公开(公告)号：US20060191294A1

公开(公告)日：2006-08-31

申请号：US10550049

申请日：2004-03-19

Applicant: Oliver Ganz ,  Ralph Sattmann ,  Jan Vydra

Inventor： Oliver Ganz ,  Ralph Sattmann ,  Jan Vydra

IPC: C03B37/025 ,  C03B37/02

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B37/0124 ,  C03B37/01892 ,  C03B2201/04 ,  C03B2201/075 ,  Y10T428/13

Abstract: Known synthetic quartz glass tubes for the production of a preform have an inner bore with a surface layer produced without using tools in the molten state and an inner zone. The aim of the invention is to provide a tube which does not release any OH groups to the surroundings. For this purpose, the surface layer (30) has a thickness of 10 μm and an average OH content of not more than 5 ppm by weight and an average surface roughness Ra of not more than 0.1 μm. The inner zone (34) that starts on the surface layer (30) and terminates 10 μm before the outer wall has an average OH content of not more than 0.2 ppm by weight. A simple and inexpensive method for producing a quartz tube of the above type is to continuously draw a tube strand from a softened quartz glass mass in a vertical drawing process. A scavenging gas is circulated through the inner bore of the tube, said gas having a water content of less than 100 ppb per weight. The front end of the tube strand (19) is closed by a flow obstacle (26) that is permeable the scavenging gas and that reduces the amount of scavenging gas (23) flowing through.

Abstract translation: 用于生产预成型件的已知的合成石英玻璃管具有内孔，其具有在不使用处于熔融状态的工具和内部区域的情况下制备的表面层。 本发明的目的是提供一种不会向周围释放任何OH基团的管。 为此，表面层（30）的厚度为10μm，平均OH含量为5重量ppm以下，平均表面粗糙度R a a为0.1μm以下。 在表层（30）之前开始并在外壁具有不大于0.2重量ppm的平均OH含量之前终止10um的内部区域（34）。 用于生产上述类型的石英管的简单和便宜的方法是在垂直拉伸过程中连续地从软化的石英玻璃块抽取管束。 清除气体通过管的内孔循环，所述气体的含水量小于100ppb /重量。 管股（19）的前端由能够吸收清除气体的流动障碍物（26）封闭，并减少流过的清除气体（23）的量。

公开(公告)号：US20060137397A1

公开(公告)日：2006-06-29

申请号：US11148504

申请日：2005-06-08

Applicant: Dana Bookbinder ,  Richard Fiacco ,  Kenneth Hrdina ,  Lisa Moore ,  Susan Schiefelbein

Inventor： Dana Bookbinder ,  Richard Fiacco ,  Kenneth Hrdina ,  Lisa Moore ,  Susan Schiefelbein

IPC: C03B20/00 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/54 ,  G03F7/70958

Abstract: Disclosed are high purity synthetic silica material having an internal transmission at 193 nm of at least 99.65%/cm and method of preparing such material. The material is also featured by a high compositional homogeneity in a plane transverse to the intended optical axis. The soot-to-glass process for making the material includes a step of consolidating the soot preform in the presence of H2O and/or O2.

Abstract translation: 公开了具有193nm以上的内透射率为至少99.65％/ cm 3的高纯度合成二氧化硅材料及其制备方法。 该材料的特征还在于横向于预期光轴的平面中具有高的组成均匀性。 用于制造材料的烟灰对玻璃工艺包括在H 2 O 2和/或O 2 2的存在下固化烟灰预制件的步骤。

公开(公告)号：US20050191019A1

公开(公告)日：2005-09-01

申请号：US11123920

申请日：2005-05-06

Applicant: George Berkey ,  Dana Bookbinder ,  Richard Fiacco ,  Dale Powers

Inventor： George Berkey ,  Dana Bookbinder ,  Richard Fiacco ,  Dale Powers

IPC: C03B37/014 ,  C03C13/04 ,  C03C25/60 ,  G02B6/02 ,  G02B6/16

CPC classification number: C03C25/607 ,  C03B37/01446 ,  C03B37/0146 ,  C03B37/01486 ,  C03B2201/075 ,  C03B2201/22 ,  C03B2201/31 ,  C03C3/06 ,  C03C13/045 ,  C03C13/047 ,  C03C2201/21 ,  C03C2201/22 ,  C03C2203/54 ,  G02B6/02

Abstract: Optical waveguide fiber having low water peak as well as optical waveguide fiber preforms and methods of making optical waveguide fiber preforms from which low water peak and/or low hydrogen aged attenuation optical waveguide fibers are formed, including optical waveguide fiber and preforms made via OVD. The fibers may be hydrogen resistant, i.e. exhibit low hydrogen aged attenuation. A low water peak, hydrogen resistant optical waveguide fiber is disclosed which exhibits an optical attenuation at a wavelength of about 1383 nm which is less than or equal to an optical attenuation exhibited at a wavelength of about 1310 nm.

