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    Filtereinheit mit einstellbarer Wellenlänge sowie eine Anordnung mit der Filtereinheit
    291.
    发明公开
    Filtereinheit mit einstellbarer Wellenlänge sowie eine Anordnung mit der Filtereinheit 审中-公开
    过滤器单元具有可调节的波长，并与过滤器单元的布置

    公开(公告)号：EP1564535A1

    公开(公告)日：2005-08-17

    申请号：EP04020810.0

    申请日：2004-09-02

    Applicant: Technomedica AG

    Inventor： Linder, Patrick

    IPC: G01J3/14 ,  G02B5/04

    CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/04 ,  G01J3/14 ,  G01J3/2823 ,  G02B5/045 ,  G02B5/20

    Abstract: Filtereinheit (10) zum Filtern von Licht, wobei eine erste Maske (3), eine Prismeneinheit (7) und eine zweite Maske (8) vorgesehen sind. Die Prismeneinheit (7) ist zwischen den beiden Masken (3, 8) angeordnet, wobei die erste (3) und die zweite Maske (8) korrespondierende Öffnungen aufweisen und ein Öffnungspaar bilden. Für mindestens ein Öffnungspaar ist ein Prisma in der Prismeneinheit (7) vorgesehen. Damit wird eine präzise und schmalbandige Filtereinheit erhalten. Des Weiteren sind eine Anordnung mit der Filtereinheit sowie eine Vorrichtung zum Erfassen von Bildern angegeben.

    Abstract translation: 光过滤器单元（10）具有一个掩模（3），一个棱镜单元（7）和第二掩模（8）。 棱镜单元在两个掩模之间设置。 掩模具有对准对开口与每个对开口对准的棱镜单元的棱镜。 因此本发明涉及一种在装配有本发明的在过滤器单元和设置成邻近所述第二掩模的光敏层（2）。

    SPECTRAL DISCRIMINATION APPARATUS AND METHOD
    292.
    发明公开
    SPECTRAL DISCRIMINATION APPARATUS AND METHOD 有权
    设备和方法进行频谱DISTINCTION

    公开(公告)号：EP1549991A1

    公开(公告)日：2005-07-06

    申请号：EP03732687.3

    申请日：2003-06-04

    Applicant: Medical Research Council

    Inventor： AMOS, Bradshaw William

    IPC: G02B26/00 ,  G02B21/00

    CPC classification number: G01J3/32 ,  G01J3/0229 ,  G01J3/14 ,  G01J2003/326 ,  G02B21/0024

    Abstract: There is provided spectral discrimination apparatus for use in a scanning optical microscope, the spectral discrimination apparatus comprising dispersive means (31) and frequency selective means including a rotatable disc (36) or discs. The discs are formed with apertures or spiral slots which, on rotation of the disc or discs, controls the frequency of light transmitted by the apparatus. The apparatus includes a detector (39) for receiving light from the frequency selective means. The, or each, rotatable disc (36) is positioned at an aperture plane after the dispersive means (31), although this is not essential if the rotatable disc has its outer periphery shaped to provide a cam surface engaged by a cam follower. There is also provided a method of spectral discrimination in a scanning optical microscope, comprising dispersing the light and passing the light through frequency selective means in which the form of rotating discs controls the frequency of transmitted light.

    Improved sample inspection system
    293.
    发明公开
    Improved sample inspection system 有权
    改进了样品检测系统

    公开(公告)号：EP1508799A2

    公开(公告)日：2005-02-23

    申请号：EP04024371.9

    申请日：1998-09-18

    Applicant: KLA-Tencor Corporation

    Inventor： Vaez-Iravani, Mehdi ,  Stokowski, Stanley ,  Zhao, Guoheng

    IPC: G01N21/95

    CPC classification number: G01J3/44 ,  G01J3/0216 ,  G01J3/0229 ,  G01N21/21 ,  G01N21/47 ,  G01N21/474 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8825 ,  G01N2021/8845 ,  G01N2021/8848 ,  G01N2201/065

    Abstract: A curved mirrored surface (78) is used to collect radiation scattered by a sample surface (76a) and originating from a normal illumination beam (70) and an oblique illumination beam (90). The collected radiation is focused to a detector (80). Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams (70, 90) on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors 78 to restrict detection to certain azimuthal angles.

    Abstract translation: 使用弯曲镜像表面（78）来收集由样本表面（76a）散射并且源自正常照明光束（70）和斜向照明光束（90）的辐射。 所收集的辐射被聚焦到检测器（80）。 通过采用两个不同波长的辐射，通过有意地在由两个光束照射的光点之间引入偏移或者通过将正常照明光束和倾斜照明光束（70,90）切换到其上，并且通过使用两个不同波长的辐射来区分源自正常照明光束和倾斜照明光束的散射辐射 交替关闭。 可以通过检测倾斜照明光束的镜面反射并响应于此改变照明方向来校正由样本高度变化引起的光束位置误差。 蝴蝶形空间滤波器可以与曲面镜辐射收集器78结合使用，以将检测限制在某些方位角。

    MULTIPLE WAVELENGTH ILLUMINATOR
    295.
    发明公开
    MULTIPLE WAVELENGTH ILLUMINATOR 审中-公开
    多波长照射装置

    公开(公告)号：EP1414517A2

    公开(公告)日：2004-05-06

    申请号：EP02746681.2

    申请日：2002-06-26

    Applicant: Photomed Technologies, Inc.

