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291.发明授权公开(公告)号：US09506777B2
公开(公告)日：2016-11-29
申请号：US14885656
申请日：2015-10-16
Applicant: Sagatek Co., Ltd.
Inventor： Kelvin Yi-Tse Lai , Jung-Hsiang Chen , Cheng-Szu Chen , Shu-Yi Weng
CPC classification number: G01D5/24 , B81B7/008 , B81B2201/0235 , B81B2201/033 , B81B2207/012 , B81C1/00698
Abstract: A micro-electromechanical apparatus having a signal attenuation-proof function, and a manufacturing method and a signal attenuation-proof method thereof are disclosed. The micro-electromechanical apparatus includes a substrate, an insulation layer, and a sensing unit. The substrate has a doped region in which a majority of conductive carriers have the same polarity as an electronic signal. The insulation layer is located on the substrate, and the sensing unit is located above the insulation layer and forms the electronic signal when sensing a force.
Abstract translation: 公开了一种具有信号衰减防御功能的微机电装置及其制造方法和信号衰减防止方法。 微机电装置包括基板，绝缘层和感测单元。 衬底具有掺杂区域，其中绝大多数导电载体具有与电子信号相同的极性。 绝缘层位于基板上，感测单元位于绝缘层上方，并在感测到力时形成电子信号。
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公开(公告)号：US20160216508A1
公开(公告)日：2016-07-28
申请号：US14980883
申请日：2015-12-28
Applicant: CANON KABUSHIKI KAISHA
Inventor： Kenji Tamamori
CPC classification number: H02N1/008 , A61B3/1015 , A61B3/1225 , B81B3/0072 , B81B2201/033 , G02B26/06 , G02B26/0825 , G02B27/0068
Abstract: Provided is an actuator having a structure with which stress concentration on an elastic member of the actuator can be reduced in a manufacturing process thereof and breakage of the elastic member can be inhibited. The actuator includes a movable member, an elastic member configured to connect the movable member and a supporting member to each other, and an electrode pair having a comb electrode structure for displacing the movable member in a direction perpendicular to a reflective surface in which all movable comb electrodes extending from the movable member are substantially in parallel with one another, and a portion of the elastic member, which is located at a beginning of extension from the movable member, is substantially in parallel with the movable comb electrodes.
Abstract translation: 提供一种致动器，其制造过程中可以减小致动器的弹性构件上的应力集中的结构，并且可以抑制弹性构件的断裂。 致动器包括可动构件，构造成将可动构件和支撑构件彼此连接的弹性构件，以及具有梳状电极结构的电极对，用于使可移动构件沿与反射表面垂直的方向移动，其中所有可移动 从可动部件延伸的梳状电极基本上彼此平行，并且位于从可动部件延伸开始部分的弹性部件的一部分与可动梳状电极大致平行。
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公开(公告)号：US20160047837A1
公开(公告)日：2016-02-18
申请号：US14817324
申请日：2015-08-04
Applicant: Seiko Epson Corporation
Inventor： Satoru TANAKA
IPC: G01P15/125
CPC classification number: G01P15/125 , B81B3/0013 , B81B2201/0235 , B81B2201/0242 , B81B2201/033 , B81B2207/097 , B81C2203/0109 , B81C2203/031 , G01C19/5719 , G01P2015/0814
Abstract: A physical quantity sensor includes: a base substrate; a movable portion; a plurality of movable electrode fingers which are provided in the movable portion; a fixed electrode finger which is provided on the base substrate; and a fixing portion which fixes the movable portion to the base substrate. In the movable electrode fingers, a movable electrode finger which opposes the fixing portion in the first direction is included. A clearance between the movable electrode finger and the fixing portion is smaller than a clearance between the movable electrode finger and the fixed electrode finger. The width of the movable electrode finger is greater than the width of other movable electrode finger.
Abstract translation: 物理量传感器包括：基底; 可移动部分; 多个可动电极指，设置在可动部分中; 固定电极指，其设置在基底基板上; 以及固定部，其将可动部固定在基底基板上。 在可动电极指中包括与第一方向相对的固定部的可动电极指。 可动电极指和固定部之间的间隙小于可动电极指和固定电极指的间隙。 可动电极指的宽度大于其他可动电极指的宽度。
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294.发明申请公开(公告)号：US20160041009A1
公开(公告)日：2016-02-11
申请号：US14885656
申请日：2015-10-16
Applicant: Sagatek Co., Ltd.
