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    Ozone system for multi-chamber tools
    302.
    发明申请
    Ozone system for multi-chamber tools 有权
    臭氧系统多室工具

    公开(公告)号：US20070020160A1

    公开(公告)日：2007-01-25

    申请号：US11482508

    申请日：2006-07-07

    Applicant: Vitaly Berkman ,  Thomas Ryan

    Inventor： Vitaly Berkman ,  Thomas Ryan

    IPC: B01J19/08

    CPC classification number: C01B13/11 ,  C01B2201/40 ,  C01B2201/64 ,  C01B2201/90 ,  G05D11/138 ,  Y10T137/0318

    Abstract: An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.

    Abstract translation: 一种用于控制与多室工具相关的臭氧浓度的改进的系统和方法。 该系统和方法涉及与臭氧发生器组合的第一和第二浓度控制器。 第一集中控制器检测EVENT（即，多室工具中的一个室内进行在线或离线），并且响应于根据预测控制算法向臭氧发生器提供功率指令。 第一个浓度控制器具有快速（即约1秒）响应时间。 在EVENT期间，第二个浓度控制器被从臭氧发生器屏蔽，但是在EVENT之后经过了一段时间后才控制发电机。 第二浓度控制器具有比第一浓度控制器更慢的响应时间，然而第二浓度控制器为系统提供长期稳定性，并且可以用于向预测控制算法提供更新的数据。

    Ozone generator system and ozone generating method
    303.
    发明申请
    Ozone generator system and ozone generating method 有权
    臭氧发生器系统和臭氧发生方法

    公开(公告)号：US20060049738A1

    公开(公告)日：2006-03-09

    申请号：US10538780

    申请日：2004-12-14

    Applicant: Yoichiro Tabata ,  Yujiro Okihara ,  Masayuki Tetsuyasaitsu ,  Hatsuo Yotsumoto

    Inventor： Yoichiro Tabata ,  Yujiro Okihara ,  Masayuki Tetsuyasaitsu ,  Hatsuo Yotsumoto

    IPC: H01J27/26

    CPC classification number: C01B13/11 ,  B01J35/004 ,  C01B2201/12 ,  C01B2201/32 ,  C01B2201/34 ,  C01B2201/60 ,  C01B2201/64 ,  C01B2201/70 ,  C01B2201/80 ,  C01B2201/82 ,  C01B2201/90

    Abstract: An ozone generating system and an ozone generating method producing ozone at a high concentration and operating at high efficiency, in which a raw material gas with no nitrogen added and mainly containing oxygen is used. The amount of generation of NOX by-product is null. A raw material gas not containing nitrogen and mainly containing oxygen is supplied to an ozone generator, an AC voltage is applied to produce discharge light having wavelength of 428 nm to 620 nm, a catalytic material containing a photocatalytic material with a band gap energy of 2.0 eV to 2.9 eV is provided on an electrode or a dielectric in a discharge region, gas pressure is kept at 0.1 MPa to 0.4 MPa, and ozone is generated.

    Abstract translation: 臭氧发生系统和臭氧发生方法以高浓度生产臭氧并以高效率运行，其中使用不添加氮并主要含氧的原料气体。 副产物的产生量为零。 将不含氮并主要含氧的原料气体供给臭氧发生器，施加交流电压以产生波长为428nm至620nm的放电光，含有带隙能为2.0的光催化材料的催化材料 在放电区域的电极或电介质上设置eV〜2.9eV，气体压力保持在0.1MPa〜0.4MPa，产生臭氧。

    Ozonizer
    306.
    发明申请
    Ozonizer 有权
    臭氧发生器

    公开(公告)号：US20030095898A1

    公开(公告)日：2003-05-22

    申请号：US10155069

    申请日：2002-05-28

    Applicant: Mitsubishi Denki Kabushiki Kaisha

    Inventor： Akaru Usui ,  Youichiro Tabata ,  Yujiro Okihara ,  Hiromichi Komiya ,  Yuji Ganryu ,  Masaki Kuzumoto ,  Noboru Wada ,  Koji Ohta ,  Shigenori Yagi ,  Hirozoh Kanegae

    IPC: B01J019/08

    CPC classification number: C01B13/11 ,  C01B2201/12 ,  C01B2201/22 ,  C01B2201/32 ,  C01B2201/64 ,  C01B2201/76

    Abstract: An ozonizer has a flat plate-shaped low voltage electrode 7, a flat plate-shaped high voltage electrode 3 facing a main surface of the low voltage electrode 7. The ozonizer also has a flat plate-shaped dielectric 5 and a spacer for forming a discharge gap 6 of a thin thickness in a laminating direction provided between the low voltage electrode 7 and the high voltage electrode 3, a high voltage electrode cooling unit 2 for forming a cooling water passage 2c insulated from the high voltage electrode 3 inside the high voltage electrode 3. An alternating voltage is applied between the low voltage electrode 7 and the high voltage electrode 3 and a discharge is produced in the discharge gap 6 injected with oxygen gas to produce ozone gas.