公开(公告)号：US20050176572A1

公开(公告)日：2005-08-11

申请号：US10509029

申请日：2003-03-26

Applicant: Hideo Hosono ,  Kouichi Kajihara ,  Masahiro Hirano ,  Yoshiaki Ikuta ,  Shinya Kikukawa

Inventor： Hideo Hosono ,  Kouichi Kajihara ,  Masahiro Hirano ,  Yoshiaki Ikuta ,  Shinya Kikukawa

IPC: C03B20/00 ,  C03B8/04 ,  C03B19/14 ,  C03C3/06 ,  C03C23/00 ,  G02B1/02 ,  G03F7/20

CPC classification number: G03F7/70958 ,  C03B19/1453 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/21 ,  C03C3/06 ,  C03C23/0025 ,  C03C2201/21 ,  C03C2203/40 ,  C03C2203/50 ,  G02B1/02 ,  Y02P40/57

Abstract: Disclosed is a synthetic silica glass for use with light having a wavelength of 150 to 200 nm, which has an OH group at a concentration of less than 1 ppm, an oxygen-excess type defect at a concentration of 1×1016 defects/cm3 or less, a hydrogen molecule at a concentration of less than 1×1017 molecules/cm3, and a non-bridging oxygen radical at a concentration of 1×1016 radicals/cm3 or less in the state after the synthetic silica glass is irradiated with light of a xenon excimer lamp having an energy density of 10 mW/cm2 and 3 kJ/cm2 or with light of an F2 laser by 107 pulses at an energy density of 10 mJ/cm2/pulse. The synthetic silica glass can exhibit excellent resistance to ultraviolet light with a wavelength of 150 to 190 nm when incorporated in a device using ultraviolet light with a wavelength of 150 to 190 nm as a light source.

Abstract translation: 公开了一种合成石英玻璃，其用于波长为150至200nm的光，其具有浓度小于1ppm的OH基，浓度为1×10 16的氧过量型缺陷， SUP>缺陷/ cm 3以下，浓度小于1×10 17分子/ cm 3的氢分子， 在合成石英玻璃用具有能量密度的氙准分子灯的光照射之后的状态下，以1×10 16个/ cm 3以下的浓度桥接氧自由基 10mW / cm 2和3kJ / cm 2的光，或者具有10 2激光的光的10 / >脉冲，能量密度为10mJ / cm 2 /脉冲。 合成石英玻璃当掺入使用波长为150〜190nm的紫外光的装置中作为光源时，可以表现出优异的抗紫外线，波长为150〜190nm。

公开(公告)号：US20050120751A1

公开(公告)日：2005-06-09

申请号：US10959331

申请日：2004-10-07

Applicant: Dennis Simons ,  Jelle Terpsma ,  Frans Gooijer

Inventor： Dennis Simons ,  Jelle Terpsma ,  Frans Gooijer

IPC: C03B37/014 ,  C03B37/018

CPC classification number: C03B37/01807 ,  C03B37/01413 ,  C03B37/0183 ,  C03B2201/04 ,  C03B2201/075

Abstract: The present invention relates to a method for manufacturing a preform for optical fibres, wherein deposition of glass-forming compounds on the substrate takes place. The present invention furthermore relates to a method for manufacturing optical fibres, wherein one end of a solid preform is heated, after which an optical fibre is drawn from said heated end.

