公开(公告)号：EP1169624A1

公开(公告)日：2002-01-09

申请号：EP01905490.7

申请日：2001-02-15

Applicant: Varian Australia Pty. Ltd.

Inventor： WILSON, Philip, Valmont ,  WILLIAMS, Mark, Richard ,  BRICKER, Dower, Cameron ,  HAMMER, Michael, Ron ,  MASTERS, Martin, Keith ,  CAMPBELL, Stewart, Ralph ,  LAYTON, Peter, George

IPC: G01J3/02 ,  G01J3/36 ,  G01N21/27 ,  G01N21/31

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0227 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/1809 ,  G01J3/2803 ,  G01J5/62 ,  G01J2003/1828 ,  G01N21/27 ,  G01N21/31

Abstract: A method and apparatus for the spectrochemical analysis of a sample in which a solid state array detector (82) is used to detect radiation (62) of spectrochemical interest. The invention involves the use of a shutter (72) adjacent the entrance aperture (70) of a polychromator (74-80) to expose the detector (82) to the radiation (62) for varying lengths of time whereby for short duration exposure times charge accumulation in elements (i.e. pixels) of the detector (82) due to high intensity components of the radiation is limited and for longer exposure times charge accumulation in elements (pixels) of the detector (82) due to feeble intesity components of radiation (62) is increased. This ensures that each reading of the detector (82) includes at least one exposure in which the amount of charge accumulated at each wavelength of interest is neither too little or too great. The problems of feeble radiation components not being accurately measurable and of high intensity radiation components exceeding the charge carrying capacity of elements (pixels) of the detector (82) are thereby able to be avoided. An attenuator (90) may be placed between the radiation source (60) and the detector (82) to permit longer exposure times to be used for very high intensity radiation.

公开(公告)号：EP1064526A1

公开(公告)日：2001-01-03

申请号：EP99919187.7

申请日：1999-03-26

Applicant: INSTITUT FÜR PHYSIKALISCHE HOCHTECHNOLOGIE E.V.

Inventor： PAWLIK, Horst ,  RIESENBERG, Rainer ,  SEIFERT, Thomas

IPC: G01J3/04 ,  H04N3/15 ,  G01S3/781

CPC classification number: G01J3/02 ,  G01J1/04 ,  G01J1/0403 ,  G01J1/0437 ,  G01J1/0448 ,  G01J1/42 ,  G01J3/0229 ,  G01J3/0237 ,  G01J3/06 ,  G01J3/2846

Abstract: The invention relates to a system for raising the spatial resolution of radiation detectors. The aim of the system provided for in the invention is to make it possible to raise spatial resolution in variably predefinable manners and to do so with a low number of component groups. To this end a land (2) which is not transparent to the radiation to be detected is positioned in front of each radiation detecting element (1). The width (ba) of the land is fixed such that it is a fraction of the width of the radiation detector and the land (2) can be displaced across the entire width of the detector by means of an adjustment element (3). Discrete adjustment positions of the adjustment element (3) can be set by means of a control and data line (4) and in a control and evaluation unit (5) said discrete positions can be allocated to the corresponding intensity signals of the radiation detecting element (1) transmitted via a line (6). Following numerical transformation, the intensity curve of the radiation to be detected can be represented at greater resolution in accordance with the ratio detector width to land width.

公开(公告)号：EP1026487A2

公开(公告)日：2000-08-09

申请号：EP00101694.8

申请日：2000-02-03

Applicant: Cymer, Inc.

Inventor： Ershov, Alexander I.

IPC: G01J3/12

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/027

Abstract: A double pass etalon based spectrometer. Spectral components of a diffused beam are angularly separated as they are transmitted through an etalon. A retroreflector reflects the transmitted components back through the etalon. Twice transmitted spectral components are focused onto a light detector which in a preferred embodiment is a photo diode array. The spectrometer is very compact producing precise fringe data permitting bandwidth measurements with precision needed for microlithography for both Δλ FWHM and Δλ 95% .