Inventor： Kelvin Yi-Tse LAI , Jung-Hsiang CHEN , Cheng-Szu CHEN , Shu-Yi WENG
CPC classification number: G01D5/24 , B81B7/008 , B81B2201/0235 , B81B2201/033 , B81B2207/012 , B81C1/00698
Abstract: A micro-electromechanical apparatus having a signal attenuation-proof function, and a manufacturing method and a signal attenuation-proof method thereof are disclosed. The micro-electromechanical apparatus includes a substrate, an insulation layer, and a sensing unit. The substrate has a doped region in which a majority of conductive carriers have the same polarity as an electronic signal. The insulation layer is located on the substrate, and the sensing unit is located above the insulation layer and forms the electronic signal when sensing a force.
Abstract translation: 公开了一种具有信号衰减防御功能的微机电装置及其制造方法和信号衰减防止方法。 微机电装置包括基板，绝缘层和感测单元。 衬底具有掺杂区域，其中绝大多数导电载体具有与电子信号相同的极性。 绝缘层位于基板上，感测单元位于绝缘层上方，并在感测到力时形成电子信号。
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公开(公告)号：US09239222B2
公开(公告)日：2016-01-19
申请号：US14236966
申请日：2011-08-09
Applicant: Katsutoshi Narita
Inventor： Katsutoshi Narita
CPC classification number: G01B7/14 , B81B3/0086 , B81B2201/033 , G01C19/5733
Abstract: The displacement amount monitoring electrode structure includes a fixed electrode and a movable electrode each having a comb-teeth shape including a base part and electrode fingers extending from the base part in a direction parallel to a substrate. The fixed electrode and the movable electrode face each other such that the electrode fingers are meshed together. The fixed electrode is fixed to the substrate and the movable electrode can be displaced in the direction. The displacement amount monitoring electrode structure monitors a displacement amount of a detection mass to be driven at a target amplitude based on a change amount of a capacitance between the fixed electrode and the movable electrode. A change sensitivity of the change amount of the capacitance with respect to a displacement amount of the movable electrode, becomes larger after the displacement of the movable electrode reaches a target amount corresponding to the target amplitude.
Abstract translation: 位移量监视电极结构包括固定电极和可动电极，每个固定电极和可动电极具有梳状形状，其包括基底部分和电极指，该电极指沿平行于基底的方向从基部延伸。 固定电极和可动电极彼此面对，使得电极指彼此啮合。 固定电极固定在基板上，可动电极可以向该方向移位。 位移量监视电极结构基于固定电极和可动电极之间的电容的变化量来监视要以目标振幅驱动的检测质量的位移量。 电容变化量相对于可动电极的位移量的变化灵敏度在可动电极的位移达到与目标振幅对应的目标量后变大。
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Patent Agency Ranking
公开(公告)号：US09148075B2
公开(公告)日：2015-09-29
申请号：US14479615
申请日：2014-09-08
Applicant: STMicroelectronics International N.V.
Inventor： Sason Sourani , Moshe Medina
CPC classification number: H02N1/006 , B81B3/0043 , B81B7/00 , B81B7/008 , B81B2201/033 , B81B2201/034 , B81B2201/042 , B81B2203/0109 , B81B2203/0181 , B81B2203/058 , G02B7/1821 , G02B26/0841 , H02N1/008
Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.
Abstract translation: 微机电系统（MEMS）装置包括具有形成在至少两层绝缘体上硅（SOI）衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中，并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中，并且属于第二定子齿的每个定子齿形成在第二层中。
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公开(公告)号：US20150012230A1
公开(公告)日：2015-01-08
申请号：US14324363
申请日：2014-07-07
Applicant: Jason Vaughn Clark
Inventor： Jason Vaughn Clark
IPC: G01N27/22
CPC classification number: G01N27/22 , B81B2201/033 , B81C99/003
Abstract: This invention is a novel methodology for precision metrology, sensing, and actuation at the micro- and nano-scale. It is well-suited for micro- and nano-scale because it leverages off the electromechanical benefits of the scale. The invention makes use of electrical measurands of micro- or nano-scale devices to measure and characterize themselves, other devices, and whatever the devices subsequently interact with. By electronically measuring the change in capacitance, change in voltage, and/or resonance frequency of one or more test structures, a multitude of geometric, dynamic, and material properties may be extracted with a much higher accuracy and precision than conventional methods.
