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    Wavelength shift measuring apparatus, optical source apparatus, interference measuring apparatus, exposure apparatus, and device manufacturing method
    22.
    发明公开
    Wavelength shift measuring apparatus, optical source apparatus, interference measuring apparatus, exposure apparatus, and device manufacturing method 审中-公开
    波长偏移测定装置，光学源装置，干扰测量装置，曝光装置以及元件制造方法

    公开(公告)号：EP2180301A3

    公开(公告)日：2012-08-22

    申请号：EP09173968.0

    申请日：2009-10-23

    Applicant: Canon Kabushiki Kaisha

    Inventor： Ishizuka, Ko

    IPC: G01J9/02

    CPC classification number: G01J9/0246 ,  G01J2009/0219 ,  G01J2009/0261 ,  G03F7/70775

    Abstract: A wavelength shift measuring apparatus of the present invention is a wavelength shift detector (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter (BS2) splitting the light beam emitted from the light source into a plurality of light beams and to synthesize two light beams among the plurality of light beams to generate an interference light, a spacer member (SP) provided so that an optical path length difference of the two light beams split by the beam splitter (PBS2) is constant, and a plurality of photoelectric sensors (PD) detecting the interference light generated by the beam splitter (BS2). The plurality of photoelectric sensors (PD) output a plurality of interference signals having phases shifted from one another based on the interference light to measure a wavelength shift using the plurality of interference signals.

    Wavelength dispersion measuring apparatus and polarization dispersion measuring appparatus
    23.
    发明公开
    Wavelength dispersion measuring apparatus and polarization dispersion measuring appparatus 审中-公开
    设备，用于测量的波长色散和偏振色散测量装置

    公开(公告)号：EP1411339A3

    公开(公告)日：2004-05-12

    申请号：EP04001628.9

    申请日：1999-02-17

    Applicant: Anritus Corporation ,  Nippon Telegraph and Telephone Corporation

    Inventor： Otani, Akihito ,  Otsubo, Toshinobu ,  Takara, Hidehiko ,  Kawanishi, Satoki ,  Yamabayashi, Yoshiaki

    IPC: G01J9/02 ,  G01M11/00

    CPC classification number: G01M11/336 ,  G01J4/00 ,  G01J7/00 ,  G01J2009/0261 ,  G01M11/332 ,  G01M11/335

    Abstract: A first tunable wavelength pulse light source (22) is driven by a reference signal to emit a first optical pulse. An optical demultiplexer (24) demultiplexes a first optical pulse emitted from the first pulse light source (22) into a reference optical pulse and an incident optical pulse to be sent into an object to be measured. An optical multiplexer (26) multiplexes the reference optical pulse and an outgoing optical pulse passing through the object to output multiplexed light. A second pulse light source (23) generates a second optical pulse which is synchronous with the first optical pulse and delays a predetermined time for each period of the first optical pulse. A sampling unit (27, 27a, 27b) receives the multiplexed light and the second optical pulse to obtain an optical pulse train signal proportional to the intensity of the multiplexed light obtained in synchronism with the second optical pulse. From the optical pulse train signal from the sampling unit (27, 27a, 27b), a signal processor (37) obtains an envelope formed by peaks of individual optical pulses forming the optical pulse train. The wavelength dispersion of the object is obtained by measuring the delay time of the outgoing optical pulse passing through the object on the basis of intervals between the peaks of the envelope.

    Laser interferometer with optical feedback isolation
    25.
    发明公开
    Laser interferometer with optical feedback isolation 失效
    光学反馈隔离器

    公开(公告)号：EP0342885A3

    公开(公告)日：1991-05-02

    申请号：EP89304859.5

    申请日：1989-05-12

    Applicant: Hewlett-Packard Company

    Inventor： Parker, David R. ,  Glievef, John H.

    IPC: G02B5/28 ,  G01B9/02

    CPC classification number: G01J9/02 ,  G01J2009/0261 ,  G02B27/28

    Abstract: Apparatus for isolating optical feedback in a laser interferometer having a laser light source (12) from which a linear polarised outgoing laser beam (28) of certain polarisation orientation is derived. The interferometer also redirects the outgoing laser beam to form a return laser beam (29) directed to a receiver (13). The outgoing and the return laser beams are physically close and are substantially parallel. The linearly polarised outgoing laser beam is converted to circular polarisation. A portion of the circularly polarised return laser beam directed toward the laser light source is converted back to linear polarisation with polarisation orientation orthogonal to the polarisation orientation of the outgoing laser beam. A portion of the circularly polarised return laser beam directed toward the receiver converted back to linear polarisation with polarisation orientation being substantially the same as the polarisation orientation of the outgoing laser beam. The portion of the return laser beam with polarisation orientation orthogonal to the polarisation orientation of the outgoing laser beam is directed away from the laser light source, and the portion of the return laser beam with polarisation orientation of the outgoing laser beam is directed toward the receiver.

    Wavelength shift measuring apparatus, optical source apparatus, interference measuring apparatus, exposure apparatus, and device manufacturing method
    30.
    发明专利
    Wavelength shift measuring apparatus, optical source apparatus, interference measuring apparatus, exposure apparatus, and device manufacturing method 有权
    波长移动测量装置，光源装置，干涉仪测量装置，曝光装置和装置制造方法

    公开(公告)号：JP2010122207A

    公开(公告)日：2010-06-03

    申请号：JP2009223435

    申请日：2009-09-28

    Applicant: Canon Inc ,  キヤノン株式会社

    Inventor： ISHIZUKA AKIRA

    IPC: G01J9/02 ,  G01B9/02 ,  G01B11/00 ,  H01L21/027

    CPC classification number: G01J9/0246 ,  G01J2009/0219 ,  G01J2009/0261 ,  G03F7/70775

    Abstract: PROBLEM TO BE SOLVED: To provide a wavelength shift measuring apparatus capable of measuring fluctuation of an optical source wavelength with accuracy and resolution of not greater than pm by being equipped with a construction in which an optical path difference of two light beams stably becomes constant.
    SOLUTION: A wavelength shift measuring apparatus is a wavelength shift detector WLCD1 which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter BS2 splitting the light beam emitted from the light source into a plurality of light beams and to synthesize two light beams among the plurality of light beams to generate an interference light, a spacer member SP provided so that an optical path length difference of the two light beams split by the beam splitter PBS2 is constant, and a plurality of photoelectric sensors PDA+, PDB+ detecting the interference light generated by the beam splitter BS2. The plurality of photoelectric sensors PDA+, PDB+ output a plurality of interference signals having phases shifted from one another based on the interference light to measure a wavelength shift using the plurality of interference signals.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 解决的问题：提供一种能够通过配置两个光束的光程差稳定的结构来测量光源波长的精度和分辨率不大于pm的波长偏移测量装置 变得不变。 解决方案：波长偏移测量装置是测量从光源发射的光束的波长偏移的波长偏移检测器WLCD1，并且包括分束器BS2，将从光源发射的光束分成 多个光束，并且在多个光束中合成两个光束以产生干涉光;间隔部件SP，被设置成使得分束器PBS2分裂的两个光束的光程长度差是恒定的，并且 多个光电传感器PDA +，PDB +检测由分束器BS2产生的干涉光。 多个光电传感器PDA +，PDB +输出具有基于干涉光彼此相移的多个干涉信号，以使用多个干扰信号测量波长偏移。 版权所有（C）2010，JPO＆INPIT

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