SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    25.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 有权
    基板处理装置和基板处理方法

    公开(公告)号:US20140363587A1

    公开(公告)日:2014-12-11

    申请号:US14366231

    申请日:2012-12-21

    Abstract: Disclosed is a substrate processing apparatus and method which facilitate to improve uniformity of thin film material and also facilitate to control quality of thin film by the use of plasma forming space and source gas distributing space separately provided from each other, wherein the substrate processing apparatus includes a process chamber; a substrate support for supporting a plurality of substrates, the substrate support rotatably provided inside the process chamber; and a electrode unit arranged above the substrate support and provided with the plasma forming space and the source gas distributing space, wherein the plasma forming space is spatially separated from the source gas distributing space.

    Abstract translation: 公开了一种有利于提高薄膜材料的均匀性的基板处理装置和方法,并且还通过使用彼此分开设置的等离子体形成空间和源气体分配空间来有助于控制薄膜的质量,其中基板处理装置包括 处理室; 用于支撑多个基板的基板支撑件,可旋转地设置在处理室内的基板支撑件; 以及电极单元,其布置在所述基板支撑件上方,并设置有所述等离子体形成空间和所述源气体分配空间,其中所述等离子体形成空间与所述源气体分配空间在空间上分离。

    Method of manufaturing a colored metallic sheet
    27.
    发明授权
    Method of manufaturing a colored metallic sheet 失效
    制作彩色金属片的方法

    公开(公告)号:US5208073A

    公开(公告)日:1993-05-04

    申请号:US769703

    申请日:1991-10-02

    Applicant: Akira Yoshino

    Inventor: Akira Yoshino

    CPC classification number: C23C8/80 B05D3/044 B05D2202/00

    Abstract: In this invention, a method of manufacturing a colored metallic sheet comprises steps of holding a surface to be painted of metallic plates 10 in a fluorine- or fluoride-containing atmosphere in a heated condition to form a fluorided layer on the surface to be painted, removing the formed fluorided layer on the surface just before painting the surface to expose a metallic base, and painting the exposed metallic base surface.

    Method for providing adhesion to a metal surface
    28.
    发明授权
    Method for providing adhesion to a metal surface 失效
    提供对金属表面的附着力的方法

    公开(公告)号:US5089063A

    公开(公告)日:1992-02-18

    申请号:US461922

    申请日:1990-01-08

    Abstract: A process for treating metal surfaces to obtain improved susceptibility to bonding with adhesive compositions is disclosed. A metal surface is oxidized with a halogen to form a monolayer of halide ions on the surface. The halide ions are then exchanged with azide ions to form an azide monolayer on the metal surface. Upon contact of the treated surface with an adhesive composition, the azide layer may be thermally or photochemically decomposed to form active nitrene species, which react to bond the adhesive composition to the metal surface.

    Abstract translation: 公开了一种用于处理金属表面以获得改善的粘合剂组合物敏感性的方法。 金属表面被卤素氧化以在表面上形成单层的卤离子。 然后将卤离子与叠氮化物离子交换以在金属表面上形成叠氮化物单层。 当处理过的表面与粘合剂组合物接触时,叠氮化物层可以被热或光化学分解形成活性的腈类物质,它们将粘合剂组合物与金属表面反应。

    SURFACE TREATMENT METHODS INCLUDING METALLIZATION, APPARATUS FOR CARRYING OUT THE METHODS, AND ARTICLES PRODUCED THEREBY
    29.
    发明申请
    SURFACE TREATMENT METHODS INCLUDING METALLIZATION, APPARATUS FOR CARRYING OUT THE METHODS, AND ARTICLES PRODUCED THEREBY 审中-公开
    包括金属化的表面处理方法,实施方法的装置和生产的制品

