MAGNETOMETER USING MAGNETIC MATERIALS ON ACCELEROMETER
    24.
    发明申请
    MAGNETOMETER USING MAGNETIC MATERIALS ON ACCELEROMETER 有权
    磁力计使用磁性材料加速度计

    公开(公告)号:US20140266170A1

    公开(公告)日:2014-09-18

    申请号:US14208222

    申请日:2014-03-13

    Abstract: A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field

    Abstract translation: 一种MEMS器件,包括第一检测质量体,部分地设置在第一检验质量体的表面上的第一磁化磁性材料,锚固到基板以支撑第一检测质量块的第一弹簧,以及耦合到第一检测质量块的第一感测元件 并且可操作以感测由环境加速度引起的第一检测质量块的运动。 MEMS器件还包括耦合到第一检验质量块的第二感测元件,并且可操作以感测由环境磁场引起的第一检验质量块的运动

    MEMS process and device
    25.
    发明授权
    MEMS process and device 有权
    MEMS工艺和器件

    公开(公告)号:US08698256B2

    公开(公告)日:2014-04-15

    申请号:US13902344

    申请日:2013-05-24

    Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

    Abstract translation: 制造微机电系统(MEMS)换能器的方法包括以下步骤:在衬底上形成膜,并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤:形成第一后部体积部分和第二后部体积部分,第一后部体积部分与第二背部体积部分分离, 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积,从而能够增加后部体积,而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

    MEMS PROCESS AND DEVICE
    26.
    发明申请
    MEMS PROCESS AND DEVICE 有权
    MEMS工艺和器件

    公开(公告)号:US20110089504A1

    公开(公告)日:2011-04-21

    申请号:US12673925

    申请日:2008-08-15

    Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane (5) on a substrate (3), and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion (7a) and a second back-volume portion (7b), the first back-volume portion (7a) being separated from the second back-volume portion (7b) by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion (7b) can be made greater than the cross-sectional area of the membrane (5), thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane (5). The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.

    Abstract translation: 制造微机电系统(MEMS)换能器的方法包括以下步骤:在衬底(3)上形成膜(5),并在衬底中形成后体积。 在衬底中形成背部体积的步骤包括形成第一后部容积部分(7a)和第二后部体积部分(7b)的步骤,第一后部体积部分(7a)与第二后部体积部分 后体积部分(7b)通过后体积的侧壁中的台阶。 第二后部容积部分(7b)的横截面面积可以大于膜(5)的横截面面积,从而能够增加后部体积而不受横截面积的约束 的膜(5)。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。

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