Abstract translation: 本发明是用于精密计量，感测和在微尺度和纳米尺度下的致动的新颖方法。 它非常适合微型和纳米级，因为它利用了刻度尺的机电效益。 本发明利用微尺度或纳米级装置的电测量来测量和表征其本身，其他装置以及随后的装置与之相互作用的任何装置。 通过电子测量一个或多个测试结构的电容变化，电压变化和/或谐振频率，可以以比常规方法更高的精度和精度提取多个几何，动态和材料特性。
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公开(公告)号：US20150002916A1
公开(公告)日：2015-01-01
申请号：US14479615
申请日：2014-09-08
Applicant: STMicroelectronics International N.V.
Inventor： Sason Sourani , Moshe Medina
CPC classification number: H02N1/006 , B81B3/0043 , B81B7/00 , B81B7/008 , B81B2201/033 , B81B2201/034 , B81B2201/042 , B81B2203/0109 , B81B2203/0181 , B81B2203/058 , G02B7/1821 , G02B26/0841 , H02N1/008
Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.
Abstract translation: 微机电系统（MEMS）装置包括具有形成在至少两层绝缘体上硅（SOI）衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中，并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中，并且属于第二定子齿的每个定子齿形成在第二层中。
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公开(公告)号：US08353600B1
公开(公告)日：2013-01-15
申请号：US12822180
申请日：2010-06-23
Applicant: Yee-Chung Fu
Inventor： Yee-Chung Fu
IPC: G02B5/08
CPC classification number: G02B6/3518 , B81B3/0021 , B81B2201/033 , B81B2201/045 , G02B6/357 , G02B26/0833 , G02B26/101
Abstract: A micro-electro-mechanical system (MEMS) actuator assembly includes a mirror and four actuators. Each actuator includes a lever pivotable about a fulcrum axis. The inner end of each lever is coupled to one side of the mirror. Force is applied to one outer end of the levers to move one side of the mirror, which positions the mirror in one of four positions. Force is applied to two outer ends of the levers to move two sides of the mirror, which positions the mirror in one of four additional positions.
Abstract translation: 微机电系统（MEMS）致动器组件包括反射镜和四个致动器。 每个致动器包括可围绕支点轴线枢转的杆。 每个杠杆的内端连接到镜子的一侧。 将力施加到杆的一个外端以移动镜的一侧，其将镜定位在四个位置之一中。 将力施加到杠杆的两个外端以移动镜的两侧，其将镜定位在四个附加位置之一中。
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300.发明申请MICROMECHANICAL COMPONENT AND PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT 审中-公开微生物组分的微生物组分和生产方法公开(公告)号：US20120133242A1
公开(公告)日：2012-05-31
申请号：US13320712
申请日：2010-05-18
Applicant: Frederic Njikam Njimonzie , Joerg Muchow , Zoltan Lestyan , Wolfram Schock
Inventor： Frederic Njikam Njimonzie , Joerg Muchow , Zoltan Lestyan , Wolfram Schock
CPC classification number: G02B26/0841 , B81B3/0021 , B81B2201/033 , B81B2201/042 , Y10T29/49002
Abstract: A micromechanical component has an outer stator electrode component and an outer actuator electrode component which is connected to a holder via at least one outer spring, an adjustable element being adjustable about a first rotation axis by application of a first voltage between the outer actuator electrode component and the outer stator electrode component, and having an inner stator electrode component and an inner actuator electrode component having a first web with at least one electrode finger disposed thereon, the adjustable element being adjustable about a second rotation axis by application of a second voltage between the at least one electrode finger of the inner actuator electrode component and the inner stator electrode component, and the inner actuator electrode component being connected to the outer actuator electrode component via an intermediate spring which is oriented along the second rotation axis. Also described is a production method for a micromechanical component.
Abstract translation: 微机械部件具有外部定子电极部件和外部致动器电极部件，其经由至少一个外部弹簧连接到保持器，可调节元件可围绕第一旋转轴线调节，通过在外部致动器电极部件 和外部定子电极部件，并且具有内部定子电极部件和内部致动器电极部件，所述内部致动器电极部件具有设置在其上的至少一个电极指的第一网状物，所述可调节元件可围绕第二旋转轴线调节， 内部致动器电极部件的至少一个电极指和内部定子电极部件，内部致动器电极部件通过沿着第二旋转轴线取向的中间弹簧连接到外部致动器电极部件。 还描述了一种用于微机械部件的制造方法。
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