Abstract:
Rotating anode X-ray tubes degrade over time because of the action of the electron beam altering the surface of the focal spot area of a rotating anode. This causes a degradation in a resulting object image, when the source is used in an imaging application. An X-ray tube housing assembly is discussed which allows the correction of such effects. In particular, an additional beam of the X-radiation, which is not used for imaging, may be used to correct such effects.
Abstract:
An EUV light source (2) serves for generating a usable output beam (3) of EUV illumination light for a projection exposure apparatus (1) for projection lithography. The light source (2) has an EUV generation device (2c) which generates an EUV raw output beam. The latter is circularly polarized. For the purposes of setting the polarization of the usable output beam (3) and in respect of the polarization direction, a polarization setting device (32; 39) has a linearly polarizing effect on the raw output beam. This results in an EUV light source, which provides an improved output beam for a resolution-optimized illumination.
Abstract:
An X-ray window comprises a primary (22) and a secondary (70) window element. In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the window element. To prevent large debris particles from short-circuiting the window element and changing the desired heating pattern, the current for heating the window element flows through a layer (72) which is insulated from the charge-drain layer (76).
Abstract:
A standing wave electron beam accelerator and x-ray source is described. The accelerator has a plurality of on-axis resonant cells having axial apertures electrically coupled to one another by on-axis coupling cells having axial apertures. The accelerator includes a buncher cavity defined in part by an apertured anode and a half cell. The buncher cavity is configured to receive electrons injected through said anode aperture and r.f. focus them into a beam which is projected along the axis through said apertures. An x-ray target is supported in spaced relationship to said accelerator by a support having a smaller diameter than the accelerator.
Abstract:
An X-ray tube arrangement (120) for dual energy operation is proposed. The arrangement comprises an electron source (210) for emitting an electron beam (215) and a disk-shaped anode (230). Furthermore, a rotatable filter arrangement (125) is provided comprising a toroidal filter (126) with a filter pattern comprising an X-ray absorption portion arranged along a circumference of the toroidal filter (126). The rotatable filter arrangement (125) is adapted to rotate the toroidal filter around a rotation axis (237) orthogonal to the disk-shaped anode (230). The filter arrangement (125) may be attached to the tube housing (122) such that the toroidal filter (126) is held by a bearing (124). Alternatively, the toroidal filter (126) may be attached to the anode (230). Gyroscopic forces resulting upon filter (126) rotation may be reduced especially when applied in a rotating gantry of a CT device.
Abstract:
Eine Einrichtung zur Erzeugung von UV-Strahlung, insbesondere EUV- Strahlung, umfasst eine Teilchenquelle, die elektrisch geladene Teilchen freisetzt, und Mittel zur Erzeugung eines elektrischen Feldes, in welchem die elektrisch geladenen Teilchen auf ein Target zu beschleunigt werden. Erfindungsgemss ist das Target (3) ein Festkörper, der durch die auftreffenden elektrisch geladenen Teilchen elektromagnetische Strahlung im EUV-Spektralbereich emittiert. Es wird ebenfalls ein entsprechendes Verfahren vorbestellet.
Abstract:
The generation of X-radiation occurs when a powder (14, 24, 38, 47, 58) is subjected to electro-dispersion in an evacuated chamber. The powder is of a conducting or semiconducting material, and is supported on the lower of two electrodes (10, 11; 22, 25; 36, 39; 44, 48; 52, 56) in the chamber. When the chamber pressure is about 10 Torr or lower, and a high voltage is applied across the electrodes, part of the powder forms a dispersed particulate cloud in the space between the electrodes. The dispersion of the powder results in the generation of X-radiation which is transmitted through the wall (13) of the chamber or through a window (28, 35, 45) in the apparatus. Visible light is produced if a phosphor (29) is included in the chamber, and is irradiated by X-rays generated upon dispersion of the powder, or if the powder includes particles of a phosphor.