METHODS AND DEVICES FOR FABRICATING THREE-DIMENSIONAL NANOSCALE STRUCTURES
    25.
    发明公开
    METHODS AND DEVICES FOR FABRICATING THREE-DIMENSIONAL NANOSCALE STRUCTURES 有权
    VERFAHREN UND EINRICHTUNGEN ZUR HERSTELLUNG DREIDIMENSIONALER STRUKTUREN AUF NANOMASSSTAB

    公开(公告)号:EP1700161A4

    公开(公告)日:2010-12-01

    申请号:EP04812651

    申请日:2004-12-01

    Applicant: UNIV ILLINOIS

    Abstract: The present invention provides methods and devices for fabricating 3D structures and patterns of 3D structures on substrate surfaces, including symmetrical and asymmetrical patterns of 3D structures. Methods of the present invention provide a means of fabricating 3D structures having accurately selected physical dimensions, including lateral and vertical dimensions ranging from 10s of nanometers to 1000s of nanometers. In one aspect, methods are provided using a mask element comprising a conformable, elastomeric phase mask capable of establishing conformal contact with a radiation sensitive material undergoing photoprocessing. In another aspect, the temporal and/or spatial coherence of electromagnetic radiation using for photoprocessing is selected to fabricate complex structures having nanoscale features that do not extend entirely through the thickness of the structure fabricated.

    Abstract translation: 本发明提供了用于在衬底表面上制造3D结构的3D结构和图案的方法和装置,包括3D结构的对称和非对称图案。 本发明的方法提供了一种制造具有精确选择的物理尺寸的3D结构的方法,其包括范围从10纳米到1000纳米的横向和垂直尺寸。 在一个方面,提供了使用掩模元件的方法,所述掩模元件包括能够与正在进行光刻处理的辐射敏感材料建立保形接触的适形弹性相位掩模。 在另一方面,选择用于光处理的电磁辐射的时间和/或空间相干性以制造具有纳米尺度特征的复杂结构,其不完全延伸通过制造的结构的厚度。

    SELF-SIMILAR AND FRACTAL DESIGN FOR STRETCHABLE ELECTRONICS
    27.
    发明公开
    SELF-SIMILAR AND FRACTAL DESIGN FOR STRETCHABLE ELECTRONICS 有权
    SELBSTÄHNLICHESUND FRAKTALES DESIGNFÜRDEHNBARE ELEKTRONIK

    公开(公告)号:EP2954551A4

    公开(公告)日:2017-05-10

    申请号:EP14748754

    申请日:2014-02-05

    Abstract: The present invention provides electronic systems, including device arrays, comprising functional device(s) and/or device component(s) at least partially enclosed via one or more containment chambers, such that the device(s) and/or device component(s) are at least partially, and optionally entirely, immersed in a containment fluid. Useful containment fluids for use in containment chambers of electronic devices of the invention include lubricants, electrolytes and/or electronically resistive fluids. In some embodiments, for example, electronic systems of the invention comprise one or more electronic devices and/or device components provided in free-standing and/or tethered configurations that decouple forces originating upon deformation, stretching or compression of a supporting substrate from the free standing or tethered device or device component.

    Abstract translation: 本发明提供了包括装置阵列的电子系统,其包括经由一个或多个容纳室至少部分地封闭的功能装置和/或装置部件,使得装置和/或装置部件(一个或多个) )至少部分地并且可选地完全浸没在密闭流体中。 用于本发明的电子设备的密闭室的有用的密封流体包括润滑剂,电解质和/或电子电阻流体。 在一些实施例中,例如,本发明的电子系统包括一个或多个电子设备和/或以独立和/或栓系配置提供的设备组件,其解除由于支撑衬底从自由状态变形,拉伸或压缩而产生的力 站立或系留设备或设备组件。

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