公开(公告)号：US06733678B2

公开(公告)日：2004-05-11

申请号：US10086950

申请日：2002-02-28

Applicant: Tihiro Ohkawa

Inventor： Tihiro Ohkawa

IPC: C23C16513

CPC classification number: H01J37/32431 ,  H01J49/025 ,  H01J49/288

Abstract: An apparatus for removing selected metal ions from a plasma includes a plasma chamber and at least one silica substrate mounted inside the chamber. More specifically, the substrate is exposed in the chamber so that when metal ions from the plasma contact the substrate they diffuse into the substrate to create a liquified layer. A receptacle is also provided to receive the liquid from the layer as it flows from the substrate.

Abstract translation: 用于从等离子体中去除所选择的金属离子的装置包括等离子体室和安装在室内的至少一个二氧化硅衬底。 更具体地说，衬底暴露在室中，使得当来自等离子体的金属离子与衬底接触时，它们扩散到衬底中以产生液化层。 还提供了一个容器，用于在从衬底流出时从层中接收液体。

公开(公告)号：US06585891B1

公开(公告)日：2003-07-01

申请号：US10086671

申请日：2002-02-28

Applicant: Tihiro Ohkawa

Inventor： Tihiro Ohkawa

IPC: B03C100

CPC classification number: H05H1/54 ,  H01J49/288

Abstract: A device for separating high-mass ions (having cyclotron frequency &OHgr;h) from low-mass ions (having cyclotron frequency &OHgr;l) in a plasma includes a chamber. Coils are provided to generate a substantially uniform magnetic field in the chamber. An antenna is provided to launch a left-hand elliptically polarized electromagnetic wave into the chamber along the stationary magnetic field that is evanescent in the multi-species plasma. Importantly, the E vector of the elliptically polarized electromagnetic wave rotates at a frequency, &ohgr;, where &OHgr;h

Abstract translation: 用于从等离子体中的低质量离子（具有回旋加速器OMEGA1）分离高质量离子（具有回旋加速器频率OMEGAh）的装置包括室。 提供线圈以在腔室中产生基本均匀的磁场。 提供一个天线，以沿着在多种类等离子体中消逝的固定磁场发射左手椭圆极化的电磁波进入腔室。 重要的是，椭圆极化的电磁波的E矢量以ω，ω，ω的旋转频率，其中OMEGAh <ω= OMEGA1。 波动产生的电磁波使低质量离子向天线移动，同时使高质量离子离开天线。

公开(公告)号：US5466932A

公开(公告)日：1995-11-14

申请号：US320614

申请日：1994-10-07

Applicant: Robert M. Young ,  Carl B. Freidhoff ,  Dennis L. Polla ,  Peter J. Schiller

Inventor： Robert M. Young ,  Carl B. Freidhoff ,  Dennis L. Polla ,  Peter J. Schiller

IPC: G01N27/62 ,  F04B43/02 ,  F04B43/04 ,  H01J49/24 ,  H01J49/28 ,  F04B17/00

CPC classification number: H01J49/288 ,  F04B43/046 ,  H01J49/0018

Abstract: A pump is provided for use in a solid state mass-spectrograph for analyzing a sample gas. The spectrograph is formed from a semiconductor substrate having a cavity with an inlet, gas ionizing section adjacent the inlet, a mass filter section adjacent the gas ionizing section and a detector section adjacent the mass filter section. The pump is connected to each of the sections of said cavity and evacuates the cavity and draws the sample gas into the cavity. The pump includes at least one piezoelectrically-actuated diaphragm. Upon piezoelectrical actuation, the diaphragm accomplishes a suction stroke which evacuates the cavity and draws the sample gas into the cavity. Preferably, the diaphragm is formed from a pair of electrodes sandwiching a piezoelectric layer.

Abstract translation: 提供了一种用于固体质谱仪分析样品气体的泵。 该光谱仪由具有入口的空腔的半导体衬底，与入口相邻的气体离子化部分，与气体离子化部分相邻的质量过滤部分和与质量过滤部分相邻的检测器部分形成。 泵连接到所述腔的每个部分，并抽空空腔并将样品气体吸入腔中。 泵包括至少一个压电致动隔膜。 在压电致动时，隔膜实现抽吸行程，抽吸空腔并将样品气体吸入空腔。 优选地，隔膜由夹着压电层的一对电极形成。

