Material and Process for Fabricating and Shaping of Transparent Multicomponent Fused Silica Glasses

    公开(公告)号:US20240166547A1

    公开(公告)日:2024-05-23

    申请号:US18549129

    申请日:2022-03-28

    Applicant: Glassomer GmbH

    Abstract: The present invention relates to a moldable nanocomposite for producing a transparent article made of multicomponent fused silica glass, the moldable nanocomposite comprising: an organic binder; and a fused silica glass powder dispersed in the organic binder, the fused silica glass powder comprising fused silica glass particles having a diameter in the range from 5 nm to 500 nm, wherein the fused silica glass powder is pre-modified with a dopant and/or wherein at least one non-crystalline modifying agent is contained in the moldable nanocomposite and one or more dopant reagents selected from organoelement compounds, metal complexes and salts are contained in the moldable nanocomposite as the at least one non-crystalline modifying agent, and wherein the content of the fused silica glass powder in the moldable nanocomposite is at least 5 parts per volume based on 100 parts per volume of the organic binder. Further, the present invention relates to a method of producing a transparent article made of multicomponent fused silica glass.

    BLANK MADE OF TITANIUM-DOPED SILICA GLASS AND METHOD FOR THE PRODUCTION THEREOF
    27.
    发明申请
    BLANK MADE OF TITANIUM-DOPED SILICA GLASS AND METHOD FOR THE PRODUCTION THEREOF 有权
    钛白粉玻璃的制造方法及其生产方法

    公开(公告)号:US20150376048A1

    公开(公告)日:2015-12-31

    申请号:US14748344

    申请日:2015-06-24

    Abstract: A blank made of titanium-doped silica glass for a mirror substrate for use in EUV lithography is provided. The blank includes a surface portion to be provided with a reflective film and having an optically used area (CA) over which a coefficient of thermal expansion (CTE) has a two-dimensional inhomogeneity (dCTE) distribution profile averaged over a thickness of the blank. A maximum inhomogeneity (dCTEmax) of less than 5 ppb/K is defined as a difference between a CTE maximum value and a CTE minimum value. The dCTEmax is at least 0.5 ppb/K. The CA forms a non-circular area having a centroid. The dCTE distribution profile is not rotation-symmetrical and is defined over the CA, such that straight profile sections normalized to a unit length and extending through the centroid of the area yield a dCTE family of curves forming a curve band with a bandwidth of less than 0.5×dCTEmax.

    Abstract translation: 提供了一种用于EUV光刻的用于镜面基板的掺钛石英玻璃的空白件。 坯料包括具有反射膜并具有光学用途区域(CA)的表面部分,在该区域上的热膨胀系数(CTE)在坯料的厚度上平均的二维不均匀性(dCTE)分布分布平均 。 小于5ppb / K的最大不均匀性(dCTEmax)定义为CTE最大值和CTE最小值之间的差。 dCTEmax至少为0.5 ppb / K。 CA形成具有质心的非圆形区域。 dCTE分布轮廓不是旋转对称的,并且在CA上定义,使得被归一化为单位长度并延伸穿过该区域的质心的直线剖面产生了形成带宽小于的曲线的dCTE曲线族 0.5×dCTEmax。

    Process and apparatus for making glass sheet
    29.
    发明申请
    Process and apparatus for making glass sheet 有权
    制造玻璃板的方法和装置

    公开(公告)号:US20080280057A1

    公开(公告)日:2008-11-13

    申请号:US11800585

    申请日:2007-05-07

    Abstract: An apparatus and process for making glass soot sheet and sintered glass sheet. Glass soot particles are deposited on a curved deposition surface of a rotating drum to form a soot sheet. The soot sheet is then released from the deposition surface. The soot sheet can be sintered into a consolidated glass. The soot sheet and the sintered glass can be sufficiently long and flexible to be reeled into a roll.

    Abstract translation: 制造玻璃烟灰片和烧结玻璃板的设备和方法。 玻璃烟灰颗粒沉积在旋转鼓的弯曲沉积表面上以形成烟炱片。 然后将烟灰片从沉积表面释放。 烟炱片可以烧结成固结的玻璃。 烟炱纸和烧结玻璃可以足够长并且柔性以卷成卷。

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