Abstract translation: 基于双通道标准具的光谱仪。 漫射光束的光谱分量在透过标准具时被角度分离。 后向反射器将透射的组分反射回标准具。 两次透射的光谱分量被聚焦到光检测器上，该光检测器在一个优选实施例中是光电二极管阵列。 该光谱仪非常紧凑，可以生成精确的条纹数据，从而可以精确测量ΔλFWHM和Δλ95％的微光刻所需的带宽。

公开(公告)号：EP0535753B2

公开(公告)日：1999-06-30

申请号：EP92203010.1

申请日：1992-09-30

Applicant: DILOR

Inventor： Delhaye, Michel ,  Da Silva, Edouard ,  Martinez, Gérard

IPC: G01J1/00 ,  G01J3/12 ,  G01J3/18

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0262 ,  G01J3/44 ,  G01J2003/1814 ,  G01N2021/6417 ,  G01N2201/0642 ,  G02B5/005

公开(公告)号：EP0780670A1

公开(公告)日：1997-06-25

申请号：EP96309434.7

申请日：1996-12-23

Applicant: SHIMADZU CORPORATION

Inventor： Iida, Atsuhiro ,  Yokota, Kazumi ,  Ikeda, Eiji ,  Sasayama, Tomoki

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0235 ,  G01J3/0237 ,  G01J3/024 ,  G01J3/0267 ,  G01J3/0278 ,  G01J3/0289 ,  G01J3/2803

Abstract: A zoom lens (40) is provided between a sample (2) and a slit (12) of a spectrophotometer to change the size of the image of the sample on the slit plane. A picture of the sample is taken by the zoom lens (40) and is shown on a display screen (33), on which a window is superimposed. When an operator changes the location of the window, the sample (2) is moved accordingly and, when the operator changes the size of the window, the focal length of the zoom lens (40) is changed, whereby the size of the measurement area is changed. By changing the size of the measurement area on the slit plane while the size of elementary photo-sensors of a photo-detector (17) is unchanged, the resolution of two-dimensional spectrophotometry can be changed.

Abstract translation: 在分光光度计的样品（2）和狭缝（12）之间设置变焦透镜（40），以改变样品在狭缝平面上的图像尺寸。 样品的照片由变焦镜头（40）拍摄，并且被显示在叠加了窗口的显示屏幕（33）上。 当操作者改变窗口的位置时，相应地移动样品（2），并且当操作者改变窗口的大小时，改变变焦镜头（40）的焦距，由此测量区域的尺寸 改变了 通过在光电检测器（17）的基本光电传感器的尺寸不变的情况下改变狭缝平面上的测量区域的尺寸，可以改变二维分光光度法的分辨率。

公开(公告)号：EP0653051A4

公开(公告)日：1995-12-27

申请号：EP93917331

申请日：1993-07-27

Applicant: PATCHEN CALIFORNIA INC

Inventor： BECK JIM ,  VYSE TOM

IPC: A01M7/00 ,  A01M21/00 ,  G01J1/04 ,  G01J1/42 ,  G01J1/44 ,  G01J3/42 ,  G01J3/50 ,  G01N21/27

CPC classification number: G01J3/50 ,  A01M7/0089 ,  A01M21/00 ,  G01J1/44 ,  G01J3/0229 ,  G01J3/42 ,  G01J3/501 ,  G01J2001/4242

Abstract: An apparatus and a method are provided for selectively eliminating weeds in agriculture operations. To provide selective elimination, at least two light (radiation) emitters (201, 202), powered by an internal power source, are modulated to switch on and off at very high speeds. Each emitter emits radiation of a different emitter wavelength. The on/off modulation of one emitter is phase shifted by approximately 90 degrees with respect to the modulation of the particular spot on the ground. The light beams (203, 204), provided by the emitters, are reflected off a plant (206) or the soil and are intercepted by a photodetector. Because plants have a characteristic spectral reflectance in regions of the electromagnetic spectrum which can be discriminated from the spectral reflectance of the background earth, the relative amplitudes of the reflected radiation at the two emitter wavelengths varies depending on whether the radiation is reflected off a plant or the soil. A ratio of the radiation at the two emitter wavelengths received by the photodetector is converted to phase. This phase is compared to an initial reference phase of the modulation of one of the emitters. A controller (221) uses this phase information to determine the presence or absence of a plant and then eliminates the weed.

公开(公告)号：EP0426040A1

公开(公告)日：1991-05-08

申请号：EP90120609.4

申请日：1990-10-26

Applicant: HORIBA, LTD.