    Abstract translation: 臭氧发生器具有平板状低电压电极7，面对低电压电极7的主面的平板状高压电极3.臭氧发生器还具有平板状电介质5和用于形成 位于低电压电极7和高电压电极3之间的层叠方向上的厚度薄的放电间隙6，用于形成与高电压内部的高电压电极3绝缘的冷却水通道2c的高压电极冷却单元2 在低电压电极7和高电压电极3之间施加交流电压，并且在注入氧气的放电间隙6中产生放电以产生臭氧气体。

    Apparatus for producing ozone from oxygen
    307.
    发明授权
    Apparatus for producing ozone from oxygen 失效
    用于从氧气生产臭氧的装置

    公开(公告)号：US5364600A

    公开(公告)日：1994-11-15

    申请号：US785542

    申请日：1991-10-31

    Applicant: Hans-H. Stiehl ,  Jurgen Schweckendiek

    Inventor： Hans-H. Stiehl ,  Jurgen Schweckendiek

    IPC: C01B13/11 ,  H01T23/00 ,  B01J19/12

    CPC classification number: C01B13/11 ,  C01B2201/14 ,  C01B2201/22 ,  C01B2201/24 ,  C01B2201/64 ,  C01B2201/76

    Abstract: An apparatus for producing ozone from oxygen includes at least one discharge electrode and counterelectrode which are separated by a dielectric of high heat conductivity and tightly bear on the dielectric that is cooled in a direct manner. The discharge electrode, around which oxygen flows, forms a non-closed surface and is in the form of a wire. By applying an electric field, the discharge electrode triggers a discharge in the gas space surrounding the discharge electrode and on the dielectric. The discharge electrode is made of molybdenum, tungsten, niobium or tantalum and is directly exposed to the oxygen flow.

    Abstract translation: 用于从氧气生产臭氧的装置包括至少一个放电电极和反电极，其由具有高导热性的电介质分离，并且紧紧地承受在直接冷却的电介质上。 氧气流过的放电电极形成非封闭的表面并且呈线状。 通过施加电场，放电电极在放电电极和电介质周围的气体空间中触发放电。 放电电极由钼，钨，铌或钽制成，直接暴露于氧气流中。

    Ozone replenishment system
    308.
    发明授权
    Ozone replenishment system 有权

    公开(公告)号：US11807526B1

    公开(公告)日：2023-11-07

    申请号：US17484030

    申请日：2021-09-24

    Applicant: Bruce Lockaby

    Inventor： Bruce Lockaby

    IPC: C01B13/11

    CPC classification number: C01B13/11 ,  C01B2201/20 ,  C01B2201/50 ,  C01B2201/64 ,  C01B2201/82

    Abstract: An ozone replenishment system including a housing assembly, an electrolysis assembly, a power assembly, and an ozone assembly is disclosed herein. The housing assembly includes a hollow tower. The power assembly includes a battery. The electrolysis assembly includes a reservoir filled with an electrolyte. The electrolysis assembly also includes an anode electrode a cathode electrode disposed into the reservoir. The anode electrode and the cathode electrode are connected to the battery. The electrolysis assembly produces oxygen and dihydrogen. The oxygen is captured by the hollow tower. The ozone assembly includes a fan that allows the oxygen to cross the hollow tower. The ozone assembly further includes a plurality of ultraviolet lights to convert the oxygen into ozone. The ozone is replenishment into the atmosphere.

    Ozone generating device
    310.
    发明授权
    Ozone generating device 有权

    公开(公告)号：US09932232B2

    公开(公告)日：2018-04-03

    申请号：US15540122

    申请日：2016-02-04

    Applicant: Mitsubishi Electric Corporation

    Inventor： Yusuke Nakagawa ,  Noboru Wada ,  Takahisa Nagayama ,  Yasutaka Inanaga ,  Gaku Oinuma ,  Mamiko Yoshida

    IPC: C01B13/11 ,  C02F1/78

    CPC classification number: C01B13/115 ,  C01B13/11 ,  C01B2201/64 ,  C01B2201/74 ,  C01B2201/90 ,  C02F1/78 ,  C02F2201/782

    Abstract: In an ozone generating device including a discharge unit for discharging a material gas that flows through a discharge space formed between two electrodes to generate ozone and a cooling unit for radiating heat which is generated by the discharging, wherein the material gas is obtained by vaporizing a liquefied raw material, the cooling unit includes a first cooling unit through which a first refrigerant flows in contact with one of the two electrodes and a second cooling unit which is provided further to the downstream side of flow of the material gas in the discharge unit than the first cooling unit, and in which the cold heat source is the liquefied raw material and the temperature of the second refrigerant introduced to the second cooling unit is set to be lower than the temperature of the first refrigerant introduced to the first cooling unit.

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