AC-EXCITED MICROCAVITY DISCHARGE DEVICE AND METHOD
    26.
    发明公开
    AC-EXCITED MICROCAVITY DISCHARGE DEVICE AND METHOD 审中-公开
    随着对排放的微腔AC电压激励装置及方法

    公开(公告)号:EP1849180A2

    公开(公告)日:2007-10-31

    申请号:EP06849677.7

    申请日:2006-01-24

    Abstract: A method for fabricating microcavity discharge devices and arrays of devices. The devices are fabricated by layering a dielectric (1020, 220) on a first conducting layer or substrate (210, 1010). A second conducting layer or structure is overlaid on the dielectric layer. In some devices, a microcavity (1040, 212) is created that penetrates the second conducting layer or structure and the dielectric layer. In other devices, the microcavity penetrates to the first conducting layer. The second conducting layer or structure together with the inside face of the microcavity is overlaid with a second dielectric layer. The microcavities are then filled with a discharge gas. When a time- varying potential of the appropriate magnitude is applied between the conductors, a microplasma discharge is generated in the microcavity. These devices can exhibit extended lifetimes since the conductors are encapsulated, shielding the conductors from degradation due to exposure to the plasma. Some of the devices are flexible and the dielectric can be chosen to act as a mirror.

    Electrode structures and lamps
    28.
    发明公开
    Electrode structures and lamps 失效
    Elektrodenstrukturen

    公开(公告)号:EP0896352A1

    公开(公告)日:1999-02-10

    申请号:EP98305571.6

    申请日:1998-07-14

    CPC classification number: H01J61/09 H01J1/025

    Abstract: A gas discharge lamp has a tubular envelope (1) containing tubular electrodes (30) at opposite ends. An annular support member (40) of a compressible ceramic fibre is supported in a groove (33) around each electrode and is compressed against the inside surface of the envelope. Movement of the electrodes (30) relative to the envelope (1) is damped by the support member (40).

    Abstract translation: 气体放电灯具有在相对端包含管状电极(30)的管状外壳(1)。 可压缩陶瓷纤维的环形支撑构件(40)被支撑在围绕每个电极的凹槽(33)中并被压靠在外壳的内表面上。 电极(30)相对于外壳(1)的移动被支撑构件(40)阻尼。

    Hollow cathode gun and deposition device for ion plating process
    29.
    发明公开
    Hollow cathode gun and deposition device for ion plating process 失效
    Hohlkathodenkanone和Vorrichtung zur Materialablagerung durch Ionenbeschichtung。

    公开(公告)号:EP0278494A2

    公开(公告)日:1988-08-17

    申请号:EP88101960.8

    申请日:1988-02-10

    CPC classification number: C23C14/28 H01J1/025 H01J37/3053

    Abstract: A hollow cathode gun used in the ion plating through HCD process comprises a hollow cathode (2) consist­ing of an outer graphite layer (3) and an inner Ta, W or LaB₆ layer (4). A deposition device using the above hollow cathode gun comprises at least one crucible housing an evaporation material, a substrate and a reaction gas inlet, and is provided with a focusing coil surrounding the outer layer of the hollow cathode and another focusing coil surrounding the crucible.

    Abstract translation: 用于通过HCD工艺进行离子镀的中空阴极枪包括由外部石墨层(3)和内部Ta,W或LaB 6层(4)组成的空心阴极(2)。 使用上述中空阴极枪的沉积装置包括容纳蒸发材料,基底和反应气体入口的至少一个坩埚,并且设置有围绕中空阴极的外层的聚焦线圈和围绕坩埚的另一聚焦线圈。

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