Inventor： Ukon, Juichiro

IPC: G02B21/00 ,  G02B21/18

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0237 ,  G01J3/0248 ,  G01J3/0289 ,  G01J3/04 ,  G02B21/0096 ,  G02B21/18

Abstract: A microscopic spectrometer is described in which the light from a light source (1) (3) is incident upon a sample (2) and the light, which has been reflected by or transmitted through said sample (2) is subjected to a spectrometric measurement after having passed an object lens. A beam splitter (12) is disposed behind said object lens (3) to form two branched optical paths (a, b), whereas a diaphragm (10, 11) in only one (a) of said optical paths (a, b) at an image plane (4a) thereof is provided. Rejoining means (16-19) for rejoining the light passing along said two branched optical paths (a, b) and positioned behind the respective image planes (4a, 4b) of said paths (a, b) are used in order to observe an image obtained by synthesizing images at their respective image planes (4a, 4b).

Abstract translation: 描述了一种微观光谱仪，其中来自光源（1）（3）的光入射到样品（2）上，并且已经被所述样品（2）反射或透射通过所述样品（2）的光经受光谱测量 经过物镜后。 分束器（12）设置在所述物镜（3）的后面以形成两个分支的光路（a，b），而仅一（a）个所述光路（a，b）中的光阑（10,11） 在其图像平面（4a）处。 使用用于重新连接沿着所述两个分支光路（a，b）通过并位于所述路径（a，b）的各个图像平面（4a，4b）后面的光的重新连接装置（16-19），以便观察 通过在其各自的图像平面（4a，4b）处合成图像而获得的图像。

公开(公告)号：EP0184428A3

公开(公告)日：1988-07-13

申请号：EP85308799

申请日：1985-12-03

Applicant: PRA INTERNATIONAL INC.

Inventor： Levy, Gilbert M. ,  Quaglia, Alexander ,  Lazure, Robert E.

IPC: G01J03/18

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/1809 ,  G01J3/2803 ,  G01J2003/1278

Abstract: An optical arrangement for use in spectrometry uses a masking device which eliminates unwanted spectral regions prior to optically resolving the unmasked information. The optical arrangement comprises an entrance slit to select incidence spectral energy from an energized source and a concave grating of relatively low dispersion to image the spectrum of the entrance slit onto a stationary mask which simultaneously selects spectral regions of the dispersed incident spectral energy. The selected spectral regions are collimated and recombined and directed onto an Echelle grating to disperse with high resolution the selected spectral regions. A concave mirror focuses the dispersed selected spectral regions into a focal plane of highly resolved spectral energy which can be detected to determine the spectral information coming from the source. The optical arrangement is particularly well suited for use with narrow spectral bandwidth spectral information distributed over a large spectral range. In spectroscopy, desired information very often occupies a tiny fraction of the total spectral information presented to a spectrometer. With this optical arrangement, spectral information can be selected from a much broader band spectral information and collected with high resolution on a small curvilinear portion of the output focal plane. The arrangement is particularly useful for absorption, light scattering or emission spectroscopy. It provides a stable mechanical design making it less sensitive to vibration. Manufacturing mechanical tolerances are also less restrictive.

公开(公告)号：EP0241135A3

公开(公告)日：1987-11-25

申请号：EP87301949

申请日：1987-03-06

Applicant: Hewlett-Packard Company

Inventor： Hopkins II, George W. ,  Willis, Barry G.

IPC: G01D03/04 ,  G01N21/00 ,  G02B27/10

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/024

Abstract: An optical relay having a pair of simple lenses and an opaque barrier defining an aperture. In a spectrometer, the optical relay is positioned between a light source and an opaque barrier defining a slit to focus light of a reference wavelength w r onto the slit. The location of the aperture and the choice of w r are selected so that the flux of light through the slit is substantially flat as a function of wavelength.

公开(公告)号：EP0135761A3

公开(公告)日：1987-03-25

申请号：EP84109506

申请日：1984-08-09

Applicant: THE PERKIN-ELMER CORPORATION

Inventor： Young, Eugene F.

IPC: G01J03/28 ,  G01J03/02

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/08 ,  G01J3/453

Abstract: A spectrophotometer includes means for ensuring that the active area of a detector is always filled regardless of the resolution aperture setting of the instrument.