor 45, an X-Y direction driving device 35 for moving the X-table in the X-Y directions, a shock absorber 50A disposed between the work table 33 and the X-table 40, and a shock absorber 50B disposed between the voice coil motor 45 and the X-table 40. The force generated by the voice coil motor 45 is inhibited from being applied to the X-table 40 by the shock absorbing operation of the shock absorbers 50A, 50B. COPYRIGHT: (C)2003,JPO

公开(公告)号：JPH0847785A

公开(公告)日：1996-02-20

申请号：JP18328294

申请日：1994-08-04

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： MAKINO KENICHI ,  SEKINE HIDETAKA

IPC: G02B7/28 ,  B23K26/00 ,  B23K26/046 ,  B23K26/08 ,  B23K26/04

Abstract: PURPOSE:To provide the auto focus system for laser beam machine to suppress mechanical resonance between an auto focus system and articulated robot and to have high response for change of attitude of an articulated robot. CONSTITUTION:In the laser beam machine provided with an auto focus control system to adjust the position of a beam emitting optical system in the optical axis direction, the auto focus control system is provided with a position controller 41, which executes motor control based on Hinfinity control rule while using a height detected value/height command value of a height sensor 62 placed at the nozzle tip of beam emitting optical system and a speed/rotating position of motor 65 for adjusting the position of the optical axis of laser beam for the input.

公开(公告)号：JP2001022448A

公开(公告)日：2001-01-26

申请号：JP18933699

申请日：1999-07-02

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： MAKINO KENICHI ,  TOMITA YOSHIYUKI ,  MORI HIDEHIKO

IPC: G05B13/02 ,  B23Q1/00 ,  B23Q1/30 ,  B23Q1/58 ,  B23Q1/62 ,  G05B11/32 ,  G05B11/36 ,  G05B19/19 ,  G05D3/12 ,  G12B5/00

Abstract: PROBLEM TO BE SOLVED: To provide a stage position control method which is suitable for a positioning stage mechanism and can improve positioning precision and constant speed property. SOLUTION: A Y1 linear motor 71 and a Y2 linear motor 72 which can independently be controlled can translate and drive a Y stage 63 in the direction of a Y-axis. A Y1 linear encoder 76 and a Y2 linear encoder 77 detect the shift quantity of the Y stage and it is fed back to a Y control system 20 and a θ control system 30. The Y control system outputs a translation thrust command value by receiving the average value of respective position detection values measured by the Y1 linear encoder and the Y2 linear encoder as the position feedback value of' a stage translation direction. The θcontrol system receives the difference of the respective position detection values as the position feedback value of a stage yawing direction and outputs a yawing direction thrust command value. A non-interference block 40 outputs a Y1 linear motor thrust command value and a Y2 linear motor thrust command value from the parallel thrust command value and the yawing direction thrust command value. Thus, the motion of the Y stage is separated into translation direction motion and yawing direction motion and they are independently controlled/compensated.

公开(公告)号：JP2000330642A

公开(公告)日：2000-11-30

申请号：JP14000299

申请日：1999-05-20

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： MAKINO KENICHI ,  YAMAMOTO MASAYUKI ,  TOMITA YOSHIYUKI

IPC: G05B13/02 ,  G05B11/32 ,  G05D3/12

Abstract: PROBLEM TO BE SOLVED: To provide a position controller improved in a constancy of speed and in positioning time performance by estimating and compensating the disturbance of a device without changing the hardware constitution of a device. SOLUTION: A position controller includes a PID controller 33 which generates a current target value ic for a motor M from a difference between a position detection value x and a position command value xc and a disturbance observer 10. The disturbance observer is provided with a signal processing means which executes high speed arithmetic operation by a program. A signal processing means is provided with a low pass filter 11 which filters a torque command value to a motor driver 34, an input torque estimating filter 12 which estimates an estimated load input torque from a position detection value, and a function which calculates an estimated load disturbance torque from a difference between the filtered torque command value and the estimated load input torque, and which generates a compensation value for the current target value so that the disturbance torque can be offset based on the calculated estimated load disturbance torque.