Abstract translation: 本发明涉及一种用于制造光纤预制棒的方法，其中玻璃化合物在基片上的沉积发生。 本发明还涉及一种制造光纤的方法，其中固体预成型件的一端被加热，之后从所述加热端拉出光纤。

公开(公告)号：US06817213B2

公开(公告)日：2004-11-16

申请号：US09982015

申请日：2001-10-19

Applicant: Yoshinori Ishida

Inventor： Yoshinori Ishida

IPC: C03B37018

CPC classification number: C03C25/607 ,  C03B37/0124 ,  C03B37/01413 ,  C03B37/01446 ,  C03B2201/075 ,  C03B2201/22 ,  C03B2201/31 ,  C03B2203/22 ,  C03C25/64

Abstract: Methods of fabricating an optical fiber preform and a method of fabricating an optical fiber of the invention realize the fabrication of an optical fiber having desirable transmission characteristics in the entire wavelength rage of about 1.3 to 1.6 &mgr;m. The fabrication method comprises a porous core rod producing step of depositing a first cladding (3) having an outer diameter D so as to surround a core (2) having an outer diameter d to produce a porous core rod (1) of D/d≧4.0 by VAD. Then, the porous core rod (1) is dehydrated to reduce the OH group concentration to 0.8 ppb or less by weight ratio. The porous core rod (1) is formed to be transparent for a vitrified core rod (4) and is heated and stretched. Thereafter, a second cladding is obtained by depositing a second porous cladding (5) around the vitrified core rod (4) by VAD to be dehydrated, transparent and vitrified. The optical fiber preform thus fabricated is drawn to form into an optical fiber and is then allowed to stand in a deuterium gas atmosphere for a predetermined period.

Abstract translation: 制造光纤预制棒的方法和本发明的制造光纤的方法实现了在整个波长范围内具有理想的传输特性的光纤的制造，其大约为1.3到1.6μm。 该制造方法包括多孔芯棒制造步骤，沉积具有外径D的第一包层（3）以包围具有外径d的芯（2）以产生D / d的多孔芯棒（1） > = VAD。 然后，将多孔芯棒（1）脱水，将OH基浓度按重量比降低至0.8ppb以下。 多孔芯棒（1）形成为对于玻璃化芯棒（4）是透明的，并被加热和拉伸。 此后，通过VAD将玻璃化芯棒（4）周围沉积第二多孔包层（5）以进行脱水，透明和玻璃化，获得第二包层。 将如此制造的光纤预制件拉制成光纤，然后在氘气气氛中放置预定时间。

公开(公告)号：US06807823B2

公开(公告)日：2004-10-26

申请号：US10298924

申请日：2002-11-19

Applicant: Yuichi Ohga ,  Tadashi Enomoto

Inventor： Yuichi Ohga ,  Tadashi Enomoto

IPC: C03C306

CPC classification number: C03C23/0025 ,  C03B19/1423 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2207/30 ,  C03B2207/32 ,  C03B2207/36 ,  C03B2207/70 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2203/54

Abstract: A process for producing fluorine-containing glass. An SiO2 soot is synthesized by hydrolyzing SiCl4. The soot is heated in a chlorine-compound-free atmosphere containing a fluorine compound gas to form a fluorine-containing silica glass. The glass contains not more than 10 ppm OH group, not more than 10 ppm Cl, and not less than 1,000 ppm F. The concentration ratio of F/Cl is 10,000 or more.

Abstract translation: 含氟玻璃的制造方法。 通过水解SiCl4合成SiO 2烟炱。 烟灰在含氟化合物气体的无氯化合物的气氛中加热，形成含氟二氧化硅玻璃。 该玻璃含有不超过10ppm的OH基团，不超过10ppm的Cl，且不小于1,000ppm F.F / Cl的浓度比为10,000以上。

公开(公告)号：US20040206127A1

公开(公告)日：2004-10-21

申请号：US10840877

申请日：2004-05-06

Inventor： Calvin T. Coffey ,  Mark E. L'Antigua ,  Clinton D. Osterhout ,  Amy L. Rovelstad ,  Kashyap H. Shah

IPC: C03B037/075 ,  C03B037/018

CPC classification number: C03B19/106 ,  C03B19/1415 ,  C03B19/1423 ,  C03B37/01413 ,  C03B37/0142 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2207/85

Abstract: The present invention relates to a method of making a soot particle and apparatus for making such soot particle. Preferably the method of making the soot particle is substantially free of the step of combusting a fuel and substantially free of the step of forming a plasma. Preferably, the apparatus is devoid of a heating element associated with both combustion and formation of a plasma. A preferred technique for at least one heating step for forming the doped soot particle is induction heating.