公开(公告)号：US5386115A

公开(公告)日：1995-01-31

申请号：US124873

申请日：1993-09-22

Applicant: Carl B. Freidhoff ,  Robert M. Young ,  Saptharishi Sriram

Inventor： Carl B. Freidhoff ,  Robert M. Young ,  Saptharishi Sriram

IPC: H01J49/28 ,  D01D59/44 ,  H01J49/00

CPC classification number: H01J49/288 ,  H01J49/0018

Abstract: A solid state mass spectrograph includes an inlet, a gas ionizer, a mass filter and a detector array all formed within a cavity in a semiconductor substrate. The gas ionizer can be a solid state electron emitter with ion optics provided by electrodes formed on apertured partitions in the cavity forming compartments through which the cavity is evacuated by differential pumping. The mass filter is preferably a Wien filter with the magnetic field provided by a permanent magnet outside the substrate or by magnetic film on the cavity walls. The electric field of the Wien filter is provided by electrodes formed on walls of the cavity. The detector array is a linear array oriented in the dispersion plane of the mass filter and includes converging electrodes at the end of the cavity serving as Faraday cages which pass charge to signal generators such as charge coupled devices formed in the substrate but removed from the cavity.

Abstract translation: 固态质谱仪包括全部形成在半导体衬底的空腔内的入口，气体离子发生器，质量过滤器和检测器阵列。 气体离子发生器可以是具有离子光学器件的固态电子发射器，该离子光学器件由形成在空腔形成室中的多孔分隔壁上的电极提供，空腔通过差分泵送而被排空。 质量过滤器优选为具有由基板外部的永磁体提供的磁场或在腔壁上的磁性膜提供的维恩滤波器。 维恩滤波器的电场由形成在空腔的壁上的电极提供。 检测器阵列是在质量过滤器的色散平面中定向的线性阵列，并且包括在用作法拉第笼的腔的端部处的会聚电极，其将电荷传递到信号发生器，例如形成在衬底中的电荷耦合器件，但是从腔 。

公开(公告)号：US3968377A

公开(公告)日：1976-07-06

申请号：US497486

申请日：1974-08-14

Applicant: Joseph Paul Farrell

Inventor： Joseph Paul Farrell

IPC: G21K1/08 ,  H01J49/00 ,  H01J49/28 ,  H05H3/06 ,  G21G4/02

CPC classification number: H05H3/06 ,  G21K1/08 ,  H01J49/00 ,  H01J49/288

Abstract: In a neutron generator of the type in which a tritium-titanium target is bombarded by a deuterium ion beam, the target half-life is increased by separating the beam with a weak magnetic field to provide three separate beams of atomic, diatomic and triatomic deuterium ions which all strike the target at different adjacent locations. Beam separation in this manner eliminates the problem of one type ion impairing the neutron generating efficiency of other type ions, thereby effecting more efficient utilization of the target material.

Abstract translation: 在其中氚钛靶被氘离子束轰击的类型的中子发生器中，通过用弱磁场分离光束来增加目标半衰期，以提供原子，双原子和三原子氘的三个单独的束 所有这些离子都在不同的相邻位置上撞击目标物。 以这种方式分离光束消除了一种类型的离子损害其它类型离子的中子产生效率的问题，从而更有效地利用目标材料。

公开(公告)号：US20240063004A1

公开(公告)日：2024-02-22

申请号：US18497323

申请日：2023-10-30

Applicant: ADAPTAS SOLUTIONS PTY LTD

Inventor： Russell Jurek ,  Kevin Hunter

IPC: H01J43/18 ,  H01J43/10 ,  H01J43/28 ,  H01J47/00 ,  H01J49/02 ,  H01J49/28

CPC classification number: H01J43/18 ,  H01J43/10 ,  H01J43/28 ,  H01J47/002 ,  H01J47/005 ,  H01J49/025 ,  H01J49/288

Abstract: Components of scientific analytical equipment. More particularly, ion detectors of the type which incorporate electron multipliers and modifications thereto for extending the operational lifetime or otherwise improving performance. The ion detector may be embodied in the form of a particle detector having one or more electron emissive surfaces and/or an electron collector surface therein, the particle detector being configured such that in operation the environment about the electron emissive surface(s) and/or the electron collector surface is/are different to the environment immediately external to the detector.