    Inventor： GARDINER, Allan ,  HABER, Constance

    IPC: A61N1/00

    CPC classification number: G01J3/02 ,  A61B5/0488 ,  A61B5/0531 ,  A61N5/0619 ,  A61N2005/0663 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/10 ,  G01J2003/1213

    Abstract: Illuminators and systems are provided that permit the production of a beam of electromagnetic radiation having a selected peak wavelength band width, intensity, pulse frequency and pulse duration for a variety of analytical and therapeutic applications. The multiple beam illuminators (100) use filter elements arranged into filter arrays (309-311), having characteristic wavelength absorption. By providing a series of filter arrays (220) formed into a tracks having defined wavelength offsets, radiation passing through a portion of a track can be modified to include selected wavelength and bandwidth. Selection of a peak wavelength(s) and bandwidth can be accomplished using mechanical interrupter (152), mechanical shutter (1708), or electro-optical device (2000) including liquid crystal device. Multiple output beams (132,136) permit the coordinated illumination of a target, and sensors (601a-601c) provide feedback regarding the effects of illumination of the target. Computer storage devices (606), programs (604), and controllers (603) can provide easy selection of the characteristics of the output beams. Output beams (605) can have a variety of different shapes and configurations, depending on the desired application.

    OPTICAL SENSOR DEVICE AND METHOD FOR SPECTRAL ANALYSIS
    297.
    发明公开
    OPTICAL SENSOR DEVICE AND METHOD FOR SPECTRAL ANALYSIS 有权
    光学传感器设备和方法频谱

    公开(公告)号：EP1344193A1

    公开(公告)日：2003-09-17

    申请号：EP01271610.6

    申请日：2001-12-18

    Applicant: CAMBRIDGE CONSULTANTS LIMITED

    Inventor： KLOCK, Hansjörg ,  JONES, Robert ,  HAZEL, Michael, Stuart

    IPC: G07D7/12 ,  G01J3/28 ,  G01J3/18 ,  G01J3/04

    CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/0294 ,  G01J3/04 ,  G01J3/18 ,  G01J3/2803 ,  G07D7/1205

    Abstract: An optical detection device for validating bank rates has several input apertures, an imaging device (12), a diffraction grating (15.1, 15.2, 15.3) associated with each input aperture (11.1, 11.2, 11.3) and a detection array (17). The diffraction grating (15.1, 15.2, 15.3) is rotated at angle of e.g.45 degrees relative to the orientation of the linear detection array (17). This arrangement enables the spectra of multiple points to be measured simultaneously. The angle of rotation, the pitch of the apertures (11.1, 11.2, 11.3) and a pitch of the diffraction grating (15.1, 15.2, 15,3) are selected in such a way that the spectra of sad multiple points are contiguously mapped onto the detection array (17) has a single linear array of color sensitive detection pixels. The acxis of the linear array is offset with respect to an optical axis (7) of the optical detection device.

    Broadband spectroscopic rotating compensator ellipsometer
    300.
    发明公开
    Broadband spectroscopic rotating compensator ellipsometer 失效
    宽带光谱旋转补偿椭偏仪

    公开(公告)号：EP1197741A2

    公开(公告)日：2002-04-17

    申请号：EP01204896.3

    申请日：1997-07-22

    Applicant: THERMA-WAVE INC.

    Inventor： Aspnes , David E. ,  Ospal, Jon

    IPC: G01N21/21 ,  G01J4/04 ,  G01B11/06

    CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

    Abstract: An ellipsometer for analyzing a sample (2) using a broad range of wavelengths includes a light source (4) for generating a beam of polychromatic light for interacting with the sample (2). A polarizer (6) polarizes the light beam before the light beam (14) interacts with the sample (2). A rotating compensator (8) induces phase retardations of a polarization state of the light beam. The range of wavelengths and the compensator (8) are such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 90° to 180°. An analyzer (10) interacts with the light beam after the light beam interacts with the sample (2). A detector (12) measures the intensity of light after interacting with the analyzer (10) as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor (23) determines the polarization state of the light, after interacting with the analyzer (10), from the light intensities measured by the detector (12).

    Abstract translation: 用于使用宽范围波长分析样品（2）的椭圆偏振仪包括用于产生用于与样品（2）相互作用的多色光束的光源（4）。 偏振器（6）在光束（14）与样本（2）相互作用之前使光束偏振。 旋转补偿器（8）引起光束的偏振状态的相位延迟。 波长范围和补偿器（8）使得至少第一相位延迟值被感应，该第一相位延迟值处于基本上90°至180°的有效延迟的主要范围内。 分析仪（10）在光束与样品（2）相互作用后与光束相互作用。 检测器（12）根据补偿器角度和波长（优选同时在所有波长）测量与分析器（10）相互作用后的光强度。 处理器（23）根据由检测器（12）测量的光强度在与分析器（10）相互作用之后确定光的偏振状态。

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