Abstract translation: 本发明涉及制备烟灰颗粒的方法和制造这种烟灰颗粒的装置。 优选地，制造烟灰颗粒的方法基本上没有燃烧燃料的步骤，并且基本上没有形成等离子体的步骤。 优选地，该装置没有与燃烧和等离子体的形成相关联的加热元件。 用于形成掺杂烟灰颗粒的至少一个加热步骤的优选技术是感应加热。

公开(公告)号：US20040200240A1

公开(公告)日：2004-10-14

申请号：US10819176

申请日：2004-04-07

Applicant: Shin-Etsu Chemical Co., Ltd.

Inventor： Jun Abe ,  Nobuyasu Mantoku

IPC: C03B037/075

CPC classification number: C03B37/01446 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2203/22 ,  C03C3/06 ,  C03C13/046 ,  C03C2201/12 ,  C03C2203/22

Abstract: A method for manufacturing a fluorine-doped quartz glass article by sintering a porous glass preform moving in a heat zone in an atmosphere of a fluorine gas is disclosed, wherein a fluorine gas process is performed by setting a moving speed of the porous glass preform in the heat zone heated at 1000null C. or more in order that L/V is 40 minutes or more, where L is the length (mm) of a heater, and V is the moving speed (mm/min). The temperature of the heat zone may be vitrification temperature. The fluorine gas process may be performed in the heat zone which is at 1000null C. or more not to perform a vitrification process, and then the vitrification process maybe performed by increasing the temperature of the heat zone.

Abstract translation: 公开了一种通过烧结在氟气氛中的加热区中移动的多孔玻璃预制件来制造氟掺杂石英玻璃制品的方法，其中通过将多孔玻璃预制件的移动速度设定为 加热区域为1000℃以上，以使L / V为40分钟以上，其中L为加热器的长度（mm），V为移动速度（mm / min）。 加热区的温度可以是玻璃化温度。 氟气处理可以在1000℃以上的加热区域进行，不进行玻璃化处理，然后可以通过提高加热区域的温度来进行玻璃化处理。

公开(公告)号：US06783898B2

公开(公告)日：2004-08-31

申请号：US09876194

申请日：2001-06-06

Applicant: George Edward Berkey ,  Lisa Anne Moore ,  Charles Chunzhe Yu

Inventor： George Edward Berkey ,  Lisa Anne Moore ,  Charles Chunzhe Yu

IPC: G03F900

CPC classification number: C03B23/07 ,  C03B19/1415 ,  C03B19/1423 ,  C03B19/1453 ,  C03B19/1469 ,  C03B19/1492 ,  C03B23/043 ,  C03B23/045 ,  C03B23/051 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/02 ,  C03B2207/06 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/52 ,  C03B2207/54 ,  C03B2207/66 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2203/50 ,  G03F1/60

Abstract: The invention includes methods of making lithography photomask blanks. The invention also includes lithography photomask blanks and preforms for producing lithography photomask. The method of making a lithography photomask blank includes providing a soot deposition surface, producing SiO2 soot particles and projecting the SiO2 soot particles toward the soot deposition surface. The method includes successively depositing layers of the SiO2 soot particle on the deposition surface to form a coherent SiO2 porous glass preform body comprised of successive layers of the SiO2 soot particles and dehydrating the coherent SiO2 glass preform body to remove OH from the preform body. The SiO2 is exposed to and reacted with a fluorine containing compound and consolidated into a nonporous silicon oxyfluoride glass body with parallel layers of striae. The method further includes forming the consolidated silicon oxyfluoride glass body into a photomask blank having a planar surface with the orientation of the striae layer parallel to the photomask blank planar surface.

Abstract translation: 本发明包括制造光刻光掩模坯料的方法。 本发明还包括光刻光掩模坯料和用于生产光刻光掩模的预成型件。 制造光刻光掩模坯料的方法包括提供烟灰沉积表面，产生SiO 2烟灰颗粒并将SiO 2烟灰颗粒投射到烟灰沉积表面。 该方法包括在沉积表面上依次沉积SiO 2烟灰颗粒的层，以形成由SiO 2烟灰颗粒的连续层组成的粘结SiO 2多孔玻璃预制体，并使相干的SiO 2玻璃预制体脱水以从预成型体中去除OH。 将SiO 2暴露于含氟化合物并与其反应，并固化成具有平行的条纹层的无孔氟氧化硅玻璃体。 该方法还包括将固化的氟氧化硅玻璃体形成为具有平坦表面的光掩模坯料，其中条纹层的取向平行于光掩模坯料平面。