公开(公告)号：US11887832B2

公开(公告)日：2024-01-30

申请号：US17703899

申请日：2022-03-24

Applicant: Thermo Fisher Scientific (Bremen) GmbH

Inventor： Johannes Schwieters ,  Gerhard Jung

IPC: H01J49/28 ,  H01J49/06 ,  H01J49/10

CPC classification number: H01J49/288 ,  H01J49/067 ,  H01J49/105

Abstract: An isotope ratio mass spectrometer has an ion source, a static field mass filter, a reaction cell to induce a mass shift reaction, and a sector field mass analyser for spatially separating ions from the reaction cell according to their m/z. A detector platform detects a plurality of different ion species separated by the sector field mass analyser. The static field mass filter has a first Wien filter that deflects ions away from a longitudinal symmetry axis of the spectrometer in accordance with the ions' m/z, and a second Wien filter that deflects ions back towards the longitudinal symmetry axis in accordance with the ions' m/z. An inverting lens is positioned along the longitudinal axis between the Wien filters to invert the direction of deflection of the ions from the first Wien filter. The static field mass filter provides high transmission and improved spectrometer sensitivity. The first and second Wien filters permit simple tuning.

公开(公告)号：US07465939B2

公开(公告)日：2008-12-16

申请号：US11568175

申请日：2005-06-20

Applicant: Juergen Frosien

Inventor： Juergen Frosien

IPC: H01J37/153

CPC classification number: H01J37/153 ,  H01J49/06 ,  H01J49/288 ,  H01J2237/057 ,  H01J2237/1534

Abstract: The present invention provides an aberration correction device. The aberration correction device comprises a Wien filter element, a quadrupole element for compensating a focusing property of the Wien filter element, and at least one multipole element for spherical aberration correction. The Wien filter element and said quadrupole element are adapted to generate, in combination, an astigmatic image. Furthermore, the at least one multipole element is adapted to act essentially in a plane of sagittal or meridional focus of the astigmatic image. Thereby, chromatic aberration is reduced as well as spherical aberration can be corrected.

Abstract translation: 本发明提供一种像差校正装置。 像差校正装置包括维恩滤波器元件，用于补偿维恩滤波器元件的聚焦特性的四极元件和用于球面像差校正的至少一个多极元件。 维恩滤波器元件和所述四极杆元件适于组合地产生像散图像。 此外，至少一个多极元件适于基本上在像散图像的矢状或子午焦点的平面中起作用。 从而，可以减小色差，并且可以校正球面像差。

公开(公告)号：US20070096023A1

公开(公告)日：2007-05-03

申请号：US11260106

申请日：2005-10-28

Applicant: Carl Freidhoff

Inventor： Carl Freidhoff

IPC: H01J49/28

CPC classification number: H01J49/288 ,  H01J49/0018

Abstract: A MEMS mass spectrometer having metal walls connected between a lid and base, with the walls defining a plurality of interior chambers including sample gas input chambers, an ionizer chamber, a plurality of ion optics chambers and a ion separation chamber. A detector array at the end of the ion separation chamber includes a plurality of V-shaped detector elements positioned along two parallel lines and arranged to intercept all of the ionized beams produced in the mass spectrometer.

Abstract translation: 一种MEMS质谱仪，其具有连接在盖和底座之间的金属壁，其中壁限定了多个内室，包括样品气体输入室，离子发生器室，多个离子光学腔室和离子分离室。 在离子分离室的端部处的检测器阵列包括沿着两条平行线定位的多个V形检测器元件，并且布置成拦截在质谱仪中产生的所有电离束。

公开(公告)号：US06939469B2

公开(公告)日：2005-09-06

申请号：US10321301

申请日：2002-12-16

Applicant: Tihiro Ohkawa ,  Robert L. Miller

Inventor： Tihiro Ohkawa ,  Robert L. Miller

IPC: H01J49/28 ,  H01J49/42 ,  B03C1/00 ,  B01D21/26

CPC classification number: H01J49/42 ,  H01J49/288

Abstract: A band gap mass filter for separating particles of mass (M1) from particles of mass (M2) in a multi-species plasma includes a chamber defining an axis. Coils around the chamber generate an axially aligned magnetic field defined (B=B0+B1 sin ωt), with an antenna generating the sinusoidal component (B1 sin ωt) to induce an azimuthal electric field (Eθ) in the chamber. The resultant crossed electric and magnetic fields place particles M2 on unconfined orbits for collection inside the chamber, and pass the particles M1 through said chamber for separation from the particles M2. Unconfined orbits for particles M2 are determined according to an α-β plot ( α = Ω 0 2 + Ω 1 2 / 2 4 ⁢ ω 2 , and ⁢   ⁢ β = Ω 0 ⁢ Ω 1 8 ⁢ ω 2 ) , where Ω0 is the cyclotron frequency for particles with mass/charge ratio M, and wherein Ω0=B0/M and Ω1=B1/M.