    公开(公告)号:WO2006094285A2

    公开(公告)日:2006-09-08

    申请号:PCT/US2006/008053

    申请日:2006-03-06

    CPC classification number: B05D3/044 B05D3/10

    Abstract: The present invention provides numerous embodiments of new surface treatment methods, their apparatus for carrying out those methods, and articles made thereby. Numerous embodiments are disclosed which provide for a novel surface treatment for substrates to provide various properties, including but not limited to wettability, electrical conductivity, , improved adhesion, metallizability, sanitization, lubricity, abrasion resistance, static resistance, thrombo-resistance, anti-microbial, paintability, strengthening, vapor barrier properties, reflectivity, and voidless coverage of the treated article. The surface treatment is effected by subjecting a substrate, whether it is a polymeric sheet, some powder, a foam sheet, yam, or a fabric, to at least a sulfur containing gas for a relatively short period of time to provide a sulfonated surface treatment. Additional gases may be reactive or non- reactive in partial pressures effective within the range of the sulfur containing gas.

    Abstract translation: 本发明提供了许多新的表面处理方法的实施例,用于实施这些方法的装置以及由此制成的制品。 公开了许多实施例,其提供用于基材的新型表面处理以提供各种性质,包括但不限于润湿性,导电性,改进的粘合性,金属化,消毒,润滑性,耐磨性,耐静电性,抗血栓性, 经处理制品的微生物,可涂覆性,强化,阻气性,反射率和无孔覆盖。 表面处理通过将基材(无论是聚合物片材,一些粉末,泡沫片材,纱线或织物)经受相对较短时间的至少含硫气体以提供磺化表面处理 。 额外的气体可以是在含硫气体的范围内有效的分压中的反应性或非反应性的。

    METHOD OF CONTROLLABLE MORPHOLOGY OF SELF-ASSEMBLED MONOLAYERS ON SUBSTRATES
    30.
    发明申请
    METHOD OF CONTROLLABLE MORPHOLOGY OF SELF-ASSEMBLED MONOLAYERS ON SUBSTRATES 审中-公开
    基板上自组装单层可控形态的方法

    公开(公告)号:WO2005016559A1

    公开(公告)日:2005-02-24

    申请号:PCT/CA2004/001500

    申请日:2004-08-17

    Abstract: Method of controlling the morphology of self-assembled monolayers (SAMS) on substrates having hydrophilic surfaces. The hydrophilic surface is exposed to a fluid having a mixture of molecules which can self-assemble on the hydrophilic surface and hydrophobic molecules for a sufficient length of time so that the molecules which can self-assemble on the hydrophilic surface form a complete self-assembled monolayer. In a particular embodiment octadecylphosphonic acid (OPA) molecules have been self-assembled on oxidized substrates including but not limited to mica, silicon, sapphire, quartz and aluminum by spin-coating a solution containing the octadecylphosphonic acid (OPA) molecules and hydrophobic molecules such as chloroform or trichloroethylene under a controlled relative humidity. Control of the morphology of OPA SAMs is affected by adjusting humidity and the duration of spin-coating. Atomic force microscopy revealed that relative humidity has a profound influence on the morphology of the OPA SAMs formed. When sufficient molecules are applied either consecutively or separately, the final morphology will be a complete monolayer, regardless of the relative humidity.

    Abstract translation: 在具有亲水性表面的基材上控制自组装单层(SAMS)形态的方法。 将亲水表面暴露于具有可以在亲水表面上自组装的分子混合物的流体和疏水性分子足够长的时间,使得能够在亲水表面上自组装的分子形成完整的自组装 单层。 在一个具体实施方案中,十八烷基膦酸(OPA)分子已经在氧化底物上自组装,包括但不限于云母,硅,蓝宝石,石英和铝,通过旋涂包含十八烷基膦酸(OPA)分子和疏水分子的溶液 作为氯仿或三氯乙烯在受控的相对湿度下。 控制OPA SAM的形态受调节湿度和旋涂持续时间的影响。 原子力显微镜显示相对湿度对形成的OPA SAM的形态有深远的影响。 当连续或分别施加足够的分子时,无论相对湿度如何,最终形态将是完整的单层。

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